[Scan]
initial_time=2016-01-27T19:42:25
final_time=2016-01-27T19:42:45
ip_count=19
run=1025
dataset=2
scan=127
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=6.37519E-10
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=2.81465E-10
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=6.11985E-10
ql4_vset=
ql4_vmon=-9.14235E0
ql4_imon=5.25916E-10
mult1=-9.83671E-9
mult2=-2.78249E-9
rf_tmon=-5.32354E-3
rf_agc=3.29731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.87764E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.63509E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1242E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=2.81656E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=2.61466E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38458E0
lens1_imon=2.63869E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.99531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.54543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.92143E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.90565E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=2.88431E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=1.91314E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.16511E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=2.9135E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=7.66254E-10
tplens_vset=1.4E-1
tplens_vmon=1.62942E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.51947E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.35336E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=1.75308E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.25888E-1
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00735E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61437E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50572E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.8699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02157E1
cs_anode2_imon=2.24317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73856E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.94644E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.77972E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56015E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92569E3
multa_neg_imon=8.15066E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.52483E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.0872E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.60584E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33855E1
os_fil1_imon=4.9384E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77953E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60839E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=9.97669E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63327E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62862E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.24491E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.41892E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2172E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.28775E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.51483E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.15821E-1	-7.9844E-1	-9.13134E0	-9.14211E0	4.98295E-3	9.34362E-2	2.73885E1	-3.26585E1	-3.2593E1	2.68076E1	2.15716E-9	2.51417E-3	2.51417E-3	6.29665E-3	2.26059E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16035E-1	-7.9844E-1	-9.13131E0	-9.14199E0	4.8399E-3	9.33886E-2	2.72102E1	-3.26891E1	-3.26064E1	2.68076E1	2.15808E-9	2.52492E-3	2.52492E-3	6.33977E-3	2.26445E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.15797E-1	-7.98559E-1	-9.13122E0	-9.14214E0	4.93526E-3	9.34601E-2	2.72999E1	-3.26637E1	-3.26254E1	2.6796E1	2.15696E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.27776E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16393E-1	-7.98202E-1	-9.13117E0	-9.14199E0	4.88758E-3	9.34601E-2	2.73033E1	-3.26809E1	-3.26496E1	2.67994E1	2.15817E-9	2.52977E-3	2.52977E-3	6.33388E-3	2.26008E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16393E-1	-7.98464E-1	-9.13143E0	-9.14209E0	5.36442E-3	9.34839E-2	2.73083E1	-3.26654E1	-3.26239E1	2.68018E1	2.15257E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.26445E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16655E-1	-7.98106E-1	-9.13146E0	-9.14221E0	5.00679E-3	9.36031E-2	2.7368E1	-3.26537E1	-3.26253E1	2.67798E1	2.15616E-9	2.51641E-3	2.51641E-3	6.31218E-3	2.27792E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.1687E-1	-7.98535E-1	-9.131E0	-9.14221E0	5.03063E-3	9.36747E-2	2.7227E1	-3.26422E1	-3.26008E1	2.68064E1	2.15622E-9	2.51529E-3	2.51529E-3	6.33896E-3	2.27232E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-8.16202E-1	-7.98488E-1	-9.13136E0	-9.14199E0	4.98295E-3	9.34839E-2	2.73112E1	-3.26401E1	-3.25948E1	2.67956E1	2.15613E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.27097E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16298E-1	-7.98535E-1	-9.13105E0	-9.14237E0	4.95911E-3	9.40561E-2	2.73577E1	-3.26982E1	-3.26014E1	2.68244E1	2.15721E-9	2.51883E-3	2.51883E-3	6.31808E-3	2.27087E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16536E-1	-7.98154E-1	-9.13136E0	-9.14197E0	5.17368E-3	9.37223E-2	2.72275E1	-3.26655E1	-3.26305E1	2.68076E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16488E-1	-7.98416E-1	-9.13165E0	-9.14199E0	5.38826E-3	9.36985E-2	2.74126E1	-3.26506E1	-3.26549E1	2.6798E1	2.15772E-9	2.51874E-3	2.51874E-3	6.31902E-3	2.2733E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16464E-1	-7.97772E-1	-9.13134E0	-9.14211E0	5.19753E-3	9.36508E-2	2.73087E1	-3.26837E1	-3.25912E1	2.6801E1	2.15425E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.27097E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.15988E-1	-7.98059E-1	-9.13131E0	-9.1423E0	4.81606E-3	9.35793E-2	2.72727E1	-3.26524E1	-3.26374E1	2.68124E1	2.15894E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.2769E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16202E-1	-7.98416E-1	-9.13126E0	-9.14209E0	5.22137E-3	9.34601E-2	2.73021E1	-3.26969E1	-3.26446E1	2.68166E1	2.15894E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.27295E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16035E-1	-7.98082E-1	-9.13103E0	-9.1419E0	5.17368E-3	9.32932E-2	2.72582E1	-3.26603E1	-3.26128E1	2.67806E1	2.158E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.25917E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16536E-1	-7.98035E-1	-9.13131E0	-9.14197E0	5.07832E-3	9.34124E-2	2.74697E1	-3.26717E1	-3.26188E1	2.68016E1	2.15716E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.25674E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16441E-1	-7.98225E-1	-9.13115E0	-9.1419E0	5.14984E-3	9.34124E-2	2.72825E1	-3.26741E1	-3.2644E1	2.67648E1	2.16081E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.28086E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16441E-1	-7.9844E-1	-9.13119E0	-9.14192E0	5.07832E-3	9.34601E-2	2.72974E1	-3.26278E1	-3.26602E1	2.67899E1	2.15808E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.27026E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.15916E-1	-7.9875E-1	-9.13129E0	-9.14185E0	5.26905E-3	9.34601E-2	2.71842E1	-3.2636E1	-3.2639E1	2.68395E1	2.159E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.26639E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16417E-1	-7.98821E-1	-9.131E0	-9.14235E0	5.45979E-3	9.35078E-2	2.73856E1	-3.26765E1	-3.26428E1	2.68046E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.28775E-2