[Scan]
initial_time=2016-01-27T19:16:42
final_time=2016-01-27T19:17:02
ip_count=19
run=1025
dataset=2
scan=94
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08835E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=8.18074E-10
ql2_vset=
ql2_vmon=-7.99465E-1
ql2_imon=2.89583E-10
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=1.18078E-9
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.08344E-10
mult1=-1.04267E-8
mult2=-2.85834E-9
rf_tmon=-4.38024E-3
rf_agc=3.44331E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=3.7477E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.98687E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05206E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5366E1
cs_ef1b_imon=2.80516E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02397E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05301E1
cs_ea1_imon=2.64767E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36666E0
lens1_imon=2.57157E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64588E1
os_ef1alow_imon=3.00331E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0392E1
cs_ea2_imon=1.53064E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84468E1
cs_ef1a_imon=2.91662E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.93891E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=2.86885E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=1.88033E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63184E1
os_ef1bup_imon=3.07868E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26862E0
cs_ionrep_imon=1.17811E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0201E1
cs_anode1_imon=2.91697E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=8.0899E-10
tplens_vset=1.4E-1
tplens_vmon=1.6491E0
tplens_imon=-8.65226E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26843E1
iondef3_imon=1.51152E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.78227E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30873E0
ionrepsh_imon=1.76353E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33599E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74631E1
cs_ef2b_imon=3.13423E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.51035E-1
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71364E1
cs_ef2a_imon=3.18625E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63221E0
os_ef2alow_imon=-2.58425E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46313E-1
os_ef2bup_imon=-5.22393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11E1
os_restr2_imon=2.87416E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01727E1
cs_anode2_imon=2.23936E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.08149E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.10034E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.9601E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=2.86102E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-1.78456E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47247E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.63476E-6
window_vset=0.0E0
window_vmon=2.11325E-1
window_imon=-9.2826E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82593E2
mask1_imon=2.39222E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-5.31955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=7.40641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.55341E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.39933E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.44545E0
defgridb_imon=6.24194E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33827E1
os_fil1_imon=5.31747E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.299E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60216E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30838E1
cs_fil1_imon=9.97596E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64212E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62841E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.78776E-2
os_fil2_imon=-2.28428E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.70577E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.33762E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31114E-1
cs_fil2_imon=-2.33735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54903E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2189E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29624E-3
inlet_lpb_pmon=2.27172E-2
chamber_ion_pmon=2.156E-9
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.03184E-1
res40_imon=-2.37548E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.17752E-1	-7.99251E-1	-9.13067E0	-9.1418E0	4.57764E-3	9.36747E-2	2.72909E1	-3.26567E1	-3.26461E1	2.67659E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.1768E-1	-7.99108E-1	-9.13076E0	-9.14178E0	4.62532E-3	9.38416E-2	2.73472E1	-3.26512E1	-3.26687E1	2.67926E1	2.15572E-9	2.51863E-3	2.51863E-3	6.30469E-3	2.28041E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.17585E-1	-7.98798E-1	-9.1311E0	-9.14185E0	4.43459E-3	9.35555E-2	2.73523E1	-3.27062E1	-3.25411E1	2.68034E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17537E-1	-7.98512E-1	-9.13084E0	-9.1419E0	4.57764E-3	9.38654E-2	2.72786E1	-3.26408E1	-3.26968E1	2.68047E1	2.159E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.27026E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.1749E-1	-7.98917E-1	-9.13081E0	-9.14185E0	4.33922E-3	9.35793E-2	2.72715E1	-3.26549E1	-3.25984E1	2.68082E1	2.16085E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.26832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.17633E-1	-7.99203E-1	-9.13067E0	-9.14195E0	4.60148E-3	9.35078E-2	2.73257E1	-3.26773E1	-3.26172E1	2.68478E1	2.15696E-9	2.51136E-3	2.51136E-3	6.32418E-3	2.27776E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.17847E-1	-7.98821E-1	-9.131E0	-9.14197E0	4.673E-3	9.38416E-2	2.72427E1	-3.26566E1	-3.26364E1	2.67914E1	2.159E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.26639E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17585E-1	-7.98726E-1	-9.13088E0	-9.14173E0	5.17368E-3	9.38177E-2	2.74007E1	-3.2636E1	-3.26024E1	2.67746E1	2.15519E-9	2.51225E-3	2.51225E-3	6.33486E-3	2.2631E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.17585E-1	-7.98678E-1	-9.13076E0	-9.14161E0	4.74453E-3	9.34601E-2	2.72277E1	-3.26602E1	-3.26317E1	2.68322E1	2.15706E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.27097E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17513E-1	-7.99155E-1	-9.13086E0	-9.14173E0	5.00679E-3	9.3627E-2	2.74183E1	-3.26695E1	-3.26193E1	2.67814E1	2.15647E-9	2.52509E-3	2.52509E-3	6.3074E-3	2.28389E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.1749E-1	-7.98988E-1	-9.1311E0	-9.14183E0	4.72069E-3	9.35793E-2	2.73163E1	-3.26614E1	-3.26124E1	2.68226E1	2.15519E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.26703E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.17919E-1	-7.98845E-1	-9.13062E0	-9.14173E0	4.79221E-3	9.35078E-2	2.72396E1	-3.26609E1	-3.26536E1	2.67758E1	2.15894E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.2888E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.1799E-1	-7.99012E-1	-9.13067E0	-9.1419E0	4.79221E-3	9.32693E-2	2.72696E1	-3.26549E1	-3.26326E1	2.67968E1	2.15624E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.2819E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.17609E-1	-7.98488E-1	-9.13088E0	-9.14185E0	4.64916E-3	9.37462E-2	2.73375E1	-3.26561E1	-3.26378E1	2.68376E1	2.15987E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.269E-2
1.8E1	0.0E0	1.0E0	7.27E2	5.0E2	-2.09487E0	-8.17633E-1	-7.98631E-1	-9.13064E0	-9.14195E0	4.91142E-3	9.36508E-2	2.71164E1	-3.25906E1	-3.26344E1	2.67836E1	2.159E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.26639E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.17704E-1	-7.98965E-1	-9.13103E0	-9.14168E0	4.673E-3	9.377E-2	2.7352E1	-3.26579E1	-3.26717E1	2.67818E1	2.15519E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.27295E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.17847E-1	-7.98988E-1	-9.13093E0	-9.14173E0	4.60148E-3	9.3627E-2	2.72895E1	-3.26771E1	-3.26044E1	2.68292E1	2.156E-9	2.5147E-3	2.5147E-3	6.31299E-3	2.27574E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.17728E-1	-7.98965E-1	-9.13091E0	-9.14204E0	4.50611E-3	9.36747E-2	2.73252E1	-3.26909E1	-3.25952E1	2.68289E1	2.15808E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.27219E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.1768E-1	-7.98845E-1	-9.13074E0	-9.14195E0	4.81606E-3	9.35316E-2	2.7302E1	-3.26799E1	-3.26297E1	2.67794E1	2.15736E-9	2.52093E-3	2.52093E-3	6.29185E-3	2.28013E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.17919E-1	-7.99465E-1	-9.13098E0	-9.1418E0	4.48227E-3	9.39369E-2	2.73351E1	-3.26621E1	-3.26843E1	2.67806E1	2.156E-9	2.52027E-3	2.52027E-3	6.29624E-3	2.27172E-2