[Scan]
initial_time=2016-01-27T19:17:35
final_time=2016-01-27T19:17:55
ip_count=19
run=1025
dataset=2
scan=96
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.1749E-1
ql1_imon=8.10623E-10
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=2.9552E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=1.1096E-9
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.19538E-10
mult1=-1.00655E-8
mult2=-2.74456E-9
rf_tmon=-5.58189E-3
rf_agc=3.25645E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=3.96264E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.97262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05205E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=2.81151E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02085E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=2.64746E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34012E0
lens1_imon=2.59183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.52344E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.90666E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.95107E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=2.88503E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=1.88321E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.18962E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93323E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=2.91855E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=7.85029E-10
tplens_vset=1.4E-1
tplens_vmon=1.62821E0
tplens_imon=-2.20037E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25737E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02888E2
lens6_imon=2.98472E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.59237E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24128E0
ionrepsh_imon=1.73793E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33369E1
lens5b_imon=2.20225E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.58333E-1
os_ea2_imon=-5.91347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70801E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61498E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46968E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.2946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02079E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72036E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.97461E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=2.74026E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.68608E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.20947E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-4.67935E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.61713E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93668E3
defgrida_imon=6.59332E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.58829E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.68704E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33855E1
os_fil1_imon=4.72216E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77352E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60278E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.95717E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63183E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62887E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83466E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25006E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21799E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.27607E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.89325E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.178E-1	-7.98464E-1	-9.13086E0	-9.14187E0	5.17368E-3	9.35316E-2	2.72786E1	-3.26815E1	-3.26231E1	2.67636E1	2.158E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.2769E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0968E0	-8.17513E-1	-7.98512E-1	-9.13126E0	-9.1419E0	5.26905E-3	9.38416E-2	2.73478E1	-3.26536E1	-3.26422E1	2.68424E1	2.15711E-9	2.51701E-3	2.51701E-3	6.32916E-3	2.2755E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.17513E-1	-7.98774E-1	-9.13105E0	-9.14204E0	4.95911E-3	9.40084E-2	2.73016E1	-3.26714E1	-3.26307E1	2.67806E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0968E0	-8.178E-1	-7.99012E-1	-9.13076E0	-9.14209E0	4.8399E-3	9.36031E-2	2.72114E1	-3.26693E1	-3.2763E1	2.68112E1	2.159E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.27026E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0968E0	-8.17728E-1	-7.99108E-1	-9.131E0	-9.14199E0	5.03063E-3	9.35316E-2	2.73982E1	-3.26693E1	-3.25647E1	2.68244E1	2.15706E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.269E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09673E0	-8.17585E-1	-7.98726E-1	-9.13086E0	-9.14214E0	4.91142E-3	9.35555E-2	2.72222E1	-3.26597E1	-3.26554E1	2.6852E1	2.158E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.27492E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.17871E-1	-7.98917E-1	-9.13095E0	-9.14209E0	4.86374E-3	9.38177E-2	2.72499E1	-3.26567E1	-3.25941E1	2.67925E1	2.15539E-9	2.5199E-3	2.5199E-3	6.29143E-3	2.26416E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17609E-1	-7.98917E-1	-9.13081E0	-9.14218E0	4.95911E-3	9.37223E-2	2.73229E1	-3.26394E1	-3.27857E1	2.68095E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.178E-1	-7.99298E-1	-9.13098E0	-9.14183E0	4.86374E-3	9.37939E-2	2.737E1	-3.26861E1	-3.2599E1	2.6807E1	2.15673E-9	2.5199E-3	2.5199E-3	6.33648E-3	2.26703E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.17871E-1	-7.99084E-1	-9.13067E0	-9.14185E0	5.03063E-3	9.35555E-2	2.71915E1	-3.26834E1	-3.25953E1	2.68105E1	2.15613E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.28681E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.17585E-1	-7.99131E-1	-9.13117E0	-9.14199E0	4.57764E-3	9.38416E-2	2.74717E1	-3.26716E1	-3.26004E1	2.68001E1	2.15636E-9	2.51498E-3	2.51498E-3	6.29684E-3	2.27528E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.17418E-1	-7.99227E-1	-9.13095E0	-9.14199E0	4.79221E-3	9.40084E-2	2.72702E1	-3.26981E1	-3.26278E1	2.67848E1	2.15673E-9	2.52338E-3	2.52338E-3	6.3016E-3	2.27748E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.1749E-1	-7.98988E-1	-9.13115E0	-9.14216E0	5.00679E-3	9.37462E-2	2.72865E1	-3.26657E1	-3.26512E1	2.6819E1	2.15624E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.27607E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.17633E-1	-7.99036E-1	-9.13103E0	-9.14207E0	5.22137E-3	9.39131E-2	2.72456E1	-3.26386E1	-3.26386E1	2.67908E1	2.15847E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.27591E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.1799E-1	-7.98988E-1	-9.13093E0	-9.14218E0	5.07832E-3	9.39369E-2	2.7358E1	-3.26993E1	-3.25245E1	2.68184E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17728E-1	-7.99179E-1	-9.13079E0	-9.14173E0	5.19753E-3	9.37462E-2	2.73922E1	-3.26458E1	-3.26687E1	2.68046E1	2.158E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.269E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17585E-1	-7.9875E-1	-9.13079E0	-9.14185E0	5.00679E-3	9.36747E-2	2.72874E1	-3.2659E1	-3.26083E1	2.68053E1	2.15753E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.26605E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.17657E-1	-7.99298E-1	-9.13107E0	-9.14185E0	5.36442E-3	9.35316E-2	2.73112E1	-3.26958E1	-3.26493E1	2.67951E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.17585E-1	-7.98988E-1	-9.13107E0	-9.14161E0	5.36442E-3	9.37223E-2	2.73706E1	-3.26661E1	-3.26006E1	2.68204E1	2.15894E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.269E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.1749E-1	-7.99036E-1	-9.1311E0	-9.14192E0	5.38826E-3	9.33886E-2	2.72036E1	-3.26795E1	-3.25737E1	2.68064E1	2.15533E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.27607E-2