[Scan]
initial_time=2016-01-27T19:22:03
final_time=2016-01-27T19:22:22
ip_count=19
run=1025
dataset=2
scan=106
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-8.1706E-1
ql1_imon=7.36582E-10
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.97534E-10
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=8.00693E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.24509E-10
mult1=-1.04387E-8
mult2=-2.67869E-9
rf_tmon=-4.15193E-3
rf_agc=3.37542E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=3.8718E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.50786E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19736E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=2.80178E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04799E1
cs_ea1_imon=2.62892E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34719E0
lens1_imon=2.8795E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=3.00252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03932E1
cs_ea2_imon=1.53134E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.90738E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=4.12881E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11562E1
os_restr1_imon=2.87638E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=1.8959E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.1636E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93664E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=2.89476E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=8.15129E-10
tplens_vset=1.4E-1
tplens_vmon=1.65264E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.51506E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.96776E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28513E0
ionrepsh_imon=1.75504E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.16773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.42777E-1
os_ea2_imon=-4.65239E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00492E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60296E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.15734E-1
os_ef2bup_imon=-5.05218E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.87963E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.3276E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.23992E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74944E1
iondef1_imon=1.0691E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.97171E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=2.70796E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17099E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56609E1
einzel_imon=7.50764E-6
window_vset=0.0E0
window_vmon=2.28755E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.8659E1
mask2_imon=-4.71539E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=7.44534E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93755E3
defgrida_imon=6.45784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.14095E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.61672E0
defgridb_imon=6.27733E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33826E1
os_fil1_imon=5.3889E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55128E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60338E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30839E1
cs_fil1_imon=9.98462E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.629E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62819E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.96504E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.37998E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.21233E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.6648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21788E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.27026E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.10038E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16751E-1	-7.98702E-1	-9.13124E0	-9.14211E0	4.98295E-3	9.35555E-2	2.71973E1	-3.26677E1	-3.26608E1	2.68053E1	2.15716E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.26832E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.1687E-1	-7.98631E-1	-9.13117E0	-9.14211E0	5.03063E-3	9.32932E-2	2.71925E1	-3.26768E1	-3.25795E1	2.68088E1	2.15441E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.27219E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16536E-1	-7.99012E-1	-9.13086E0	-9.14171E0	5.38826E-3	9.36031E-2	2.73836E1	-3.26614E1	-3.26201E1	2.68022E1	2.158E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.2769E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16655E-1	-7.98559E-1	-9.13086E0	-9.14171E0	5.03063E-3	9.35078E-2	2.74066E1	-3.26747E1	-3.25755E1	2.67998E1	2.15706E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.27492E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16703E-1	-7.9844E-1	-9.13107E0	-9.14178E0	5.10216E-3	9.34124E-2	2.73387E1	-3.2653E1	-3.26771E1	2.67842E1	2.15425E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.27492E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16655E-1	-7.98535E-1	-9.13086E0	-9.14207E0	4.72069E-3	9.33886E-2	2.73311E1	-3.26685E1	-3.26219E1	2.6818E1	2.15441E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.27026E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16727E-1	-7.98845E-1	-9.13084E0	-9.14178E0	4.57764E-3	9.35316E-2	2.73634E1	-3.26849E1	-3.26254E1	2.6819E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.26445E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16703E-1	-7.98631E-1	-9.13105E0	-9.14166E0	4.93526E-3	9.31501E-2	2.72815E1	-3.2649E1	-3.26024E1	2.67938E1	2.15332E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.28086E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16751E-1	-7.98249E-1	-9.13084E0	-9.1419E0	5.126E-3	9.32693E-2	2.73201E1	-3.26705E1	-3.26098E1	2.68024E1	2.15808E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.27996E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16536E-1	-7.98488E-1	-9.13091E0	-9.14185E0	5.03063E-3	9.30786E-2	2.7436E1	-3.26637E1	-3.26162E1	2.68354E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.2769E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16488E-1	-7.98392E-1	-9.13105E0	-9.14178E0	5.34058E-3	9.34362E-2	2.74187E1	-3.26541E1	-3.26466E1	2.68069E1	2.15726E-9	2.52342E-3	2.52342E-3	6.31269E-3	2.27337E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.16846E-1	-7.98249E-1	-9.13103E0	-9.14197E0	5.14984E-3	9.35078E-2	2.71248E1	-3.26326E1	-3.26308E1	2.68149E1	2.15685E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.27454E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.1656E-1	-7.98535E-1	-9.13115E0	-9.14207E0	4.8399E-3	9.34124E-2	2.71806E1	-3.26449E1	-3.26154E1	2.68151E1	2.158E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.27888E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16894E-1	-7.98678E-1	-9.13115E0	-9.14199E0	5.19753E-3	9.33886E-2	2.73393E1	-3.26801E1	-3.26434E1	2.67788E1	2.15349E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.2819E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.17156E-1	-7.98559E-1	-9.13136E0	-9.14218E0	5.22137E-3	9.32932E-2	2.74457E1	-3.26536E1	-3.26146E1	2.68136E1	2.15894E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.27492E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.17132E-1	-7.99084E-1	-9.13103E0	-9.14207E0	5.03063E-3	9.3317E-2	2.74479E1	-3.2675E1	-3.26514E1	2.68232E1	2.158E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.269E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16607E-1	-7.98607E-1	-9.13091E0	-9.14187E0	4.93526E-3	9.36747E-2	2.74437E1	-3.2688E1	-3.26443E1	2.68198E1	2.15706E-9	2.51662E-3	2.51662E-3	6.28552E-3	2.2631E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16846E-1	-7.98893E-1	-9.13086E0	-9.14209E0	5.05447E-3	9.34124E-2	2.75166E1	-3.26849E1	-3.26452E1	2.68064E1	2.15726E-9	2.52236E-3	2.52236E-3	6.3074E-3	2.26766E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16536E-1	-7.98869E-1	-9.13105E0	-9.14226E0	5.22137E-3	9.35793E-2	2.75208E1	-3.26639E1	-3.26242E1	2.6786E1	2.15982E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.27776E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.1706E-1	-7.98392E-1	-9.13112E0	-9.14202E0	5.05447E-3	9.32693E-2	2.74944E1	-3.26681E1	-3.26404E1	2.67998E1	2.15533E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.27026E-2