[Scan]
initial_time=2016-01-27T19:41:32
final_time=2016-01-27T19:41:51
ip_count=19
run=1025
dataset=2
scan=125
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=6.87087E-10
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=3.26753E-10
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=6.40059E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.27048E-10
mult1=-1.00173E-8
mult2=-2.84237E-9
rf_tmon=-5.95441E-3
rf_agc=3.30632E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=3.91364E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.43354E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=2.0035E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=2.79962E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=2.63883E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35663E0
lens1_imon=2.80871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=3.00937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.52887E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.91423E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=4.04191E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10997E1
os_restr1_imon=2.88143E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14952E1
os_ea1_imon=1.89874E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27687E0
cs_ionrep_imon=1.1767E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.90954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=8.30901E-10
tplens_vset=1.4E-1
tplens_vmon=1.66621E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.51754E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26861E1
iondef2_imon=1.56178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.66938E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29516E0
ionrepsh_imon=1.74548E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33492E1
lens5b_imon=2.20312E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.92045E-1
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00828E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6354E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55378E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.86305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02121E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74048E1
iondef1_imon=1.12573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.95355E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82904E-1
olens1_imon=2.75099E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.60318E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47147E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.10135E-1
window_imon=-1.05178E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39329E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-7.85084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.33562E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.3729E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.53382E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.43955E0
defgridb_imon=6.3375E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33832E1
os_fil1_imon=4.49992E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4852E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60725E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=9.97008E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62804E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63037E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.96504E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.21866E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21695E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.28284E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.60804E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16774E-1	-7.98392E-1	-9.13119E0	-9.14237E0	4.98295E-3	9.3627E-2	2.71128E1	-3.26476E1	-3.26422E1	2.67938E1	2.16175E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.27492E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16607E-1	-7.98607E-1	-9.13129E0	-9.14226E0	5.05447E-3	9.34362E-2	2.72432E1	-3.2672E1	-3.26172E1	2.68076E1	2.15519E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.27295E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16607E-1	-7.98416E-1	-9.13124E0	-9.14235E0	4.91142E-3	9.33647E-2	2.74908E1	-3.26416E1	-3.2635E1	2.67529E1	2.15808E-9	2.52169E-3	2.52169E-3	6.29128E-3	2.27219E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16488E-1	-7.98583E-1	-9.13155E0	-9.14218E0	5.07832E-3	9.36747E-2	2.74779E1	-3.26691E1	-3.26071E1	2.67926E1	2.15706E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.269E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16369E-1	-7.98583E-1	-9.13136E0	-9.14195E0	4.62532E-3	9.37462E-2	2.72114E1	-3.26494E1	-3.2653E1	2.68007E1	2.15533E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.25867E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.1656E-1	-7.98178E-1	-9.13148E0	-9.14192E0	5.00679E-3	9.33886E-2	2.73794E1	-3.26986E1	-3.26077E1	2.68082E1	2.15613E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.27097E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16154E-1	-7.98798E-1	-9.13172E0	-9.14192E0	4.62532E-3	9.33886E-2	2.72192E1	-3.26603E1	-3.26038E1	2.67722E1	2.15349E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.26639E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16321E-1	-7.98702E-1	-9.13146E0	-9.14185E0	4.95911E-3	9.38416E-2	2.72538E1	-3.26567E1	-3.2672E1	2.68088E1	2.158E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.27097E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16059E-1	-7.98154E-1	-9.13119E0	-9.14202E0	4.72069E-3	9.36031E-2	2.73321E1	-3.26627E1	-3.25978E1	2.67951E1	2.15907E-9	2.51919E-3	2.51919E-3	6.31798E-3	2.26956E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16298E-1	-7.9875E-1	-9.13136E0	-9.14233E0	4.8399E-3	9.34839E-2	2.73682E1	-3.26482E1	-3.26314E1	2.67662E1	2.15791E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.25968E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16083E-1	-7.98512E-1	-9.13119E0	-9.14216E0	4.98295E-3	9.33647E-2	2.72949E1	-3.26765E1	-3.2611E1	2.68148E1	2.15987E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.2572E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16584E-1	-7.98225E-1	-9.13134E0	-9.14254E0	4.79221E-3	9.35793E-2	2.72042E1	-3.26561E1	-3.26657E1	2.68302E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.27097E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16345E-1	-7.98678E-1	-9.13141E0	-9.14233E0	4.79221E-3	9.3317E-2	2.72153E1	-3.26631E1	-3.26417E1	2.67833E1	2.15332E-9	2.5199E-3	2.5199E-3	6.35692E-3	2.2572E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16488E-1	-7.98845E-1	-9.13129E0	-9.14199E0	4.91142E-3	9.32693E-2	2.73027E1	-3.26408E1	-3.26113E1	2.6828E1	2.15455E-9	2.52448E-3	2.52448E-3	6.31798E-3	2.2544E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16655E-1	-7.98392E-1	-9.13148E0	-9.14168E0	5.00679E-3	9.35555E-2	2.73596E1	-3.26438E1	-3.25966E1	2.68052E1	2.15716E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.26059E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.1656E-1	-7.98392E-1	-9.13129E0	-9.14199E0	4.98295E-3	9.3317E-2	2.71269E1	-3.26838E1	-3.26054E1	2.68124E1	2.15613E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.26113E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16417E-1	-7.98559E-1	-9.13153E0	-9.14204E0	5.00679E-3	9.3627E-2	2.71971E1	-3.26531E1	-3.26638E1	2.6777E1	2.15519E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.26113E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16488E-1	-7.98488E-1	-9.13167E0	-9.14211E0	4.88758E-3	9.35078E-2	2.73234E1	-3.25422E1	-3.26573E1	2.68059E1	2.15441E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.27413E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16536E-1	-7.98559E-1	-9.13165E0	-9.14216E0	4.95911E-3	9.35316E-2	2.73556E1	-3.26615E1	-3.2638E1	2.68142E1	2.15992E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.27413E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16417E-1	-7.98464E-1	-9.13169E0	-9.14197E0	5.10216E-3	9.35555E-2	2.74048E1	-3.26861E1	-3.26488E1	2.68016E1	2.15894E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.28284E-2