[Scan]
initial_time=2016-01-27T19:20:15
final_time=2016-01-27T19:20:35
ip_count=19
run=1025
dataset=2
scan=102
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.17132E-1
ql1_imon=7.4122E-10
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=2.99835E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=8.51595E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.46718E-10
mult1=-9.99052E-9
mult2=-2.80328E-9
rf_tmon=-4.31959E-3
rf_agc=3.39711E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=4.31466E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20193E1
lens5a_imon=1.98992E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12439E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=2.8216E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.6471E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33831E0
lens1_imon=2.75405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.52668E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=2.91855E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.34339E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11051E1
os_restr1_imon=2.88179E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1551E1
os_ea1_imon=1.87781E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=1.19214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01605E1
cs_anode1_imon=2.90846E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=7.94494E-10
tplens_vset=1.4E-1
tplens_vmon=1.65525E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26174E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26774E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98479E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=4.04286E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26111E0
ionrepsh_imon=1.74731E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29493E-1
os_ea2_imon=-6.23792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.19353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6378E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40962E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=2.8699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01605E1
cs_anode2_imon=2.23776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6768E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.96491E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.81763E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86548E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.83486E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=6.73031E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.39531E0
defgridb_imon=6.20038E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33827E1
os_fil1_imon=4.51794E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.74349E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60963E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=9.96684E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62252E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6295E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.98943E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.06832E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-2.13739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21727E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.27219E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.69814E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.17609E-1	-7.98702E-1	-9.13103E0	-9.14207E0	4.88758E-3	9.36031E-2	2.73954E1	-3.26714E1	-3.26195E1	2.67653E1	2.16173E-9	2.51915E-3	2.51915E-3	6.34661E-3	2.29598E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.17418E-1	-7.98678E-1	-9.13079E0	-9.14178E0	5.22137E-3	9.37223E-2	2.7224E1	-3.26699E1	-3.26164E1	2.67896E1	2.15726E-9	2.51603E-3	2.51603E-3	6.30212E-3	2.27337E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.17418E-1	-7.97987E-1	-9.13076E0	-9.14197E0	4.98295E-3	9.39846E-2	2.73552E1	-3.26785E1	-3.26213E1	2.67878E1	2.15706E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.26506E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16894E-1	-7.98845E-1	-9.13064E0	-9.14216E0	4.93526E-3	9.37223E-2	2.7251E1	-3.26536E1	-3.26428E1	2.68226E1	2.15519E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.26506E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.1706E-1	-7.98535E-1	-9.13057E0	-9.14209E0	5.14984E-3	9.36031E-2	2.73069E1	-3.26413E1	-3.26077E1	2.68175E1	2.15894E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.27492E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.17466E-1	-7.98559E-1	-9.13088E0	-9.14185E0	5.10216E-3	9.34124E-2	2.73688E1	-3.26726E1	-3.26142E1	2.67962E1	2.15441E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.27413E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.17657E-1	-7.98297E-1	-9.13069E0	-9.14187E0	5.05447E-3	9.37939E-2	2.72654E1	-3.26723E1	-3.26338E1	2.6786E1	2.15808E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.27996E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.17323E-1	-7.98512E-1	-9.13069E0	-9.14195E0	4.62532E-3	9.35078E-2	2.72925E1	-3.26536E1	-3.26488E1	2.68028E1	2.15519E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.28483E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.17347E-1	-7.98178E-1	-9.13117E0	-9.14164E0	5.07832E-3	9.38654E-2	2.72991E1	-3.2641E1	-3.26044E1	2.68124E1	2.158E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.28483E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.17466E-1	-7.98559E-1	-9.13064E0	-9.14171E0	4.95911E-3	9.37223E-2	2.73635E1	-3.2639E1	-3.2606E1	2.67665E1	2.15441E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.28775E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.17204E-1	-7.98774E-1	-9.13084E0	-9.14166E0	5.22137E-3	9.377E-2	2.72727E1	-3.26646E1	-3.26211E1	2.68013E1	2.15519E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.28284E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17418E-1	-7.98965E-1	-9.13084E0	-9.14164E0	5.48363E-3	9.37223E-2	2.73466E1	-3.26591E1	-3.26488E1	2.68292E1	2.158E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.28681E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.1749E-1	-7.9844E-1	-9.13079E0	-9.14171E0	5.22137E-3	9.35316E-2	2.72877E1	-3.26512E1	-3.26152E1	2.6792E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.28284E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17513E-1	-7.98726E-1	-9.13064E0	-9.14168E0	5.45979E-3	9.36031E-2	2.7477E1	-3.26237E1	-3.26516E1	2.67897E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.27097E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.17251E-1	-7.98845E-1	-9.13041E0	-9.14168E0	5.07832E-3	9.35793E-2	2.71944E1	-3.26451E1	-3.26266E1	2.68024E1	2.15558E-9	2.52197E-3	2.52197E-3	6.31779E-3	2.27451E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.17537E-1	-7.98893E-1	-9.13064E0	-9.14202E0	5.26905E-3	9.36985E-2	2.73511E1	-3.26508E1	-3.26579E1	2.6847E1	2.15772E-9	2.5199E-3	2.5199E-3	6.27845E-3	2.27121E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.17132E-1	-7.98798E-1	-9.13091E0	-9.14173E0	4.98295E-3	9.37939E-2	2.72384E1	-3.26714E1	-3.26024E1	2.67932E1	2.16081E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.27492E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.17037E-1	-7.99108E-1	-9.13095E0	-9.14197E0	4.673E-3	9.3627E-2	2.73865E1	-3.26573E1	-3.25959E1	2.68146E1	2.15726E-9	2.51814E-3	2.51814E-3	6.33388E-3	2.26956E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.17132E-1	-7.98988E-1	-9.131E0	-9.1418E0	4.8399E-3	9.37223E-2	2.73505E1	-3.26484E1	-3.26272E1	2.68196E1	2.15613E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.27097E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.17132E-1	-7.98893E-1	-9.1311E0	-9.14183E0	5.22137E-3	9.37462E-2	2.73045E1	-3.26774E1	-3.26174E1	2.6768E1	2.15624E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.27219E-2