[Scan]
initial_time=2016-01-27T19:18:29
final_time=2016-01-27T19:18:48
ip_count=19
run=1025
dataset=2
scan=98
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09673E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.17657E-1
ql1_imon=8.13782E-10
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=2.84207E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=1.02726E-9
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.51558E-10
mult1=-9.6561E-9
mult2=-2.75254E-9
rf_tmon=-5.42568E-3
rf_agc=3.25585E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.99101E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65532E0
bslens_imon=2.65672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20115E1
lens5a_imon=1.97298E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=2.81728E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.63557E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37076E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.53822E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.93765E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.03202E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=2.87855E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=1.89078E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=1.18349E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=2.90522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=8.3679E-10
tplens_vset=1.4E-1
tplens_vmon=1.66246E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26729E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.57932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.82864E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.73793E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33513E1
lens5b_imon=2.20045E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74429E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.76958E-1
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61678E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42764E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=2.86269E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01593E1
cs_anode2_imon=2.2392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71789E1
iondef1_imon=1.1132E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.99029E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=2.46394E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.68608E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56063E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.04729E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.39318E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.4275E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.50177E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.62087E0
defgridb_imon=6.26527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33831E1
os_fil1_imon=4.63206E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60534E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6053E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30843E1
cs_fil1_imon=9.96972E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63765E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62632E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00233E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.01958E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36607E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-1.90914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53906E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21677E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.2769E-2
chamber_ion_pmon=2.15332E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.60804E-1
res40_imon=-2.19063E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.178E-1	-7.98988E-1	-9.13079E0	-9.14209E0	5.00679E-3	9.377E-2	2.73311E1	-3.26644E1	-3.26319E1	2.68233E1	2.15613E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.28284E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17657E-1	-7.98893E-1	-9.13091E0	-9.14216E0	4.81606E-3	9.35316E-2	2.74247E1	-3.26813E1	-3.26669E1	2.68106E1	2.15716E-9	2.52492E-3	2.52492E-3	6.33977E-3	2.26832E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.17323E-1	-7.98988E-1	-9.13103E0	-9.14221E0	4.29153E-3	9.35793E-2	2.72001E1	-3.26469E1	-3.26255E1	2.67942E1	2.15519E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.27295E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.17776E-1	-7.99131E-1	-9.1305E0	-9.14235E0	4.48227E-3	9.35793E-2	2.74504E1	-3.26409E1	-3.26202E1	2.67952E1	2.15411E-9	2.51823E-3	2.51823E-3	6.34261E-3	2.27667E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.17871E-1	-7.99108E-1	-9.13062E0	-9.14223E0	4.673E-3	9.35793E-2	2.73604E1	-3.26729E1	-3.25821E1	2.68094E1	2.15864E-9	2.52384E-3	2.52384E-3	6.34897E-3	2.26349E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09294E0	-8.18086E-1	-7.98821E-1	-9.13086E0	-9.1419E0	4.50611E-3	9.36031E-2	2.74526E1	-3.26561E1	-3.26006E1	2.68088E1	2.15613E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.26506E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.17871E-1	-7.98774E-1	-9.13081E0	-9.14218E0	4.36306E-3	9.37223E-2	2.74563E1	-3.2666E1	-3.26289E1	2.67775E1	2.15624E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.27607E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.17561E-1	-7.98798E-1	-9.13064E0	-9.14187E0	4.86374E-3	9.35316E-2	2.72256E1	-3.26877E1	-3.26146E1	2.68354E1	2.15546E-9	2.51498E-3	2.51498E-3	6.29157E-3	2.28483E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.17466E-1	-7.98965E-1	-9.13084E0	-9.14226E0	4.72069E-3	9.34839E-2	2.72781E1	-3.26549E1	-3.2584E1	2.67848E1	2.15971E-9	2.5199E-3	2.5199E-3	6.31321E-3	2.27958E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.1737E-1	-7.99251E-1	-9.13093E0	-9.1419E0	4.673E-3	9.36985E-2	2.74487E1	-3.26639E1	-3.26176E1	2.67908E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.27097E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.17537E-1	-7.98988E-1	-9.13091E0	-9.1418E0	4.55379E-3	9.37939E-2	2.74499E1	-3.26903E1	-3.26573E1	2.68046E1	2.15894E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.28483E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.17418E-1	-7.98321E-1	-9.13107E0	-9.14166E0	4.79221E-3	9.377E-2	2.74013E1	-3.26543E1	-3.26372E1	2.68076E1	2.15987E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.27097E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.17156E-1	-7.9875E-1	-9.13126E0	-9.14166E0	4.50611E-3	9.40084E-2	2.7254E1	-3.26741E1	-3.26332E1	2.67884E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.26639E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.17204E-1	-7.98726E-1	-9.13122E0	-9.14156E0	4.79221E-3	9.38892E-2	2.71957E1	-3.26741E1	-3.26945E1	2.68214E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.27888E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17633E-1	-7.98798E-1	-9.1311E0	-9.14204E0	4.93526E-3	9.36508E-2	2.74325E1	-3.26537E1	-3.26502E1	2.67932E1	2.15706E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.2631E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09696E0	-8.1737E-1	-7.98798E-1	-9.13093E0	-9.14183E0	5.126E-3	9.37939E-2	2.73363E1	-3.26699E1	-3.26158E1	2.6804E1	2.15257E-9	2.52061E-3	2.52061E-3	6.34518E-3	2.26059E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09673E0	-8.17633E-1	-7.98965E-1	-9.13105E0	-9.14209E0	5.29289E-3	9.32932E-2	2.71706E1	-3.26443E1	-3.26543E1	2.67642E1	2.15758E-9	2.52297E-3	2.52297E-3	6.32371E-3	2.28237E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.1799E-1	-7.98941E-1	-9.13098E0	-9.14192E0	5.14984E-3	9.38177E-2	2.74367E1	-3.26567E1	-3.26278E1	2.6801E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.17704E-1	-7.98893E-1	-9.13115E0	-9.14173E0	5.34058E-3	9.36508E-2	2.73812E1	-3.26661E1	-3.26225E1	2.68022E1	2.15808E-9	2.52707E-3	2.52707E-3	6.29665E-3	2.27802E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09673E0	-8.17657E-1	-7.99108E-1	-9.13107E0	-9.14185E0	5.03063E-3	9.36985E-2	2.71789E1	-3.26645E1	-3.26729E1	2.67944E1	2.15332E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.2769E-2