[Scan]
initial_time=2016-01-27T19:18:02
final_time=2016-01-27T19:18:22
ip_count=19
run=1025
dataset=2
scan=97
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-8.17752E-1
ql1_imon=7.5593E-10
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=3.01719E-10
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=1.03759E-9
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=5.16164E-10
mult1=-9.31897E-9
mult2=-2.8783E-9
rf_tmon=-4.06781E-3
rf_agc=3.33035E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=3.91436E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=1.99288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=2.78989E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=2.63812E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39793E0
lens1_imon=2.68837E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.53382E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.93261E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.89504E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=2.89621E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=1.90192E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2462E0
cs_ionrep_imon=1.17599E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.90305E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=8.183E-10
tplens_vset=1.4E-1
tplens_vmon=1.67152E0
tplens_imon=-9.0062E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.61346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.62813E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24679E0
ionrepsh_imon=1.74548E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.1787E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.1977E-1
os_ea2_imon=-5.25409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71786E1
cs_ef2a_imon=3.20615E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61618E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53576E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=2.87386E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30495E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.23055E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.08679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.94324E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.65431E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16378E0
cs_ionaccel_imon=-1.50227E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=1.86709E-1
window_imon=-1.20314E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-4.78747E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.70726E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=7.04893E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.16927E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.65215E0
defgridb_imon=6.19239E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33842E1
os_fil1_imon=3.74909E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.8456E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60308E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30843E1
cs_fil1_imon=9.96912E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63435E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62785E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88906E-2
os_fil2_imon=-2.2395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.71925E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.19841E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21762E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.2897E-2
chamber_ion_pmon=2.15257E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.43385E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.18014E-1	-7.98702E-1	-9.13091E0	-9.14192E0	5.45979E-3	9.38654E-2	2.73476E1	-3.26708E1	-3.26172E1	2.67816E1	2.15441E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.27802E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.17823E-1	-7.9875E-1	-9.13079E0	-9.14195E0	4.8399E-3	9.34601E-2	2.73822E1	-3.26499E1	-3.26456E1	2.683E1	2.15992E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.27607E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.17633E-1	-7.9875E-1	-9.13098E0	-9.14209E0	5.36442E-3	9.31978E-2	2.72567E1	-3.26608E1	-3.26042E1	2.67862E1	2.15887E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.26971E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.17657E-1	-7.98512E-1	-9.13103E0	-9.14211E0	5.17368E-3	9.32693E-2	2.72745E1	-3.26975E1	-3.25894E1	2.67794E1	2.16085E-9	2.51632E-3	2.51632E-3	6.34518E-3	2.27026E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09317E0	-8.17466E-1	-7.99036E-1	-9.13105E0	-9.14178E0	5.03063E-3	9.33886E-2	2.7364E1	-3.2632E1	-3.26585E1	2.6819E1	2.15987E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.27295E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.17657E-1	-7.98869E-1	-9.13115E0	-9.1418E0	4.64916E-3	9.34601E-2	2.72461E1	-3.26638E1	-3.26189E1	2.684E1	2.15425E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.28086E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17966E-1	-7.98917E-1	-9.13095E0	-9.14202E0	5.17368E-3	9.34124E-2	2.73093E1	-3.26861E1	-3.2644E1	2.67974E1	2.15624E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.27996E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.17919E-1	-7.9875E-1	-9.13119E0	-9.14171E0	4.86374E-3	9.34124E-2	2.73301E1	-3.26402E1	-3.26511E1	2.67724E1	2.15425E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.28483E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17871E-1	-7.98845E-1	-9.13091E0	-9.14185E0	4.72069E-3	9.35555E-2	2.73238E1	-3.26566E1	-3.26098E1	2.6827E1	2.15736E-9	2.51575E-3	2.51575E-3	6.33341E-3	2.27264E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.17704E-1	-7.98917E-1	-9.13119E0	-9.14178E0	4.8399E-3	9.33409E-2	2.72216E1	-3.26873E1	-3.25803E1	2.67966E1	2.15574E-9	2.51874E-3	2.51874E-3	6.31902E-3	2.2733E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.1799E-1	-7.98798E-1	-9.13117E0	-9.14176E0	4.74453E-3	9.3627E-2	2.74132E1	-3.26885E1	-3.26699E1	2.67746E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.27026E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.1799E-1	-7.98559E-1	-9.13086E0	-9.14178E0	5.22137E-3	9.38177E-2	2.73093E1	-3.26428E1	-3.26356E1	2.67944E1	2.15613E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.27097E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09673E0	-8.17823E-1	-7.98726E-1	-9.13067E0	-9.1419E0	5.05447E-3	9.36031E-2	2.73411E1	-3.2662E1	-3.26567E1	2.68304E1	2.158E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.28284E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.17728E-1	-7.98845E-1	-9.13093E0	-9.14166E0	5.26905E-3	9.38416E-2	2.73063E1	-3.26615E1	-3.26458E1	2.67571E1	2.15165E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.27219E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17752E-1	-7.98678E-1	-9.13074E0	-9.14221E0	5.17368E-3	9.34362E-2	2.73213E1	-3.26669E1	-3.25834E1	2.681E1	2.15332E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.2769E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.18038E-1	-7.98273E-1	-9.13088E0	-9.14195E0	5.10216E-3	9.3627E-2	2.73417E1	-3.26609E1	-3.26663E1	2.68196E1	2.15238E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.25917E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17871E-1	-7.98345E-1	-9.13107E0	-9.1418E0	5.31673E-3	9.3627E-2	2.73132E1	-3.26857E1	-3.26393E1	2.67845E1	2.15238E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.28086E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17657E-1	-7.98464E-1	-9.13093E0	-9.14207E0	5.05447E-3	9.36031E-2	2.72132E1	-3.26933E1	-3.2629E1	2.68022E1	2.15726E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.26956E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.17585E-1	-7.98678E-1	-9.131E0	-9.14207E0	5.29289E-3	9.36508E-2	2.72685E1	-3.26354E1	-3.26762E1	2.67984E1	2.15706E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.27097E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.17752E-1	-7.98297E-1	-9.13076E0	-9.14166E0	5.4121E-3	9.36031E-2	2.73195E1	-3.26735E1	-3.26398E1	2.68088E1	2.15257E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.2897E-2