[Scan]
initial_time=2016-01-27T19:28:16
final_time=2016-01-27T19:39:38
ip_count=19
run=1025
dataset=2
scan=120
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=6.87552E-10
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.94161E-10
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=6.69479E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.22411E-10
mult1=-9.88488E-9
mult2=-2.7745E-9
rf_tmon=-5.67202E-3
rf_agc=3.23723E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=3.87633E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67936E0
bslens_imon=2.55938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=1.99028E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.04801E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=2.81476E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04706E1
cs_ea1_imon=2.63917E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37857E0
lens1_imon=2.68556E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.51407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.92251E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.93963E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=2.8699E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=1.89475E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93467E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.9099E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=7.8032E-10
tplens_vset=1.4E-1
tplens_vmon=1.64384E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26512E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.37553E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30677E0
ionrepsh_imon=1.7556E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.15323E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.16876E-1
os_ea2_imon=-4.07495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62459E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.16335E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=2.87422E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.32344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7111E1
iondef1_imon=1.06813E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.91156E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=2.67017E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-1.67166E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56513E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.00524E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39271E-4
mask2_vset=0.0E0
mask2_vmon=-1.86638E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.50898E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.30132E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.44049E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.56975E0
defgridb_imon=6.46715E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33857E1
os_fil1_imon=4.86632E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.47319E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60459E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=9.96732E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63819E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62796E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.24491E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-1.85508E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21803E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.27295E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.92328E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16298E-1	-7.98655E-1	-9.13136E0	-9.14221E0	4.8399E-3	9.35793E-2	2.70927E1	-3.26585E1	-3.26655E1	2.6807E1	2.15987E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.2572E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16607E-1	-7.98178E-1	-9.13138E0	-9.14235E0	4.76837E-3	9.35793E-2	2.72102E1	-3.2694E1	-3.26021E1	2.67926E1	2.15533E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.26252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16798E-1	-7.98464E-1	-9.13134E0	-9.14195E0	4.86374E-3	9.34124E-2	2.71895E1	-3.26608E1	-3.26254E1	2.68094E1	2.15977E-9	2.51838E-3	2.51838E-3	6.34164E-3	2.28071E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16679E-1	-7.98178E-1	-9.13177E0	-9.14195E0	5.05447E-3	9.37939E-2	2.71002E1	-3.26885E1	-3.26302E1	2.68227E1	2.15716E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.26832E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16798E-1	-7.98392E-1	-9.13148E0	-9.14223E0	4.98295E-3	9.36985E-2	2.72757E1	-3.26591E1	-3.26146E1	2.68045E1	2.15808E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.26445E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.17013E-1	-7.98559E-1	-9.13138E0	-9.14209E0	5.05447E-3	9.38416E-2	2.73977E1	-3.26467E1	-3.25953E1	2.67926E1	2.15894E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.25917E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16584E-1	-7.98225E-1	-9.13146E0	-9.14209E0	4.79221E-3	9.34839E-2	2.74076E1	-3.26295E1	-3.26411E1	2.67816E1	2.15624E-9	2.51954E-3	2.51954E-3	6.28592E-3	2.27996E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16464E-1	-7.98273E-1	-9.13131E0	-9.14204E0	4.64916E-3	9.36985E-2	2.73613E1	-3.26485E1	-3.25917E1	2.68207E1	2.15716E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.27219E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16274E-1	-7.98345E-1	-9.1315E0	-9.14209E0	4.8399E-3	9.40561E-2	2.73818E1	-3.26514E1	-3.26266E1	2.68298E1	2.15696E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.27373E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16488E-1	-7.98249E-1	-9.13153E0	-9.14228E0	4.57764E-3	9.33886E-2	2.71969E1	-3.26831E1	-3.26236E1	2.67878E1	2.15808E-9	2.52061E-3	2.52061E-3	6.34518E-3	2.27413E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16441E-1	-7.98607E-1	-9.1315E0	-9.14202E0	5.22137E-3	9.34362E-2	2.72083E1	-3.26579E1	-3.26063E1	2.6802E1	2.15425E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.27097E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.1625E-1	-7.98559E-1	-9.13167E0	-9.14218E0	5.22137E-3	9.36747E-2	2.73969E1	-3.26419E1	-3.26689E1	2.67795E1	2.15726E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.27528E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16345E-1	-7.98464E-1	-9.13141E0	-9.14199E0	4.79221E-3	9.3627E-2	2.74799E1	-3.26669E1	-3.26404E1	2.6798E1	2.15887E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.27776E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16607E-1	-7.98345E-1	-9.13157E0	-9.14197E0	4.91142E-3	9.39131E-2	2.7495E1	-3.26518E1	-3.26044E1	2.6831E1	2.16081E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.26703E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16607E-1	-7.98082E-1	-9.13136E0	-9.14218E0	5.26905E-3	9.35316E-2	2.75184E1	-3.26771E1	-3.26008E1	2.67758E1	2.15613E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.269E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16512E-1	-7.98512E-1	-9.13155E0	-9.14207E0	5.05447E-3	9.35316E-2	2.73293E1	-3.2685E1	-3.26372E1	2.68118E1	2.15519E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.27492E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16274E-1	-7.98368E-1	-9.13146E0	-9.14209E0	5.36442E-3	9.36747E-2	2.71559E1	-3.2685E1	-3.26767E1	2.68134E1	2.15332E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.2769E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16607E-1	-7.9844E-1	-9.13167E0	-9.14218E0	4.64916E-3	9.40084E-2	2.73736E1	-3.26585E1	-3.2614E1	2.68274E1	2.15726E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.27718E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16441E-1	-7.98225E-1	-9.13143E0	-9.14199E0	4.79221E-3	9.37223E-2	2.73411E1	-3.26803E1	-3.26478E1	2.68322E1	2.15706E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.28681E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16298E-1	-7.98512E-1	-9.13134E0	-9.14185E0	4.33922E-3	9.36985E-2	2.7111E1	-3.26512E1	-3.26176E1	2.67926E1	2.15519E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.27295E-2