[Scan]
initial_time=2016-01-27T19:15:49
final_time=2016-01-27T19:16:08
ip_count=19
run=1025
dataset=2
scan=92
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.17585E-1
ql1_imon=8.38876E-10
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=3.12483E-10
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=1.32397E-9
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.19908E-10
mult1=-9.88011E-9
mult2=-2.91107E-9
rf_tmon=-4.01351E-3
rf_agc=3.39773E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=4.05872E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.49725E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2022E1
lens5a_imon=1.9858E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=2.79133E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=2.64413E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38672E0
lens1_imon=2.56449E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.53488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.92504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.11475E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=2.87963E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15388E1
os_ea1_imon=1.88564E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64116E1
os_ef1bup_imon=3.10019E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=1.18554E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93555E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.89584E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=8.69787E-10
tplens_vset=1.4E-1
tplens_vmon=1.6143E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26297E1
iondef3_imon=1.52108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26499E1
iondef2_imon=1.59081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.40323E-2
ql6_imon=3.60131E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=1.74088E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33557E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.15641E-1
os_ea2_imon=-4.47542E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70981E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61017E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3916E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.2338E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72598E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6771E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.97177E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.72226E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.60679E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.71433E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.33396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.16219E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.41002E0
defgridb_imon=6.06143E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33832E1
os_fil1_imon=4.46988E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.50322E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.603E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=9.96095E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63105E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62615E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82575E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.01958E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22119E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21638E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.269E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.7522E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.17895E-1	-7.98726E-1	-9.13079E0	-9.14211E0	4.88758E-3	9.36508E-2	2.72859E1	-3.26488E1	-3.25719E1	2.67897E1	2.158E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.27097E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09704E0	-8.17704E-1	-7.98869E-1	-9.131E0	-9.14207E0	4.86374E-3	9.34839E-2	2.72539E1	-3.26613E1	-3.26163E1	2.67798E1	2.15519E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.28086E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.17776E-1	-7.98798E-1	-9.13088E0	-9.14178E0	4.91142E-3	9.36508E-2	2.73363E1	-3.26329E1	-3.26903E1	2.68094E1	2.15483E-9	2.51956E-3	2.51956E-3	6.32784E-3	2.26825E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17585E-1	-7.98488E-1	-9.13091E0	-9.14209E0	5.03063E-3	9.377E-2	2.72957E1	-3.26655E1	-3.25523E1	2.67331E1	2.15587E-9	2.52066E-3	2.52066E-3	6.3131E-3	2.28071E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.1768E-1	-7.98154E-1	-9.13086E0	-9.14195E0	4.93526E-3	9.37223E-2	2.73231E1	-3.26567E1	-3.27384E1	2.67758E1	2.15613E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.27097E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.17776E-1	-7.99036E-1	-9.13067E0	-9.14207E0	4.88758E-3	9.3627E-2	2.72576E1	-3.26236E1	-3.27131E1	2.68677E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.27097E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.17871E-1	-7.98702E-1	-9.13072E0	-9.14192E0	4.8399E-3	9.38654E-2	2.71783E1	-3.26467E1	-3.25145E1	2.67487E1	2.159E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.26639E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.17537E-1	-7.98464E-1	-9.131E0	-9.14202E0	4.86374E-3	9.36747E-2	2.7376E1	-3.26038E1	-3.26927E1	2.67728E1	2.15519E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.27295E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.17704E-1	-7.9906E-1	-9.13091E0	-9.14209E0	4.88758E-3	9.38177E-2	2.7251E1	-3.26879E1	-3.25545E1	2.6813E1	2.15332E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.27492E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17752E-1	-7.98368E-1	-9.13093E0	-9.14211E0	4.79221E-3	9.38892E-2	2.73265E1	-3.26958E1	-3.26352E1	2.68154E1	2.15706E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.2769E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.17847E-1	-7.98869E-1	-9.13122E0	-9.1419E0	4.55379E-3	9.38177E-2	2.72508E1	-3.26644E1	-3.26567E1	2.68611E1	2.15145E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.27492E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.17609E-1	-7.98798E-1	-9.13112E0	-9.14202E0	4.88758E-3	9.38892E-2	2.72654E1	-3.26741E1	-3.26813E1	2.68292E1	2.16175E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.27295E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.17633E-1	-7.98869E-1	-9.13119E0	-9.14178E0	5.14984E-3	9.38177E-2	2.73228E1	-3.26838E1	-3.26089E1	2.68105E1	2.15706E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.27888E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.17323E-1	-7.98845E-1	-9.13117E0	-9.14185E0	4.57764E-3	9.37939E-2	2.73896E1	-3.26609E1	-3.25997E1	2.68244E1	2.15533E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.25867E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.17394E-1	-7.99179E-1	-9.13115E0	-9.14197E0	4.91142E-3	9.34839E-2	2.71264E1	-3.25829E1	-3.25717E1	2.68354E1	2.15706E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.2631E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.17323E-1	-7.98678E-1	-9.13105E0	-9.14204E0	4.81606E-3	9.35078E-2	2.73862E1	-3.26801E1	-3.26296E1	2.68082E1	2.15992E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.27219E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17776E-1	-7.98869E-1	-9.13079E0	-9.14209E0	4.79221E-3	9.37462E-2	2.72656E1	-3.26661E1	-3.2629E1	2.67842E1	2.158E-9	2.52757E-3	2.52757E-3	6.3514E-3	2.26703E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.178E-1	-7.99012E-1	-9.13079E0	-9.14209E0	5.126E-3	9.377E-2	2.72721E1	-3.26386E1	-3.26386E1	2.67908E1	2.158E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.27492E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.17513E-1	-7.98607E-1	-9.13091E0	-9.14192E0	5.126E-3	9.35793E-2	2.73712E1	-3.26425E1	-3.26195E1	2.6819E1	2.15808E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.27026E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.17585E-1	-7.98726E-1	-9.13091E0	-9.14192E0	4.81606E-3	9.40323E-2	2.72598E1	-3.26499E1	-3.26297E1	2.6771E1	2.15519E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.269E-2