[Scan]
initial_time=2016-01-27T19:19:22
final_time=2016-01-27T19:19:41
ip_count=19
run=1025
dataset=2
scan=100
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.17347E-1
ql1_imon=7.56025E-10
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=3.17538E-10
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=8.69691E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.10788E-10
mult1=-9.80672E-9
mult2=-2.78205E-9
rf_tmon=-4.19093E-3
rf_agc=3.34625E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.6844E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.65672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19929E1
lens5a_imon=2.00506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=2.81512E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.63088E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35213E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04093E1
cs_ea2_imon=1.51983E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=2.92323E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.92115E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10973E1
os_restr1_imon=2.87134E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=1.89908E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.10235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.17196E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01647E1
cs_anode1_imon=2.89981E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.60782E-10
tplens_vset=1.4E-1
tplens_vmon=1.62521E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26632E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.93486E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=1.73866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.14452E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.14472E-1
os_ea2_imon=-6.05767E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7169E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64501E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44566E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=2.87026E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72561E1
iondef1_imon=1.11103E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67571E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.97542E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=2.61545E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56063E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=2.23349E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.35397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.05115E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.58178E0
defgridb_imon=6.29411E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33826E1
os_fil1_imon=4.24163E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.53926E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60564E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30843E1
cs_fil1_imon=9.97146E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63003E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63177E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.98943E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.89945E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.2926E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62876E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2188E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.2769E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.51794E-1
res40_imon=-2.2555E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.17347E-1	-7.98583E-1	-9.13095E0	-9.14192E0	4.95911E-3	9.33647E-2	2.73564E1	-3.26685E1	-3.25953E1	2.67879E1	2.15894E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.28284E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.17299E-1	-7.98726E-1	-9.13093E0	-9.1419E0	5.05447E-3	9.33409E-2	2.73118E1	-3.26493E1	-3.26444E1	2.67751E1	2.15533E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.27026E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.1706E-1	-7.99036E-1	-9.13112E0	-9.14173E0	4.98295E-3	9.34362E-2	2.72243E1	-3.26436E1	-3.25771E1	2.67987E1	2.158E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.27492E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.17204E-1	-7.99179E-1	-9.13103E0	-9.14178E0	5.26905E-3	9.33409E-2	2.73614E1	-3.26676E1	-3.26848E1	2.68124E1	2.16094E-9	2.51956E-3	2.51956E-3	6.32273E-3	2.27376E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17418E-1	-7.9906E-1	-9.13088E0	-9.14185E0	4.62532E-3	9.35793E-2	2.72591E1	-3.26756E1	-3.25871E1	2.6787E1	2.15982E-9	2.52585E-3	2.52585E-3	6.31299E-3	2.27172E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16941E-1	-7.98774E-1	-9.13136E0	-9.14173E0	5.10216E-3	9.37462E-2	2.71855E1	-3.26675E1	-3.26104E1	2.67628E1	2.15808E-9	2.52815E-3	2.52815E-3	6.33436E-3	2.27802E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.17227E-1	-7.98464E-1	-9.13129E0	-9.14152E0	4.81606E-3	9.36747E-2	2.72787E1	-3.26554E1	-3.26374E1	2.6786E1	2.15613E-9	2.51116E-3	2.51116E-3	6.3074E-3	2.269E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.17084E-1	-7.98392E-1	-9.1311E0	-9.14185E0	5.00679E-3	9.34839E-2	2.73316E1	-3.26602E1	-3.26366E1	2.68178E1	2.16175E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.26506E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.17084E-1	-7.99108E-1	-9.13107E0	-9.14173E0	4.55379E-3	9.37223E-2	2.74938E1	-3.26458E1	-3.25816E1	2.68244E1	2.159E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.27802E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.17394E-1	-7.99084E-1	-9.1311E0	-9.14183E0	5.29289E-3	9.35316E-2	2.72865E1	-3.26476E1	-3.26524E1	2.67818E1	2.15706E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.269E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.17442E-1	-7.98607E-1	-9.13098E0	-9.1413E0	5.07832E-3	9.33886E-2	2.73495E1	-3.26704E1	-3.26123E1	2.68032E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.2819E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.16917E-1	-7.98941E-1	-9.13095E0	-9.14154E0	4.8399E-3	9.36985E-2	2.72924E1	-3.26794E1	-3.26406E1	2.67933E1	2.15825E-9	2.52093E-3	2.52093E-3	6.29703E-3	2.27264E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09688E0	-8.17466E-1	-7.98607E-1	-9.13103E0	-9.14178E0	4.95911E-3	9.34601E-2	2.71805E1	-3.26666E1	-3.26422E1	2.68262E1	2.15864E-9	2.51557E-3	2.51557E-3	6.30149E-3	2.26987E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.17156E-1	-7.98965E-1	-9.13112E0	-9.14176E0	5.10216E-3	9.35316E-2	2.73541E1	-3.2645E1	-3.26058E1	2.68034E1	2.15913E-9	2.52509E-3	2.52509E-3	6.3074E-3	2.26703E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.17323E-1	-7.9875E-1	-9.13141E0	-9.14185E0	5.07832E-3	9.3627E-2	2.7403E1	-3.26663E1	-3.26116E1	2.67836E1	2.15879E-9	2.51725E-3	2.51725E-3	6.27335E-3	2.28689E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16941E-1	-7.98798E-1	-9.13084E0	-9.14166E0	5.26905E-3	9.36031E-2	2.7255E1	-3.26242E1	-3.26236E1	2.67776E1	2.15332E-9	2.5188E-3	2.5188E-3	6.28552E-3	2.27097E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.17347E-1	-7.98798E-1	-9.13084E0	-9.14171E0	5.29289E-3	9.37223E-2	2.72895E1	-3.26681E1	-3.26579E1	2.67932E1	2.15257E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.27219E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.1737E-1	-7.98464E-1	-9.13115E0	-9.14152E0	5.34058E-3	9.36747E-2	2.72868E1	-3.26384E1	-3.26543E1	2.68141E1	2.15894E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.27492E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.17013E-1	-7.98726E-1	-9.13084E0	-9.14178E0	5.22137E-3	9.35793E-2	2.73526E1	-3.26669E1	-3.26116E1	2.68542E1	2.159E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.27607E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.17347E-1	-7.9844E-1	-9.13093E0	-9.14185E0	5.45979E-3	9.34839E-2	2.72561E1	-3.26543E1	-3.26632E1	2.67571E1	2.15706E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.2769E-2