[Scan]
initial_time=2016-01-27T19:17:09
final_time=2016-01-27T19:17:28
ip_count=19
run=1025
dataset=2
scan=95
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08854E-4
ql1_vset=
ql1_vmon=-8.17943E-1
ql1_imon=7.88331E-10
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.96199E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=1.074E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=5.19371E-10
mult1=-1.01496E-8
mult2=-2.73502E-9
rf_tmon=-5.51821E-3
rf_agc=3.14804E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=3.81064E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6366E0
bslens_imon=2.62643E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20343E1
lens5a_imon=1.97494E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.0503E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53801E1
cs_ef1b_imon=2.799E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04703E1
cs_ea1_imon=2.62085E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39332E0
lens1_imon=2.70041E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64472E1
os_ef1alow_imon=2.99128E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.54161E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84427E1
cs_ef1a_imon=2.92083E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=3.93236E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11078E1
os_restr1_imon=2.87723E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15494E1
os_ea1_imon=1.92238E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63395E1
os_ef1bup_imon=3.08897E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26508E0
cs_ionrep_imon=1.21535E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93389E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=2.8967E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.70319E-10
tplens_vset=1.4E-1
tplens_vmon=1.62586E0
tplens_imon=-4.25952E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26065E1
iondef3_imon=1.51436E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.58911E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02889E2
lens6_imon=2.98408E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.757E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.40718E0
ionrepsh_imon=1.74679E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33678E1
lens5b_imon=2.16922E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74612E1
cs_ef2b_imon=3.13296E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.44369E-1
os_ea2_imon=-4.84352E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00564E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70557E1
cs_ef2a_imon=3.18901E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61505E0
os_ef2alow_imon=-2.48659E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.23903E-1
os_ef2bup_imon=-5.17226E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1089E1
os_restr2_imon=2.88774E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24201E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73712E1
iondef1_imon=1.09816E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.09846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.98817E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=2.4482E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13857E0
cs_ionaccel_imon=-1.77041E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47339E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56528E1
einzel_imon=7.64502E-6
window_vset=0.0E0
window_vmon=2.09438E-1
window_imon=-1.01531E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86591E1
mask2_imon=-5.67693E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.76566E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.88187E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.24395E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.44427E0
defgridb_imon=6.00197E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33825E1
os_fil1_imon=4.8274E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.65028E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60554E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=9.96607E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63371E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62955E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83208E-2
os_fil2_imon=-2.65876E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.24834E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39242E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32169E-1
cs_fil2_imon=-2.32143E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17514E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21793E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.27413E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.4006E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.19166E-1
res40_imon=-2.59947E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.17561E-1	-7.99227E-1	-9.13081E0	-9.14226E0	5.03063E-3	9.36508E-2	2.72803E1	-3.26673E1	-3.26402E1	2.67827E1	2.15762E-9	2.51793E-3	2.51793E-3	6.32518E-3	2.26774E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.1749E-1	-7.98988E-1	-9.13103E0	-9.14209E0	5.10216E-3	9.37462E-2	2.73131E1	-3.2656E1	-3.26432E1	2.68176E1	2.15624E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.27026E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09688E0	-8.17895E-1	-7.99203E-1	-9.13095E0	-9.14216E0	4.81606E-3	9.35316E-2	2.73283E1	-3.26538E1	-3.26579E1	2.67752E1	2.15587E-9	2.52179E-3	2.52179E-3	6.33592E-3	2.27044E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.178E-1	-7.98869E-1	-9.131E0	-9.14187E0	4.72069E-3	9.34839E-2	2.73153E1	-3.26759E1	-3.26236E1	2.67938E1	2.15647E-9	2.52197E-3	2.52197E-3	6.34907E-3	2.28201E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-8.17847E-1	-7.98368E-1	-9.13098E0	-9.14183E0	5.126E-3	9.37223E-2	2.72486E1	-3.2641E1	-3.26038E1	2.68184E1	2.158E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.269E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.17895E-1	-7.98392E-1	-9.1306E0	-9.1418E0	4.45843E-3	9.38892E-2	2.74199E1	-3.26482E1	-3.25876E1	2.67794E1	2.15987E-9	2.51007E-3	2.51007E-3	6.3074E-3	2.26506E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.17776E-1	-7.98821E-1	-9.13076E0	-9.14185E0	4.93526E-3	9.36508E-2	2.72811E1	-3.26915E1	-3.26651E1	2.67908E1	2.15894E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.27295E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.17823E-1	-7.9875E-1	-9.13064E0	-9.14204E0	4.81606E-3	9.35316E-2	2.72821E1	-3.26744E1	-3.2606E1	2.67982E1	2.15706E-9	2.52757E-3	2.52757E-3	6.30192E-3	2.28681E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.17728E-1	-7.98631E-1	-9.13031E0	-9.14185E0	4.69685E-3	9.3627E-2	2.7288E1	-3.2645E1	-3.26217E1	2.68015E1	2.15332E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.27295E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.17823E-1	-7.98988E-1	-9.13038E0	-9.14207E0	4.48227E-3	9.35316E-2	2.72821E1	-3.26661E1	-3.2636E1	2.67984E1	2.15519E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.269E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.17943E-1	-7.98917E-1	-9.13074E0	-9.14187E0	4.95911E-3	9.34839E-2	2.73814E1	-3.26693E1	-3.259E1	2.6807E1	2.15808E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.2819E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.17847E-1	-7.99084E-1	-9.13074E0	-9.14187E0	4.79221E-3	9.33409E-2	2.73068E1	-3.26596E1	-3.26023E1	2.6781E1	2.159E-9	2.51578E-3	2.51578E-3	6.31817E-3	2.2751E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.17394E-1	-7.98845E-1	-9.13105E0	-9.14187E0	4.76837E-3	9.34839E-2	2.72677E1	-3.26435E1	-3.26298E1	2.67832E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.1749E-1	-7.98821E-1	-9.13076E0	-9.14187E0	5.03063E-3	9.38892E-2	2.73429E1	-3.26639E1	-3.2623E1	2.68154E1	2.15685E-9	2.51838E-3	2.51838E-3	6.3245E-3	2.29309E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17561E-1	-7.98941E-1	-9.13081E0	-9.14195E0	4.95911E-3	9.35316E-2	2.73511E1	-3.26561E1	-3.2498E1	2.68136E1	2.16081E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.2769E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.17585E-1	-7.98917E-1	-9.1311E0	-9.14171E0	4.95911E-3	9.35316E-2	2.73296E1	-3.26487E1	-3.26297E1	2.6786E1	2.15706E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.27492E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17657E-1	-7.98655E-1	-9.13105E0	-9.14164E0	4.36306E-3	9.35555E-2	2.72986E1	-3.26685E1	-3.26596E1	2.68142E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.27492E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.17704E-1	-7.98821E-1	-9.13086E0	-9.14185E0	4.91142E-3	9.38416E-2	2.73299E1	-3.26319E1	-3.26868E1	2.67804E1	2.16085E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.27219E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.17657E-1	-7.98988E-1	-9.13105E0	-9.14199E0	5.24521E-3	9.38654E-2	2.72768E1	-3.26437E1	-3.26301E1	2.68028E1	2.16085E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.27607E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.17943E-1	-7.98702E-1	-9.1311E0	-9.14187E0	5.05447E-3	9.35316E-2	2.73712E1	-3.26649E1	-3.26065E1	2.67974E1	2.15624E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.27413E-2