[Scan]
initial_time=2016-01-27T19:14:56
final_time=2016-01-27T19:15:15
ip_count=19
run=1025
dataset=2
scan=90
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08828E-4
ql1_vset=
ql1_vmon=-8.17847E-1
ql1_imon=9.43375E-10
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=2.97499E-10
ql3_vset=
ql3_vmon=-9.13079E0
ql3_imon=1.45893E-9
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=5.00119E-10
mult1=-9.34305E-9
mult2=-2.7246E-9
rf_tmon=-4.27209E-3
rf_agc=3.40245E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=3.85904E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.65672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=2.78953E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=2.63629E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39779E0
lens1_imon=2.71079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.51947E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.92107E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.94821E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=2.88215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=1.88502E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23948E0
cs_ionrep_imon=1.18025E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.90341E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=8.75604E-10
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-5.19248E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.49857E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.35622E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21965E0
ionrepsh_imon=1.73469E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33327E1
lens5b_imon=2.19504E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.50522E-1
os_ea2_imon=-5.80532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70729E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60897E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25945E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=2.8717E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72672E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67562E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.97002E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=2.85149E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.71491E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=1.86709E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92601E3
multa_neg_imon=7.09441E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.45634E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.09081E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.73215E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33775E1
os_fil1_imon=4.41583E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.38619E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60134E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30831E1
cs_fil1_imon=9.97867E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62576E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62484E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.79597E-2
os_fil2_imon=-2.22749E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.81826E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.2346E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21673E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.27492E-2
chamber_ion_pmon=2.15425E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.25965E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.17966E-1	-7.98893E-1	-9.13098E0	-9.14168E0	4.8399E-3	9.36747E-2	2.74076E1	-3.26689E1	-3.26712E1	2.68112E1	2.15145E-9	2.52538E-3	2.52538E-3	6.29645E-3	2.2572E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.18229E-1	-7.98941E-1	-9.13107E0	-9.14183E0	5.05447E-3	9.37223E-2	2.73535E1	-3.2664E1	-3.26358E1	2.67938E1	2.159E-9	2.51847E-3	2.51847E-3	6.29128E-3	2.26639E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-8.18014E-1	-7.9906E-1	-9.131E0	-9.14147E0	4.62532E-3	9.377E-2	2.7229E1	-3.26667E1	-3.26555E1	2.68059E1	2.15219E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.2517E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.18229E-1	-7.98988E-1	-9.13091E0	-9.14166E0	4.48227E-3	9.36508E-2	2.74278E1	-3.26555E1	-3.26113E1	2.68148E1	2.15817E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.25819E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.17895E-1	-7.99227E-1	-9.13079E0	-9.14199E0	4.74453E-3	9.36031E-2	2.71897E1	-3.26567E1	-3.26254E1	2.68166E1	2.15716E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.26639E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.17919E-1	-7.99084E-1	-9.13091E0	-9.14202E0	4.86374E-3	9.35316E-2	2.70546E1	-3.26687E1	-3.26302E1	2.67367E1	2.15519E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.25524E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.17823E-1	-7.99298E-1	-9.13091E0	-9.14199E0	4.88758E-3	9.32693E-2	2.72198E1	-3.26747E1	-3.262E1	2.68947E1	2.15409E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.2517E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.17895E-1	-7.99155E-1	-9.13081E0	-9.1419E0	4.79221E-3	9.33886E-2	2.74775E1	-3.26663E1	-3.26188E1	2.68118E1	2.15533E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.26445E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.17895E-1	-7.98917E-1	-9.13098E0	-9.14187E0	4.55379E-3	9.35793E-2	2.73393E1	-3.26767E1	-3.25812E1	2.68442E1	2.15613E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.269E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.18205E-1	-7.99155E-1	-9.13098E0	-9.14185E0	4.50611E-3	9.37462E-2	2.72144E1	-3.26957E1	-3.26392E1	2.67231E1	2.15706E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.2631E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.1799E-1	-7.98845E-1	-9.13088E0	-9.14171E0	4.673E-3	9.34839E-2	2.74734E1	-3.26836E1	-3.26095E1	2.68082E1	2.15706E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.2631E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.17895E-1	-7.98798E-1	-9.13074E0	-9.14202E0	4.74453E-3	9.36747E-2	2.72856E1	-3.26472E1	-3.26119E1	2.68575E1	2.15887E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.27574E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.17943E-1	-7.98845E-1	-9.13105E0	-9.1419E0	4.673E-3	9.34839E-2	2.71159E1	-3.26823E1	-3.26138E1	2.67776E1	2.15533E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.27219E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.18062E-1	-7.99108E-1	-9.13129E0	-9.14161E0	4.86374E-3	9.36031E-2	2.73105E1	-3.26699E1	-3.26585E1	2.67878E1	2.158E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.2769E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.18181E-1	-7.98774E-1	-9.13098E0	-9.14195E0	5.53131E-3	9.38177E-2	2.75092E1	-3.26832E1	-3.2649E1	2.68348E1	2.15613E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.27295E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.1799E-1	-7.98702E-1	-9.13129E0	-9.14185E0	4.8399E-3	9.34601E-2	2.73982E1	-3.26518E1	-3.26062E1	2.67974E1	2.15808E-9	2.51739E-3	2.51739E-3	6.34518E-3	2.27607E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.1768E-1	-7.98845E-1	-9.13122E0	-9.14192E0	5.03063E-3	9.377E-2	2.74768E1	-3.26685E1	-3.26107E1	2.67794E1	2.158E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.269E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.178E-1	-7.98845E-1	-9.13103E0	-9.1419E0	5.34058E-3	9.33886E-2	2.73748E1	-3.26398E1	-3.26717E1	2.68851E1	2.15519E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.26703E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.17823E-1	-7.98607E-1	-9.131E0	-9.14195E0	5.22137E-3	9.35316E-2	2.72862E1	-3.26343E1	-3.25841E1	2.67144E1	2.15808E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.28775E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.17847E-1	-7.98845E-1	-9.13079E0	-9.14209E0	5.26905E-3	9.35316E-2	2.72672E1	-3.26711E1	-3.26332E1	2.67562E1	2.15425E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.27492E-2