[Scan]
initial_time=2016-01-27T19:20:43
final_time=2016-01-27T19:21:02
ip_count=19
run=1025
dataset=2
scan=103
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.17657E-1
ql1_imon=7.60508E-10
ql2_vset=
ql2_vmon=-7.99227E-1
ql2_imon=2.77984E-10
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=8.78787E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=5.20158E-10
mult1=-1.0222E-8
mult2=-2.81243E-9
rf_tmon=-5.0772E-3
rf_agc=3.23662E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=3.6999E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66376E0
bslens_imon=2.60358E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.98867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53537E1
cs_ef1b_imon=2.80479E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02256E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05044E1
cs_ea1_imon=2.64941E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3608E0
lens1_imon=2.77004E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64685E1
os_ef1alow_imon=2.99769E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03878E1
cs_ea2_imon=1.52372E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84389E1
cs_ef1a_imon=2.90782E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.04119E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11362E1
os_restr1_imon=2.8875E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15347E1
os_ea1_imon=1.87807E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63592E1
os_ef1bup_imon=3.08612E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26009E0
cs_ionrep_imon=1.18799E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0191E1
cs_anode1_imon=2.91555E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=8.4101E-10
tplens_vset=1.4E-1
tplens_vmon=1.66024E0
tplens_imon=-1.04835E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25803E1
iondef3_imon=1.51131E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.57648E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98385E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.59571E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23141E0
ionrepsh_imon=1.74096E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3375E1
lens5b_imon=2.17995E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74568E1
cs_ef2b_imon=3.12276E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.06348E-1
os_ea2_imon=-5.70344E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00538E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71243E1
cs_ef2a_imon=3.18944E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63172E0
os_ef2alow_imon=-2.50365E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61013E-1
os_ef2bup_imon=-5.21107E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10828E1
os_restr2_imon=2.86804E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.24384E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73772E1
iondef1_imon=1.0932E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.09762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.97333E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=2.38204E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13443E0
cs_ionaccel_imon=-1.64219E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47318E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56362E1
einzel_imon=7.7737E-6
window_vset=0.0E0
window_vmon=2.18844E-1
window_imon=-1.06694E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86411E1
mask2_imon=-6.63398E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.83703E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.71981E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.41667E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.57825E0
defgridb_imon=6.16966E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33828E1
os_fil1_imon=4.66598E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77122E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60744E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=9.98157E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63526E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62997E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.89971E-2
os_fil2_imon=-2.39832E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.12028E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.15199E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29549E-1
cs_fil2_imon=-2.11689E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03605E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21803E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.281E-2
chamber_ion_pmon=2.16088E-9
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40097E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.59751E-1
res40_imon=-2.36913E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=361
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16774E-1	-7.98774E-1	-9.13091E0	-9.14199E0	5.17368E-3	9.36508E-2	2.74459E1	-3.26961E1	-3.26498E1	2.67943E1	2.15896E-9	2.5228E-3	2.5228E-3	6.32047E-3	2.2801E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16655E-1	-7.98774E-1	-9.13084E0	-9.14185E0	5.10216E-3	9.30548E-2	2.71806E1	-3.26443E1	-3.2613E1	2.67758E1	2.15817E-9	2.52448E-3	2.52448E-3	6.32328E-3	2.27718E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.1687E-1	-7.98941E-1	-9.13076E0	-9.14168E0	5.26905E-3	9.34839E-2	2.73454E1	-3.26633E1	-3.26362E1	2.68022E1	2.15817E-9	2.52131E-3	2.52131E-3	6.30212E-3	2.281E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.17037E-1	-7.99108E-1	-9.13095E0	-9.14178E0	5.126E-3	9.32693E-2	2.73311E1	-3.26638E1	-3.26183E1	2.68112E1	2.15613E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.27097E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.17513E-1	-7.98798E-1	-9.13067E0	-9.14171E0	5.22137E-3	9.36031E-2	2.72925E1	-3.26885E1	-3.26717E1	2.6768E1	2.15894E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.28284E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.17418E-1	-7.98655E-1	-9.13105E0	-9.14192E0	4.93526E-3	9.34362E-2	2.72228E1	-3.26518E1	-3.25816E1	2.68436E1	2.15987E-9	2.53087E-3	2.53087E-3	6.31288E-3	2.28681E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.17347E-1	-7.98893E-1	-9.13086E0	-9.14202E0	5.24521E-3	9.35793E-2	2.72756E1	-3.26531E1	-3.26467E1	2.67902E1	2.15533E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.26832E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.17323E-1	-7.98726E-1	-9.13107E0	-9.14202E0	5.34058E-3	9.35316E-2	2.73958E1	-3.26615E1	-3.25906E1	2.6801E1	2.15624E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.27607E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.17466E-1	-7.98702E-1	-9.13124E0	-9.1419E0	5.14984E-3	9.33647E-2	2.72114E1	-3.26506E1	-3.26693E1	2.67896E1	2.15894E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.26506E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.1749E-1	-7.99084E-1	-9.13126E0	-9.14216E0	5.05447E-3	9.37223E-2	2.72803E1	-3.26791E1	-3.26089E1	2.67662E1	2.15425E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.25917E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.1749E-1	-7.98821E-1	-9.13126E0	-9.14211E0	5.17368E-3	9.31978E-2	2.73387E1	-3.26524E1	-3.2623E1	2.68274E1	2.158E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.26703E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.17204E-1	-7.98965E-1	-9.13112E0	-9.14218E0	5.05447E-3	9.3627E-2	2.73249E1	-3.26585E1	-3.26272E1	2.68436E1	2.15613E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.27888E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.1718E-1	-7.9875E-1	-9.13095E0	-9.14199E0	5.17368E-3	9.34601E-2	2.7245E1	-3.26639E1	-3.2587E1	2.6771E1	2.15624E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.2858E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.17156E-1	-7.98726E-1	-9.131E0	-9.14209E0	5.126E-3	9.36508E-2	2.72402E1	-3.26596E1	-3.26449E1	2.6818E1	2.15894E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.27295E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.17156E-1	-7.98607E-1	-9.13129E0	-9.14226E0	5.29289E-3	9.35555E-2	2.73784E1	-3.26765E1	-3.26891E1	2.6768E1	2.15425E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.2769E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09696E0	-8.1749E-1	-7.98821E-1	-9.13143E0	-9.14197E0	5.22137E-3	9.38892E-2	2.73478E1	-3.26729E1	-3.26428E1	2.67794E1	2.15613E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.27097E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.17156E-1	-7.98631E-1	-9.13093E0	-9.14192E0	5.48363E-3	9.34601E-2	2.72558E1	-3.26422E1	-3.26651E1	2.68226E1	2.15613E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.27492E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.1768E-1	-7.9906E-1	-9.13107E0	-9.14195E0	5.19753E-3	9.36508E-2	2.73393E1	-3.26506E1	-3.2629E1	2.67824E1	2.159E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.27802E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.17752E-1	-7.99131E-1	-9.13107E0	-9.14185E0	4.79221E-3	9.32455E-2	2.72803E1	-3.26638E1	-3.26113E1	2.681E1	2.15696E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.27373E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.17657E-1	-7.99227E-1	-9.13122E0	-9.14176E0	5.29289E-3	9.34124E-2	2.73772E1	-3.26729E1	-3.25803E1	2.68262E1	2.16088E-9	2.51603E-3	2.51603E-3	6.31798E-3	2.281E-2