[Scan]
initial_time=2016-01-27T19:39:45
final_time=2016-01-27T19:40:04
ip_count=19
run=1025
dataset=2
scan=121
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=6.42395E-10
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=3.27265E-10
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=7.10154E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.24211E-10
mult1=-1.00414E-8
mult2=-2.81442E-9
rf_tmon=-5.35959E-3
rf_agc=3.28589E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=4.13072E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20259E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5349E1
cs_ef1b_imon=2.80863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02363E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.64061E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35213E0
lens1_imon=2.69998E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.99964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.52272E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8392E1
cs_ef1a_imon=2.91639E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=4.34709E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=2.87819E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15636E1
os_ea1_imon=1.90881E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.18566E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.90882E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=7.65562E-10
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.51551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.03821E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31278E0
ionrepsh_imon=1.75704E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.24085E-1
os_ea2_imon=-4.57964E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.87566E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.32632E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01323E1
cs_anode2_imon=2.23848E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74301E1
iondef1_imon=1.08364E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67421E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.00007E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=2.60198E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.66445E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.15541E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=6.73392E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.33377E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.26745E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.44944E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33869E1
os_fil1_imon=4.6621E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.5753E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60654E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.98137E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63958E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6273E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.12761E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21785E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=2.27574E-2
chamber_ion_pmon=2.16173E-9
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.92328E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.16441E-1	-7.98774E-1	-9.1316E0	-9.14221E0	4.79221E-3	9.37939E-2	2.73488E1	-3.26478E1	-3.26337E1	2.68036E1	2.15706E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.26506E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16607E-1	-7.9844E-1	-9.13148E0	-9.14183E0	4.72069E-3	9.36031E-2	2.72474E1	-3.26621E1	-3.26428E1	2.68082E1	2.15257E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.26252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16393E-1	-7.98321E-1	-9.13138E0	-9.14197E0	4.79221E-3	9.35793E-2	2.74685E1	-3.2685E1	-3.26095E1	2.68112E1	2.15894E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.2769E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16202E-1	-7.98535E-1	-9.13117E0	-9.14221E0	4.62532E-3	9.35316E-2	2.73216E1	-3.26531E1	-3.26673E1	2.68202E1	2.15238E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.27097E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16631E-1	-7.98464E-1	-9.13122E0	-9.14204E0	4.62532E-3	9.34601E-2	2.71645E1	-3.26554E1	-3.26146E1	2.67842E1	2.16178E-9	2.51919E-3	2.51919E-3	6.32858E-3	2.26956E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16441E-1	-7.9844E-1	-9.13134E0	-9.14247E0	4.74453E-3	9.35793E-2	2.73516E1	-3.26707E1	-3.26113E1	2.68016E1	2.158E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.27888E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16798E-1	-7.98082E-1	-9.13126E0	-9.1423E0	5.05447E-3	9.36747E-2	2.72162E1	-3.26627E1	-3.26212E1	2.68028E1	2.156E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.26569E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16703E-1	-7.98297E-1	-9.13134E0	-9.14237E0	5.14984E-3	9.36985E-2	2.73847E1	-3.26349E1	-3.2613E1	2.67812E1	2.15706E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.25524E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16846E-1	-7.98488E-1	-9.13126E0	-9.1423E0	5.14984E-3	9.3627E-2	2.72045E1	-3.26568E1	-3.26233E1	2.68071E1	2.15808E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.27413E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16631E-1	-7.98535E-1	-9.13115E0	-9.14204E0	4.81606E-3	9.3627E-2	2.74031E1	-3.2683E1	-3.26134E1	2.67927E1	2.16011E-9	2.52224E-3	2.52224E-3	6.29738E-3	2.27848E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16894E-1	-7.98512E-1	-9.13107E0	-9.14214E0	5.126E-3	9.34601E-2	2.71921E1	-3.27029E1	-3.2605E1	2.68076E1	2.15959E-9	2.52191E-3	2.52191E-3	6.33161E-3	2.27283E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16727E-1	-7.98559E-1	-9.13122E0	-9.14187E0	5.19753E-3	9.377E-2	2.72738E1	-3.26408E1	-3.26449E1	2.6819E1	2.16081E-9	2.52647E-3	2.52647E-3	6.29645E-3	2.27492E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16393E-1	-7.98607E-1	-9.13146E0	-9.14214E0	5.07832E-3	9.37223E-2	2.74253E1	-3.27083E1	-3.26308E1	2.67884E1	2.15533E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.27802E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16607E-1	-7.98464E-1	-9.13136E0	-9.14211E0	5.07832E-3	9.38416E-2	2.71464E1	-3.26679E1	-3.26101E1	2.68178E1	2.16175E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.27097E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16393E-1	-7.97892E-1	-9.13117E0	-9.1418E0	5.07832E-3	9.36747E-2	2.7397E1	-3.26687E1	-3.26536E1	2.6777E1	2.15349E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.24905E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16512E-1	-7.98297E-1	-9.13131E0	-9.14209E0	5.10216E-3	9.35078E-2	2.73538E1	-3.26561E1	-3.26506E1	2.67902E1	2.158E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.26113E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.15964E-1	-7.98273E-1	-9.13105E0	-9.14183E0	4.95911E-3	9.36985E-2	2.73157E1	-3.2629E1	-3.26284E1	2.67827E1	2.15894E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.25917E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.16154E-1	-7.98678E-1	-9.13129E0	-9.14164E0	5.126E-3	9.36031E-2	2.71038E1	-3.25359E1	-3.26386E1	2.67938E1	2.15716E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.27026E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.16298E-1	-7.98488E-1	-9.13122E0	-9.14171E0	4.57764E-3	9.36508E-2	2.7242E1	-3.26398E1	-3.26164E1	2.6813E1	2.15519E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.27888E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16131E-1	-7.98368E-1	-9.13148E0	-9.14192E0	4.48227E-3	9.3627E-2	2.74301E1	-3.26675E1	-3.2623E1	2.67421E1	2.16173E-9	2.51693E-3	2.51693E-3	6.32978E-3	2.27574E-2