[Scan]
initial_time=2016-01-27T19:40:12
final_time=2016-01-27T19:40:31
ip_count=19
run=1025
dataset=2
scan=122
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=6.70052E-10
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.77829E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=6.95288E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=5.45001E-10
mult1=-9.84875E-9
mult2=-2.89028E-9
rf_tmon=-4.04378E-3
rf_agc=3.30872E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=3.47352E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.77207E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=2.82124E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=2.63593E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36295E0
lens1_imon=2.64951E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.51371E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.93513E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.52323E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=2.88647E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=1.90376E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.17412E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=2.90846E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=7.20978E-10
tplens_vset=1.4E-1
tplens_vmon=1.63482E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.76964E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.76569E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.17089E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2769E-1
os_ea2_imon=-5.76927E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.20831E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62038E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.11529E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=2.8872E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.28811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01527E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7233E1
iondef1_imon=1.1132E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68065E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.93529E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.63607E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10011E0
cs_ionaccel_imon=-1.59598E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55997E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82588E2
mask1_imon=2.39271E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-5.07579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.26024E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.37703E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.06197E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.40132E0
defgridb_imon=6.20038E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33864E1
os_fil1_imon=4.31972E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.07986E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60464E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.97447E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63994E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62959E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02812E-2
os_fil2_imon=-2.18544E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.30936E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21887E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.28681E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.07345E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16131E-1	-7.98416E-1	-9.13146E0	-9.14209E0	4.72069E-3	9.38416E-2	2.71903E1	-3.26687E1	-3.26152E1	2.6785E1	2.15349E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.25674E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16464E-1	-7.98154E-1	-9.13138E0	-9.14195E0	4.62532E-3	9.39131E-2	2.73796E1	-3.26554E1	-3.26452E1	2.6797E1	2.15987E-9	2.52757E-3	2.52757E-3	6.29098E-3	2.2631E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.16464E-1	-7.98202E-1	-9.13146E0	-9.1418E0	5.14984E-3	9.39608E-2	2.71681E1	-3.2617E1	-3.26128E1	2.6804E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.25524E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16417E-1	-7.98416E-1	-9.13184E0	-9.14183E0	4.8399E-3	9.36031E-2	2.74565E1	-3.26975E1	-3.26266E1	2.67937E1	2.15519E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.2572E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16822E-1	-7.97987E-1	-9.13179E0	-9.14197E0	4.98295E-3	9.37462E-2	2.7257E1	-3.26639E1	-3.2638E1	2.68032E1	2.15894E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.26506E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16393E-1	-7.98106E-1	-9.13136E0	-9.14197E0	5.19753E-3	9.35316E-2	2.72697E1	-3.26608E1	-3.25965E1	2.68076E1	2.15519E-9	2.52428E-3	2.52428E-3	6.26916E-3	2.27888E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16369E-1	-7.98059E-1	-9.13131E0	-9.1419E0	4.88758E-3	9.38177E-2	2.734E1	-3.26603E1	-3.26503E1	2.68045E1	2.15349E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.27219E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16774E-1	-7.98464E-1	-9.13119E0	-9.14171E0	5.29289E-3	9.39608E-2	2.72903E1	-3.26667E1	-3.26048E1	2.68058E1	2.15393E-9	2.51952E-3	2.51952E-3	6.31879E-3	2.27044E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16441E-1	-7.98059E-1	-9.13091E0	-9.14183E0	5.31673E-3	9.34839E-2	2.72408E1	-3.26705E1	-3.26482E1	2.68157E1	2.158E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.28284E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16274E-1	-7.98488E-1	-9.131E0	-9.14223E0	5.14984E-3	9.37939E-2	2.73532E1	-3.26627E1	-3.2611E1	2.68338E1	2.15716E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.26832E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.1656E-1	-7.98011E-1	-9.13115E0	-9.14214E0	5.10216E-3	9.35078E-2	2.73345E1	-3.26422E1	-3.26056E1	2.67884E1	2.16175E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.2769E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16274E-1	-7.98583E-1	-9.13117E0	-9.14218E0	4.86374E-3	9.38177E-2	2.72756E1	-3.26679E1	-3.26236E1	2.67729E1	2.15987E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.25917E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16393E-1	-7.98416E-1	-9.13129E0	-9.14211E0	4.76837E-3	9.38416E-2	2.71561E1	-3.26633E1	-3.26218E1	2.67944E1	2.15165E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.26445E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16202E-1	-7.98535E-1	-9.13112E0	-9.14195E0	5.60284E-3	9.36031E-2	2.7385E1	-3.26428E1	-3.2596E1	2.67992E1	2.15791E-9	2.5225E-3	2.5225E-3	6.32978E-3	2.27776E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16512E-1	-7.98368E-1	-9.13115E0	-9.14178E0	4.79221E-3	9.36747E-2	2.74157E1	-3.26621E1	-3.26609E1	2.67974E1	2.15716E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.27026E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16536E-1	-7.98512E-1	-9.13155E0	-9.14187E0	5.14984E-3	9.36031E-2	2.71837E1	-3.26434E1	-3.26014E1	2.68106E1	2.158E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.27492E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16703E-1	-7.98345E-1	-9.1316E0	-9.14183E0	5.31673E-3	9.38177E-2	2.7413E1	-3.27222E1	-3.26154E1	2.67944E1	2.15706E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.27888E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16703E-1	-7.98345E-1	-9.13129E0	-9.14197E0	4.86374E-3	9.34839E-2	2.737E1	-3.27065E1	-3.2495E1	2.67956E1	2.15613E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.26506E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16751E-1	-7.98512E-1	-9.13124E0	-9.14202E0	4.36306E-3	9.31978E-2	2.73544E1	-3.26675E1	-3.259E1	2.68076E1	2.15808E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.26639E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16298E-1	-7.98655E-1	-9.13131E0	-9.14226E0	4.72069E-3	9.34839E-2	2.7233E1	-3.26627E1	-3.26236E1	2.68065E1	2.15519E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.28681E-2