[Scan]
initial_time=2016-01-27T19:15:22
final_time=2016-01-27T19:15:42
ip_count=19
run=1025
dataset=2
scan=91
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.18014E-1
ql1_imon=9.48429E-10
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=3.24631E-10
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=1.4398E-9
ql4_vset=
ql4_vmon=-9.14159E0
ql4_imon=5.53572E-10
mult1=-1.00173E-8
mult2=-2.74256E-9
rf_tmon=-5.02313E-3
rf_agc=3.26006E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.87836E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.51848E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20102E1
lens5a_imon=2.00775E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=2.79962E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02425E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.63635E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35545E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.99099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.53665E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.92828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.11904E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=2.87062E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=1.87219E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26213E0
cs_ionrep_imon=1.1859E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.89909E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=8.73196E-10
tplens_vset=1.4E-1
tplens_vmon=1.6143E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25707E1
iondef3_imon=1.49135E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.72732E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2403E0
ionrepsh_imon=1.74937E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.19746E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74411E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.09742E-1
os_ea2_imon=-8.47495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00534E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.20182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58855E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.59582E-1
os_ef2bup_imon=-5.1603E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=2.87891E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72721E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68319E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.00424E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=2.77281E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.67526E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56117E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=1.99323E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82586E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86849E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.60107E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.52155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.52675E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.65806E0
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33804E1
os_fil1_imon=4.27167E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.25695E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60345E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=9.98318E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6299E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62593E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7751E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.8572E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.16044E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-1.93316E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21771E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.25674E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.80916E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.17871E-1	-7.98655E-1	-9.13124E0	-9.14142E0	4.95911E-3	9.32932E-2	2.73994E1	-3.26422E1	-3.26693E1	2.67937E1	2.15332E-9	2.52867E-3	2.52867E-3	6.32386E-3	2.27295E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.1799E-1	-7.99346E-1	-9.13119E0	-9.14168E0	4.95911E-3	9.36985E-2	2.7218E1	-3.26849E1	-3.26332E1	2.685E1	2.15238E-9	2.51935E-3	2.51935E-3	6.32112E-3	2.2631E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.18229E-1	-7.99227E-1	-9.13105E0	-9.14164E0	4.673E-3	9.36985E-2	2.74181E1	-3.26488E1	-3.2632E1	2.67908E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.1811E-1	-7.99227E-1	-9.131E0	-9.1418E0	4.91142E-3	9.3627E-2	2.73104E1	-3.26815E1	-3.26679E1	2.68232E1	2.15441E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.27607E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.17776E-1	-7.98845E-1	-9.13131E0	-9.14154E0	5.29289E-3	9.36508E-2	2.73186E1	-3.26505E1	-3.25244E1	2.68214E1	2.15425E-9	2.52318E-3	2.52318E-3	6.34588E-3	2.2631E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.1811E-1	-7.9906E-1	-9.13134E0	-9.14145E0	4.673E-3	9.35316E-2	2.72488E1	-3.2664E1	-3.26738E1	2.67995E1	2.15706E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.27492E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.17871E-1	-7.98893E-1	-9.13124E0	-9.14156E0	4.62532E-3	9.34839E-2	2.74076E1	-3.2659E1	-3.26069E1	2.68186E1	2.156E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.27373E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.17966E-1	-7.98869E-1	-9.13124E0	-9.14199E0	4.64916E-3	9.34124E-2	2.72628E1	-3.26446E1	-3.26028E1	2.68134E1	2.15257E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.27607E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.18062E-1	-7.99322E-1	-9.13105E0	-9.14185E0	4.52995E-3	9.36508E-2	2.72833E1	-3.2621E1	-3.26316E1	2.68094E1	2.15636E-9	2.52765E-3	2.52765E-3	6.29157E-3	2.27147E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.18324E-1	-7.99179E-1	-9.13112E0	-9.14171E0	4.91142E-3	9.3627E-2	2.72871E1	-3.26488E1	-3.26536E1	2.681E1	2.15879E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.27249E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.1811E-1	-7.99155E-1	-9.13143E0	-9.14168E0	4.60148E-3	9.36508E-2	2.73291E1	-3.26422E1	-3.26368E1	2.681E1	2.159E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.27996E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.183E-1	-7.9937E-1	-9.1311E0	-9.14168E0	4.62532E-3	9.36747E-2	2.72761E1	-3.26573E1	-3.25855E1	2.6792E1	2.15332E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.27888E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18276E-1	-7.99203E-1	-9.13103E0	-9.14161E0	4.72069E-3	9.33886E-2	2.72642E1	-3.2653E1	-3.26104E1	2.68016E1	2.15808E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.26445E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.18276E-1	-7.99251E-1	-9.13067E0	-9.14152E0	4.74453E-3	9.35078E-2	2.72782E1	-3.26738E1	-3.26132E1	2.68635E1	2.158E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.27295E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.18539E-1	-7.99155E-1	-9.13067E0	-9.14161E0	4.43459E-3	9.3317E-2	2.74938E1	-3.27257E1	-3.26116E1	2.67752E1	2.15332E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.2769E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.18539E-1	-7.99036E-1	-9.13093E0	-9.14185E0	4.55379E-3	9.35078E-2	2.72001E1	-3.26579E1	-3.26313E1	2.68689E1	2.15894E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.27295E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.183E-1	-7.99441E-1	-9.13081E0	-9.14185E0	4.62532E-3	9.377E-2	2.73535E1	-3.27003E1	-3.26242E1	2.67346E1	2.15854E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.27899E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.18253E-1	-7.98941E-1	-9.131E0	-9.14183E0	4.95911E-3	9.36031E-2	2.73004E1	-3.26685E1	-3.26095E1	2.69025E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.17966E-1	-7.98965E-1	-9.13103E0	-9.14164E0	4.41074E-3	9.35793E-2	2.72721E1	-3.26767E1	-3.26236E1	2.67043E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.26703E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.18014E-1	-7.98845E-1	-9.13103E0	-9.14159E0	5.126E-3	9.3317E-2	2.72721E1	-3.26639E1	-3.25707E1	2.68319E1	2.15808E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.25674E-2