[Scan]
initial_time=2016-01-27T19:25:09
final_time=2016-01-27T19:25:29
ip_count=19
run=1025
dataset=2
scan=113
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=6.93536E-10
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=2.9695E-10
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=7.47168E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.33235E-10
mult1=-9.41529E-9
mult2=-2.74855E-9
rf_tmon=-4.44033E-3
rf_agc=3.37241E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=3.92675E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.36629E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=1.99395E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05259E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53565E1
cs_ef1b_imon=2.80091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05171E1
cs_ea1_imon=2.65051E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34306E0
lens1_imon=2.47601E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64635E1
os_ef1alow_imon=2.99552E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04198E1
cs_ea2_imon=1.53984E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8409E1
cs_ef1a_imon=2.91202E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=4.01104E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11235E1
os_restr1_imon=2.88442E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=1.87467E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.08363E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25682E0
cs_ionrep_imon=1.19581E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02145E1
cs_anode1_imon=2.90529E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.57909E-10
tplens_vset=1.4E-1
tplens_vmon=1.63612E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.47755E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.59647E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98392E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.61884E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29634E0
ionrepsh_imon=1.76211E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33492E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74436E1
cs_ef2b_imon=3.13352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55165E-1
os_ea2_imon=-5.57264E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00538E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71134E1
cs_ef2a_imon=3.18589E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61511E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82877E-1
os_ef2bup_imon=-5.23808E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10652E1
os_restr2_imon=2.86389E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01886E1
cs_anode2_imon=2.24396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68128E1
iondef4_imon=1.09361E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.97246E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=2.63631E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13309E0
cs_ionaccel_imon=-1.77395E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47297E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56181E1
einzel_imon=7.66307E-6
window_vset=0.0E0
window_vmon=2.08376E-1
window_imon=-9.21183E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86515E1
mask2_imon=-4.39956E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=6.96398E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.21174E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.61081E0
defgridb_imon=6.31981E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33832E1
os_fil1_imon=4.58619E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.22823E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60415E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30823E1
cs_fil1_imon=9.96653E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6318E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62686E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.8764E-2
os_fil2_imon=-2.56145E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.12115E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36673E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30732E-1
cs_fil2_imon=-2.31966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34852E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21748E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.27492E-2
chamber_ion_pmon=2.15332E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.97876E-1
res40_imon=-2.4604E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16441E-1	-7.9875E-1	-9.13122E0	-9.14178E0	4.8399E-3	9.35078E-2	2.72986E1	-3.26472E1	-3.2639E1	2.67565E1	2.15987E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.27888E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16846E-1	-7.98583E-1	-9.13119E0	-9.14223E0	4.98295E-3	9.34362E-2	2.71851E1	-3.26413E1	-3.26603E1	2.67896E1	2.15992E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.29166E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16727E-1	-7.98655E-1	-9.13107E0	-9.14221E0	4.43459E-3	9.30548E-2	2.72715E1	-3.26603E1	-3.25779E1	2.68304E1	2.15613E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.27492E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16894E-1	-7.98726E-1	-9.13129E0	-9.14242E0	4.93526E-3	9.33409E-2	2.72692E1	-3.26695E1	-3.26388E1	2.67879E1	2.15425E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.269E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16679E-1	-7.98774E-1	-9.13112E0	-9.14226E0	4.72069E-3	9.36747E-2	2.73219E1	-3.26782E1	-3.26306E1	2.67862E1	2.15624E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.26252E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16584E-1	-7.98607E-1	-9.13119E0	-9.14176E0	4.48227E-3	9.37223E-2	2.73344E1	-3.2654E1	-3.25872E1	2.68186E1	2.15558E-9	2.52301E-3	2.52301E-3	6.3282E-3	2.27077E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16703E-1	-7.98178E-1	-9.13141E0	-9.14202E0	4.8399E-3	9.34362E-2	2.7406E1	-3.26266E1	-3.26319E1	2.67856E1	2.15772E-9	2.52106E-3	2.52106E-3	6.31902E-3	2.27121E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.16464E-1	-7.98845E-1	-9.1315E0	-9.14216E0	4.673E-3	9.36031E-2	2.74403E1	-3.26735E1	-3.25966E1	2.68148E1	2.16081E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.28483E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.1656E-1	-7.98392E-1	-9.13136E0	-9.14192E0	4.673E-3	9.35793E-2	2.74571E1	-3.26494E1	-3.26314E1	2.6831E1	2.15624E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.27607E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.16846E-1	-7.98845E-1	-9.13117E0	-9.14226E0	4.93526E-3	9.38416E-2	2.75086E1	-3.26685E1	-3.26219E1	2.67758E1	2.15696E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.2677E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16894E-1	-7.98154E-1	-9.1315E0	-9.14209E0	4.79221E-3	9.36985E-2	2.7352E1	-3.26416E1	-3.25918E1	2.67986E1	2.159E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.27802E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16917E-1	-7.98559E-1	-9.13146E0	-9.14202E0	4.50611E-3	9.36985E-2	2.71765E1	-3.26272E1	-3.2675E1	2.6828E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.2769E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16774E-1	-7.98702E-1	-9.13122E0	-9.14216E0	4.81606E-3	9.35316E-2	2.71206E1	-3.26945E1	-3.2602E1	2.67872E1	2.15613E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.27888E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.17084E-1	-7.9875E-1	-9.13131E0	-9.14207E0	4.74453E-3	9.35793E-2	2.72113E1	-3.26596E1	-3.26154E1	2.68022E1	2.15613E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.269E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16226E-1	-7.98702E-1	-9.13143E0	-9.14176E0	4.62532E-3	9.37462E-2	2.73814E1	-3.26494E1	-3.26488E1	2.68118E1	2.15425E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.28483E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16894E-1	-7.98416E-1	-9.13134E0	-9.14202E0	4.673E-3	9.36031E-2	2.72588E1	-3.26669E1	-3.26951E1	2.67938E1	2.158E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.28086E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.17227E-1	-7.98202E-1	-9.13122E0	-9.14209E0	4.86374E-3	9.36985E-2	2.70977E1	-3.2644E1	-3.26434E1	2.67653E1	2.159E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.27413E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16584E-1	-7.98726E-1	-9.13119E0	-9.14209E0	4.673E-3	9.36747E-2	2.71312E1	-3.26676E1	-3.25936E1	2.6771E1	2.15808E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.26639E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16536E-1	-7.98273E-1	-9.13131E0	-9.14202E0	4.86374E-3	9.36985E-2	2.7203E1	-3.26514E1	-3.26573E1	2.68262E1	2.16081E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.2769E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.16703E-1	-7.97939E-1	-9.13148E0	-9.14195E0	4.50611E-3	9.34839E-2	2.73405E1	-3.26428E1	-3.26398E1	2.68128E1	2.15332E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.27492E-2