[Scan]
initial_time=2016-01-27T19:22:29
final_time=2016-01-27T19:22:49
ip_count=19
run=1025
dataset=2
scan=107
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=6.79171E-10
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=2.84708E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=7.93648E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.05412E-10
mult1=-9.7949E-9
mult2=-2.76637E-9
rf_tmon=-4.3856E-3
rf_agc=3.3315E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=3.90065E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64871E0
bslens_imon=2.77207E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=1.96865E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=2.80899E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.047E1
cs_ea1_imon=2.64206E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37496E0
lens1_imon=2.72881E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.99351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.53425E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=2.91531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.96228E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=2.88107E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=1.8879E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23948E0
cs_ionrep_imon=1.18133E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.91098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=7.72798E-10
tplens_vset=1.4E-1
tplens_vmon=1.66487E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2636E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=3.75414E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2551E0
ionrepsh_imon=1.7455E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33201E1
lens5b_imon=2.18567E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.60736E-1
os_ea2_imon=-5.22853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.2047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65282E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37358E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.86845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.23235E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71889E1
iondef1_imon=1.11175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67881E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.93728E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=2.24924E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86783E1
mask2_imon=-4.49916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.67842E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.40804E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.38328E0
defgridb_imon=6.33016E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3381E1
os_fil1_imon=5.28678E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.27497E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60193E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30857E1
cs_fil1_imon=9.97927E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63393E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63002E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.89915E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.47899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.21526E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.06531E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21811E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.27295E-2
chamber_ion_pmon=2.16175E-9
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.84229E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09665E0	-8.17037E-1	-7.98869E-1	-9.131E0	-9.14166E0	4.98295E-3	9.34839E-2	2.73051E1	-3.26428E1	-3.26014E1	2.68154E1	2.15987E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.27888E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.17037E-1	-7.9844E-1	-9.13112E0	-9.1419E0	4.88758E-3	9.33409E-2	2.72474E1	-3.26392E1	-3.26356E1	2.68442E1	2.15706E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.269E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.17108E-1	-7.98726E-1	-9.13107E0	-9.14187E0	5.24521E-3	9.32693E-2	2.73816E1	-3.26585E1	-3.26729E1	2.68233E1	2.15519E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.27492E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16989E-1	-7.98869E-1	-9.13079E0	-9.14183E0	5.03063E-3	9.35793E-2	2.74802E1	-3.26682E1	-3.26021E1	2.67995E1	2.15546E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.26766E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.1706E-1	-7.98941E-1	-9.13091E0	-9.14199E0	5.07832E-3	9.3627E-2	2.74121E1	-3.26539E1	-3.26567E1	2.68278E1	2.15696E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.28584E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.1706E-1	-7.9906E-1	-9.13122E0	-9.14202E0	5.126E-3	9.37223E-2	2.72333E1	-3.26441E1	-3.26173E1	2.68007E1	2.15907E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.27528E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16822E-1	-7.9937E-1	-9.13079E0	-9.14218E0	4.86374E-3	9.39369E-2	2.72462E1	-3.26789E1	-3.25948E1	2.68064E1	2.15685E-9	2.52066E-3	2.52066E-3	6.30171E-3	2.27454E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16941E-1	-7.99012E-1	-9.13093E0	-9.14199E0	4.88758E-3	9.37939E-2	2.75022E1	-3.26633E1	-3.26675E1	2.6816E1	2.15808E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.27413E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.17323E-1	-7.98893E-1	-9.13076E0	-9.14214E0	4.76837E-3	9.38177E-2	2.72839E1	-3.26638E1	-3.25965E1	2.68004E1	2.15613E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.28681E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.17347E-1	-7.98702E-1	-9.1311E0	-9.1419E0	5.07832E-3	9.35078E-2	2.73069E1	-3.26573E1	-3.26195E1	2.68233E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.2858E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.1737E-1	-7.99036E-1	-9.13107E0	-9.14202E0	4.91142E-3	9.36747E-2	2.7352E1	-3.26801E1	-3.26573E1	2.68046E1	2.15519E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.269E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.17251E-1	-7.9875E-1	-9.13112E0	-9.14183E0	4.74453E-3	9.39131E-2	2.7212E1	-3.26837E1	-3.26464E1	2.68274E1	2.15257E-9	2.51739E-3	2.51739E-3	6.29128E-3	2.26639E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16989E-1	-7.98774E-1	-9.13091E0	-9.14223E0	4.91142E-3	9.38416E-2	2.73688E1	-3.26744E1	-3.26027E1	2.6797E1	2.15696E-9	2.5147E-3	2.5147E-3	6.29624E-3	2.27574E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.17394E-1	-7.98512E-1	-9.13126E0	-9.14199E0	5.07832E-3	9.38654E-2	2.71912E1	-3.26708E1	-3.25564E1	2.67914E1	2.15425E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.27492E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.17037E-1	-7.98821E-1	-9.13112E0	-9.14171E0	4.88758E-3	9.37462E-2	2.7245E1	-3.26819E1	-3.26518E1	2.6819E1	2.15808E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.26832E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.17084E-1	-7.98631E-1	-9.13148E0	-9.14159E0	4.93526E-3	9.36508E-2	2.74541E1	-3.26645E1	-3.26386E1	2.68028E1	2.15696E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.27172E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.17275E-1	-7.98488E-1	-9.13126E0	-9.14183E0	4.52995E-3	9.41038E-2	2.7252E1	-3.26738E1	-3.26561E1	2.67944E1	2.15533E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.27607E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16917E-1	-7.98821E-1	-9.13136E0	-9.14185E0	5.07832E-3	9.39846E-2	2.71669E1	-3.26452E1	-3.26224E1	2.6804E1	2.15758E-9	2.51809E-3	2.51809E-3	6.31827E-3	2.26671E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16846E-1	-7.98416E-1	-9.13124E0	-9.1418E0	4.69685E-3	9.377E-2	2.73928E1	-3.26969E1	-3.25852E1	2.68153E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16727E-1	-7.98917E-1	-9.13117E0	-9.14202E0	4.62532E-3	9.37939E-2	2.71889E1	-3.2636E1	-3.26425E1	2.67881E1	2.16175E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.27295E-2