[Scan]
initial_time=2016-01-27T19:24:43
final_time=2016-01-27T19:25:02
ip_count=19
run=1025
dataset=2
scan=112
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=7.18546E-10
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.9335E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=7.18892E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=5.21851E-10
mult1=-9.89692E-9
mult2=-2.88628E-9
rf_tmon=-6.86766E-3
rf_agc=3.15852E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=3.78704E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61627E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=2.82304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02352E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.65612E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36054E0
lens1_imon=2.51612E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04087E1
cs_ea2_imon=1.53822E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.92251E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=3.97682E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11087E1
os_restr1_imon=2.87134E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=1.86339E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.18493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.9333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.91278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=7.58731E-10
tplens_vset=1.4E-1
tplens_vmon=1.64924E0
tplens_imon=-1.55148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2623E1
iondef2_imon=1.58256E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=4.03786E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22686E0
ionrepsh_imon=1.7437E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33507E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.03657E-1
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62639E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64388E-1
os_ef2bup_imon=-5.0702E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=2.87494E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.3119E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01491E1
cs_anode2_imon=2.2356E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73309E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.96146E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=2.38085E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-1.70049E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47118E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.51619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.7195E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.06197E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.55471E0
defgridb_imon=6.02735E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3384E1
os_fil1_imon=5.35286E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.47319E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60192E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30845E1
cs_fil1_imon=9.97657E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63021E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62581E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1442E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.27842E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21828E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.27413E-2
chamber_ion_pmon=2.15349E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.63807E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16703E-1	-7.98702E-1	-9.13136E0	-9.14173E0	4.62532E-3	9.36031E-2	2.74307E1	-3.26915E1	-3.2638E1	2.68034E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.27492E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16989E-1	-7.98607E-1	-9.13138E0	-9.14204E0	5.00679E-3	9.34362E-2	2.72766E1	-3.26596E1	-3.26243E1	2.68204E1	2.158E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.27492E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16989E-1	-7.98202E-1	-9.13138E0	-9.14187E0	5.03063E-3	9.36985E-2	2.70684E1	-3.26873E1	-3.26482E1	2.67589E1	2.15558E-9	2.51886E-3	2.51886E-3	6.323E-3	2.27264E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16751E-1	-7.98249E-1	-9.13124E0	-9.14197E0	5.07832E-3	9.32217E-2	2.71206E1	-3.26765E1	-3.25984E1	2.6777E1	2.15332E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.27295E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.16917E-1	-7.98035E-1	-9.13146E0	-9.1418E0	5.29289E-3	9.35793E-2	2.71753E1	-3.26765E1	-3.26428E1	2.68052E1	2.158E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.2769E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16584E-1	-7.98321E-1	-9.1315E0	-9.14185E0	5.126E-3	9.35078E-2	2.73165E1	-3.26296E1	-3.26446E1	2.6834E1	2.15238E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.28086E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.16798E-1	-7.98702E-1	-9.13155E0	-9.14156E0	4.69685E-3	9.35078E-2	2.73538E1	-3.26834E1	-3.25941E1	2.67787E1	2.15519E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.27888E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16679E-1	-7.98869E-1	-9.13146E0	-9.1418E0	4.57764E-3	9.3317E-2	2.73969E1	-3.26756E1	-3.26138E1	2.67974E1	2.15907E-9	2.52236E-3	2.52236E-3	6.32328E-3	2.26577E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16512E-1	-7.98416E-1	-9.13153E0	-9.14187E0	4.8399E-3	9.34839E-2	2.74739E1	-3.26362E1	-3.2653E1	2.68178E1	2.15124E-9	2.52473E-3	2.52473E-3	6.32418E-3	2.26971E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16512E-1	-7.98297E-1	-9.1316E0	-9.14187E0	4.95911E-3	9.33886E-2	2.74433E1	-3.26645E1	-3.25978E1	2.68034E1	2.15987E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.27295E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16369E-1	-7.98583E-1	-9.13103E0	-9.14178E0	4.88758E-3	9.38416E-2	2.74319E1	-3.26554E1	-3.26056E1	2.67944E1	2.15613E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.28284E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.17108E-1	-7.98297E-1	-9.13117E0	-9.14185E0	5.05447E-3	9.35316E-2	2.74656E1	-3.26844E1	-3.26461E1	2.68124E1	2.15992E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.28775E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17108E-1	-7.98607E-1	-9.13129E0	-9.14209E0	4.98295E-3	9.35078E-2	2.74079E1	-3.26676E1	-3.2604E1	2.67842E1	2.15987E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.2769E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16679E-1	-7.98225E-1	-9.13119E0	-9.14199E0	5.05447E-3	9.35793E-2	2.74601E1	-3.26795E1	-3.25821E1	2.68352E1	2.15519E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.26506E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.1687E-1	-7.98583E-1	-9.13146E0	-9.14183E0	5.00679E-3	9.34362E-2	2.73546E1	-3.26378E1	-3.26366E1	2.67944E1	2.15887E-9	2.52473E-3	2.52473E-3	6.34099E-3	2.2677E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16822E-1	-7.98416E-1	-9.13126E0	-9.14164E0	4.98295E-3	9.3627E-2	2.71633E1	-3.26627E1	-3.26585E1	2.67133E1	2.15808E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.27413E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16751E-1	-7.98512E-1	-9.13155E0	-9.14164E0	4.93526E-3	9.38177E-2	2.73069E1	-3.26425E1	-3.2649E1	2.68314E1	2.15533E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.27607E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16798E-1	-7.98726E-1	-9.1316E0	-9.14176E0	4.79221E-3	9.36508E-2	2.73604E1	-3.26933E1	-3.25858E1	2.67649E1	2.15894E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.27492E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.1656E-1	-7.98893E-1	-9.13148E0	-9.14185E0	4.98295E-3	9.36031E-2	2.71671E1	-3.26797E1	-3.26284E1	2.68346E1	2.15425E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.26703E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16107E-1	-7.98607E-1	-9.13131E0	-9.14204E0	5.26905E-3	9.35793E-2	2.73309E1	-3.2623E1	-3.2635E1	2.68076E1	2.15349E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.27413E-2