[Scan]
initial_time=2016-01-27T19:26:56
final_time=2016-01-27T19:27:15
ip_count=19
run=1025
dataset=2
scan=117
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=6.81067E-10
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.89023E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=6.16944E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.46694E-10
mult1=-9.75944E-9
mult2=-2.79969E-9
rf_tmon=-6.1317E-3
rf_agc=3.1563E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=3.64172E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64362E0
bslens_imon=2.50085E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19961E1
lens5a_imon=1.98492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05119E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53781E1
cs_ef1b_imon=2.80289E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04893E1
cs_ea1_imon=2.63228E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37892E0
lens1_imon=2.59246E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.98505E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03868E1
cs_ea2_imon=1.52764E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84303E1
cs_ef1a_imon=2.91771E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=3.78942E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11247E1
os_restr1_imon=2.87529E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15446E1
os_ea1_imon=1.87842E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63642E1
os_ef1bup_imon=3.08275E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23747E0
cs_ionrep_imon=1.18373E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93332E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.90331E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=7.22981E-10
tplens_vset=1.4E-1
tplens_vmon=1.62553E0
tplens_imon=-1.93954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.51084E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.59062E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02889E2
lens6_imon=2.98392E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.54934E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30554E0
ionrepsh_imon=1.74139E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33512E1
lens5b_imon=2.16317E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74774E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.3232E-1
os_ea2_imon=-3.58085E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00737E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7107E1
cs_ef2a_imon=3.20185E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61699E0
os_ef2alow_imon=-2.41653E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.505E-1
os_ef2bup_imon=-5.30849E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10617E1
os_restr2_imon=2.87062E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.32486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01958E1
cs_anode2_imon=2.24474E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72632E1
iondef1_imon=1.08372E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.08717E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.90892E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=2.63345E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12755E0
cs_ionaccel_imon=-1.66142E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56022E1
einzel_imon=7.6061E-6
window_vset=0.0E0
window_vmon=2.01005E-1
window_imon=-9.21891E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.41647E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.34464E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.53162E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=6.94767E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.55789E0
defgridb_imon=6.25679E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33842E1
os_fil1_imon=3.82838E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60389E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60408E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30788E1
cs_fil1_imon=9.96724E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64344E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62569E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.94543E-2
os_fil2_imon=-2.54199E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.24834E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.23156E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28953E-1
cs_fil2_imon=-2.60686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1946E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21848E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.27996E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40061E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.04894E-1
res40_imon=-2.35814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.16321E-1	-7.98655E-1	-9.13153E0	-9.14197E0	5.48363E-3	9.38416E-2	2.74514E1	-3.26744E1	-3.26231E1	2.67955E1	2.15257E-9	2.51675E-3	2.51675E-3	6.31332E-3	2.28054E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16464E-1	-7.98512E-1	-9.13153E0	-9.14211E0	4.95911E-3	9.36508E-2	2.72336E1	-3.26573E1	-3.262E1	2.67926E1	2.15992E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.26445E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16655E-1	-7.98512E-1	-9.13169E0	-9.14197E0	5.14984E-3	9.3317E-2	2.73629E1	-3.26703E1	-3.26425E1	2.6801E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.2769E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16345E-1	-7.98678E-1	-9.13143E0	-9.14214E0	4.8399E-3	9.35316E-2	2.73339E1	-3.26741E1	-3.2653E1	2.68178E1	2.15808E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.26639E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16512E-1	-7.9844E-1	-9.13146E0	-9.1419E0	4.76837E-3	9.37223E-2	2.72148E1	-3.26614E1	-3.26319E1	2.67868E1	2.15706E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.27888E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16536E-1	-7.98488E-1	-9.13146E0	-9.14199E0	5.29289E-3	9.37462E-2	2.73147E1	-3.26597E1	-3.25707E1	2.68298E1	2.15992E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.27802E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.1656E-1	-7.98488E-1	-9.13129E0	-9.14214E0	5.22137E-3	9.36031E-2	2.73847E1	-3.26542E1	-3.2648E1	2.67842E1	2.15257E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.26252E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16369E-1	-7.98202E-1	-9.13148E0	-9.14209E0	5.05447E-3	9.35078E-2	2.72348E1	-3.2644E1	-3.26362E1	2.68126E1	2.16173E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.27776E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16464E-1	-7.97772E-1	-9.13136E0	-9.14197E0	4.79221E-3	9.39369E-2	2.74178E1	-3.26526E1	-3.26183E1	2.6825E1	2.158E-9	2.52428E-3	2.52428E-3	6.34588E-3	2.2769E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16321E-1	-7.9813E-1	-9.13107E0	-9.14214E0	4.8399E-3	9.40084E-2	2.71663E1	-3.26723E1	-3.26296E1	2.68202E1	2.15808E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.27026E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.1594E-1	-7.98368E-1	-9.13103E0	-9.14195E0	5.10216E-3	9.37462E-2	2.741E1	-3.2655E1	-3.26474E1	2.68151E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.2769E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16512E-1	-7.98225E-1	-9.13136E0	-9.1419E0	4.57764E-3	9.38892E-2	2.73176E1	-3.26535E1	-3.26054E1	2.67839E1	2.15624E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.26639E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16631E-1	-7.98392E-1	-9.13148E0	-9.14211E0	4.79221E-3	9.38416E-2	2.71627E1	-3.26669E1	-3.26651E1	2.68082E1	2.15977E-9	2.51611E-3	2.51611E-3	6.3131E-3	2.2766E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16321E-1	-7.98321E-1	-9.131E0	-9.14199E0	4.8399E-3	9.34601E-2	2.73514E1	-3.26723E1	-3.2641E1	2.67571E1	2.15716E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.27026E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.16154E-1	-7.98583E-1	-9.13115E0	-9.14195E0	5.05447E-3	9.37223E-2	2.73724E1	-3.26651E1	-3.26212E1	2.67896E1	2.15332E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.2769E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16321E-1	-7.98488E-1	-9.13126E0	-9.14204E0	5.05447E-3	9.32932E-2	2.72868E1	-3.26449E1	-3.26248E1	2.68202E1	2.15706E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.269E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16679E-1	-7.97939E-1	-9.13126E0	-9.14221E0	4.95911E-3	9.32932E-2	2.74332E1	-3.26827E1	-3.2653E1	2.67801E1	2.15894E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.27295E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.17037E-1	-7.98154E-1	-9.13122E0	-9.14178E0	4.62532E-3	9.34124E-2	2.72389E1	-3.26623E1	-3.25916E1	2.67751E1	2.15678E-9	2.52285E-3	2.52285E-3	6.32222E-3	2.26526E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16679E-1	-7.98106E-1	-9.13146E0	-9.14221E0	4.95911E-3	9.3627E-2	2.73924E1	-3.2672E1	-3.26543E1	2.67978E1	2.15762E-9	2.52621E-3	2.52621E-3	6.31332E-3	2.272E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16965E-1	-7.98416E-1	-9.13107E0	-9.14183E0	4.74453E-3	9.36031E-2	2.72632E1	-3.26555E1	-3.2616E1	2.6795E1	2.159E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.27996E-2