[Scan]
initial_time=2016-01-27T19:22:56
final_time=2016-01-27T19:23:16
ip_count=19
run=1025
dataset=2
scan=108
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08858E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=7.7976E-10
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=2.96283E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=8.44347E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.71132E-10
mult1=-9.78308E-9
mult2=-2.90748E-9
rf_tmon=-5.78956E-3
rf_agc=3.24184E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=4.06039E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20178E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=2.81884E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=2.64449E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36253E0
lens1_imon=2.67422E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.54125E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.91997E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=4.02284E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=2.88626E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=1.87856E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63722E1
os_ef1bup_imon=3.0972E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.19085E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93303E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0207E1
cs_anode1_imon=2.90954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=7.57718E-10
tplens_vset=1.4E-1
tplens_vmon=1.6373E0
tplens_imon=-4.75891E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.51506E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26496E1
iondef2_imon=1.5901E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98406E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.88753E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.35769E0
ionrepsh_imon=1.74973E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.20419E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74762E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.07383E-1
os_ea2_imon=-7.87326E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.0075E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7109E1
cs_ef2a_imon=3.19868E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61639E0
os_ef2alow_imon=-2.47032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69429E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10782E1
os_restr2_imon=2.87757E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0163E1
cs_anode2_imon=2.25063E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71971E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.07322E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.98505E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.56503E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13535E0
cs_ionaccel_imon=-1.62584E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.4724E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.2174E-1
window_imon=-1.02809E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86442E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.38871E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.4897E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.35685E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.63444E0
defgridb_imon=6.08975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33811E1
os_fil1_imon=4.87791E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.75657E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60434E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30864E1
cs_fil1_imon=9.98018E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63223E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62841E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72444E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.92948E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.33256E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.309E-1
cs_fil2_imon=-2.2232E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0783E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21767E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.27413E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.95117E-1
res40_imon=-2.42515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16607E-1	-7.98392E-1	-9.13112E0	-9.14195E0	4.74453E-3	9.37462E-2	2.74553E1	-3.26705E1	-3.26386E1	2.68202E1	2.15533E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.27026E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16631E-1	-7.98297E-1	-9.13119E0	-9.14199E0	4.60148E-3	9.37462E-2	2.73819E1	-3.26573E1	-3.25896E1	2.68053E1	2.15706E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.2769E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16488E-1	-7.98059E-1	-9.13126E0	-9.14197E0	4.86374E-3	9.34362E-2	2.73147E1	-3.26641E1	-3.26637E1	2.6795E1	2.15913E-9	2.52093E-3	2.52093E-3	6.3282E-3	2.26703E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.16655E-1	-7.9875E-1	-9.13146E0	-9.14204E0	4.76837E-3	9.3627E-2	2.72688E1	-3.26362E1	-3.25999E1	2.68225E1	2.15653E-9	2.52216E-3	2.52216E-3	6.3114E-3	2.27327E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09719E0	-8.16751E-1	-7.98082E-1	-9.13122E0	-9.14211E0	4.52995E-3	9.39131E-2	2.72886E1	-3.26704E1	-3.2622E1	2.6811E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16703E-1	-7.98225E-1	-9.13134E0	-9.14168E0	4.79221E-3	9.35078E-2	2.72688E1	-3.26871E1	-3.26775E1	2.69145E1	2.15204E-9	2.51679E-3	2.51679E-3	6.31779E-3	2.2689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16965E-1	-7.98202E-1	-9.13103E0	-9.14195E0	4.88758E-3	9.32693E-2	2.71471E1	-3.26561E1	-3.26158E1	2.6786E1	2.15145E-9	2.5199E-3	2.5199E-3	6.35692E-3	2.26113E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16894E-1	-7.98345E-1	-9.13129E0	-9.14223E0	4.8399E-3	9.35078E-2	2.73918E1	-3.26478E1	-3.26278E1	2.6789E1	2.15987E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.27492E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16965E-1	-7.98631E-1	-9.13136E0	-9.14185E0	4.60148E-3	9.35316E-2	2.73617E1	-3.26809E1	-3.26472E1	2.67984E1	2.15624E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.27219E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16917E-1	-7.9875E-1	-9.13136E0	-9.14202E0	4.74453E-3	9.32455E-2	2.73904E1	-3.26735E1	-3.2614E1	2.67625E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.27413E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16798E-1	-7.98583E-1	-9.13117E0	-9.14202E0	4.57764E-3	9.35078E-2	2.73478E1	-3.26819E1	-3.26603E1	2.6807E1	2.158E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.26703E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16846E-1	-7.98678E-1	-9.13136E0	-9.14221E0	4.52995E-3	9.36747E-2	2.73712E1	-3.26428E1	-3.26488E1	2.68514E1	2.15425E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.2769E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16965E-1	-7.97963E-1	-9.13112E0	-9.14216E0	5.00679E-3	9.35555E-2	2.73263E1	-3.26484E1	-3.26478E1	2.6795E1	2.15613E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.2888E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16965E-1	-7.98297E-1	-9.13095E0	-9.14216E0	5.14984E-3	9.36508E-2	2.73237E1	-3.2653E1	-3.2629E1	2.67816E1	2.15533E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.28385E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16989E-1	-7.98535E-1	-9.1311E0	-9.14199E0	4.60148E-3	9.36747E-2	2.71765E1	-3.26567E1	-3.2626E1	2.67984E1	2.15987E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.26703E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.1706E-1	-7.98202E-1	-9.13112E0	-9.14228E0	4.69685E-3	9.33647E-2	2.73962E1	-3.26622E1	-3.26322E1	2.67951E1	2.16091E-9	2.5199E-3	2.5199E-3	6.323E-3	2.27825E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17013E-1	-7.98488E-1	-9.13115E0	-9.14235E0	4.81606E-3	9.37223E-2	2.73641E1	-3.26573E1	-3.26189E1	2.67938E1	2.15977E-9	2.52521E-3	2.52521E-3	6.3131E-3	2.27454E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17227E-1	-7.98178E-1	-9.13091E0	-9.14183E0	5.00679E-3	9.36031E-2	2.73411E1	-3.26416E1	-3.26434E1	2.67998E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.27802E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.1706E-1	-7.98488E-1	-9.13091E0	-9.14192E0	4.93526E-3	9.35316E-2	2.72384E1	-3.26467E1	-3.2659E1	2.67902E1	2.15519E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.27295E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.16965E-1	-7.97987E-1	-9.13124E0	-9.14192E0	5.03063E-3	9.34839E-2	2.71971E1	-3.26496E1	-3.2616E1	2.68016E1	2.15624E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.27413E-2