[Scan]
initial_time=2016-01-27T19:41:58
final_time=2016-01-27T19:42:18
ip_count=19
run=1025
dataset=2
scan=126
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08873E-4
ql1_vset=
ql1_vmon=-8.15845E-1
ql1_imon=6.47426E-10
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.71034E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=6.65975E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.06973E-10
mult1=-9.39121E-9
mult2=-2.82041E-9
rf_tmon=-4.52444E-3
rf_agc=3.31293E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=3.66485E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.48007E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20163E1
lens5a_imon=2.00722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=2.78721E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02085E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04754E1
cs_ea1_imon=2.64891E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43324E0
lens1_imon=2.43681E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64805E1
os_ef1alow_imon=2.98982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03384E1
cs_ea2_imon=1.54831E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.91649E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.96359E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=2.89147E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=1.85546E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63664E1
os_ef1bup_imon=3.08782E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.1871E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02024E1
cs_anode1_imon=2.90189E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.68828E-10
tplens_vset=1.4E-1
tplens_vmon=1.65105E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26591E1
iondef3_imon=1.47694E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.58653E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.05681E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=1.7538E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33165E1
lens5b_imon=2.16909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74901E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.46917E-1
os_ea2_imon=-4.50754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71026E1
cs_ef2a_imon=3.2025E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61697E0
os_ef2alow_imon=-2.45642E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64216E-1
os_ef2bup_imon=-5.31308E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10915E1
os_restr2_imon=2.87444E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02209E1
cs_anode2_imon=2.23638E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.10635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68337E1
iondef4_imon=1.06696E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.94324E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.62427E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12667E0
cs_ionaccel_imon=-1.73705E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56312E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=2.17107E-1
window_imon=-9.96817E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86761E1
mask2_imon=-6.38866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.53782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.27969E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.42967E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.38027E0
defgridb_imon=6.14631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33833E1
os_fil1_imon=4.17127E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.65232E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60457E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.98864E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63008E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.368E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.7983E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.24362E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.2927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.27701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21844E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.27492E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.60944E-1
res40_imon=-2.56416E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16607E-1	-7.9844E-1	-9.13165E0	-9.14214E0	5.26905E-3	9.34362E-2	2.72998E1	-3.26596E1	-3.25859E1	2.68358E1	2.15987E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.269E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.16488E-1	-7.98464E-1	-9.1316E0	-9.14211E0	4.93526E-3	9.34362E-2	2.73039E1	-3.26626E1	-3.25971E1	2.68198E1	2.159E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.27413E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.16631E-1	-7.98368E-1	-9.13184E0	-9.14233E0	4.98295E-3	9.34601E-2	2.72594E1	-3.265E1	-3.2623E1	2.6787E1	2.15546E-9	2.51709E-3	2.51709E-3	6.33388E-3	2.26577E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16321E-1	-7.98392E-1	-9.13174E0	-9.14223E0	5.22137E-3	9.33409E-2	2.73808E1	-3.26585E1	-3.2611E1	2.68106E1	2.15791E-9	2.52139E-3	2.52139E-3	6.29067E-3	2.27574E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09688E0	-8.17037E-1	-7.98297E-1	-9.1315E0	-9.14204E0	5.07832E-3	9.3317E-2	2.72588E1	-3.262E1	-3.26482E1	2.68082E1	2.15987E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.269E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.1656E-1	-7.98416E-1	-9.13148E0	-9.14211E0	5.29289E-3	9.32932E-2	2.73003E1	-3.26687E1	-3.26338E1	2.67984E1	2.15238E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.2631E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16536E-1	-7.98583E-1	-9.13117E0	-9.14176E0	5.22137E-3	9.32693E-2	2.73399E1	-3.26555E1	-3.25835E1	2.68232E1	2.159E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.2819E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16846E-1	-7.98297E-1	-9.13138E0	-9.14176E0	5.36442E-3	9.35078E-2	2.7349E1	-3.26561E1	-3.2626E1	2.68148E1	2.15519E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.27295E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16226E-1	-7.98607E-1	-9.13148E0	-9.14171E0	4.8399E-3	9.34601E-2	2.7355E1	-3.26627E1	-3.2632E1	2.68004E1	2.15706E-9	2.52428E-3	2.52428E-3	6.34588E-3	2.2769E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16298E-1	-7.98225E-1	-9.1315E0	-9.14178E0	4.88758E-3	9.33886E-2	2.72845E1	-3.26732E1	-3.26437E1	2.67986E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.26059E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16989E-1	-7.97892E-1	-9.13134E0	-9.14199E0	5.24521E-3	9.34124E-2	2.71787E1	-3.26789E1	-3.25975E1	2.68082E1	2.15332E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.269E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16488E-1	-7.98488E-1	-9.13126E0	-9.14214E0	5.05447E-3	9.34839E-2	2.74597E1	-3.26502E1	-3.26648E1	2.68043E1	2.15825E-9	2.51369E-3	2.51369E-3	6.31779E-3	2.26517E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16607E-1	-7.98225E-1	-9.13129E0	-9.14207E0	5.126E-3	9.31263E-2	2.71723E1	-3.26524E1	-3.26362E1	2.67974E1	2.15574E-9	2.5257E-3	2.5257E-3	6.29581E-3	2.26078E-2
1.7E1	0.0E0	1.0E0	6.87E2	4.7E2	-2.09394E0	-8.16274E-1	-7.9844E-1	-9.13131E0	-9.14223E0	5.14984E-3	9.31263E-2	2.73798E1	-3.26609E1	-3.26505E1	2.6828E1	2.15519E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.26506E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.16274E-1	-7.98082E-1	-9.13134E0	-9.14204E0	5.14984E-3	9.32217E-2	2.72715E1	-3.26659E1	-3.25975E1	2.67976E1	2.15238E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.2572E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16202E-1	-7.9844E-1	-9.13122E0	-9.14202E0	5.34058E-3	9.32932E-2	2.73222E1	-3.26809E1	-3.26065E1	2.67986E1	2.15292E-9	2.5199E-3	2.5199E-3	6.31779E-3	2.26144E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16107E-1	-7.98535E-1	-9.13146E0	-9.14183E0	5.07832E-3	9.36985E-2	2.73263E1	-3.26921E1	-3.25835E1	2.67896E1	2.15519E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.25329E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16107E-1	-7.98607E-1	-9.1315E0	-9.14197E0	5.22137E-3	9.36747E-2	2.73448E1	-3.27215E1	-3.26549E1	2.68082E1	2.15624E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.26059E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16059E-1	-7.97915E-1	-9.13146E0	-9.14207E0	5.26905E-3	9.33409E-2	2.73393E1	-3.2641E1	-3.25978E1	2.68256E1	2.15425E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.27295E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.15845E-1	-7.98225E-1	-9.13143E0	-9.14211E0	5.43594E-3	9.37939E-2	2.73093E1	-3.26717E1	-3.26591E1	2.68337E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.27492E-2