[Scan]
initial_time=2016-01-27T19:42:52
final_time=2016-01-27T19:43:11
ip_count=19
run=1025
dataset=2
scan=128
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=6.70612E-10
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=3.23439E-10
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=6.6992E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=5.13053E-10
mult1=-1.02628E-8
mult2=-2.79999E-9
rf_tmon=-3.7637E-3
rf_agc=3.33853E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=3.84402E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64511E0
bslens_imon=2.45484E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.98055E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05266E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=2.81548E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05102E1
cs_ea1_imon=2.63809E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36174E0
lens1_imon=2.64951E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04087E1
cs_ea2_imon=1.54687E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=2.92396E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.88598E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=2.87098E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15234E1
os_ea1_imon=1.8879E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.09983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27132E0
cs_ionrep_imon=1.18241E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=2.90233E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=7.35772E-10
tplens_vset=1.4E-1
tplens_vmon=1.63422E0
tplens_imon=-3.13766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26179E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26429E1
iondef2_imon=1.59734E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98465E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.92246E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29115E0
ionrepsh_imon=1.74947E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.25287E-1
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62098E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3015E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=2.86413E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73968E1
iondef1_imon=1.11067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.93036E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.8336E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.13739E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.67842E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.64019E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.4477E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53666E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33854E1
os_fil1_imon=4.96843E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55128E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60448E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30928E1
cs_fil1_imon=9.97813E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63135E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62838E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29518E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21883E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.26956E-2
chamber_ion_pmon=2.15726E-9
chamber_cvt_pmon=2.52659E-3
foreline_cvt_pmon=2.52659E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.53596E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16631E-1	-7.9813E-1	-9.13103E0	-9.14192E0	5.03063E-3	9.34839E-2	2.73405E1	-3.26614E1	-3.26561E1	2.67931E1	2.14865E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.2769E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.1625E-1	-7.98368E-1	-9.13115E0	-9.14204E0	5.03063E-3	9.36985E-2	2.72252E1	-3.26494E1	-3.26092E1	2.6771E1	2.159E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.27219E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.16584E-1	-7.98106E-1	-9.13129E0	-9.14192E0	4.64916E-3	9.32455E-2	2.7442E1	-3.2682E1	-3.26107E1	2.68047E1	2.159E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.26445E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16035E-1	-7.98178E-1	-9.13107E0	-9.14187E0	4.91142E-3	9.32932E-2	2.71824E1	-3.26514E1	-3.26024E1	2.68202E1	2.15716E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.26832E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16393E-1	-7.98178E-1	-9.13126E0	-9.14211E0	4.79221E-3	9.35078E-2	2.73407E1	-3.26597E1	-3.26266E1	2.68038E1	2.16177E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.28385E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16584E-1	-7.98178E-1	-9.1315E0	-9.1419E0	4.62532E-3	9.33886E-2	2.739E1	-3.26862E1	-3.25965E1	2.68112E1	2.15574E-9	2.5118E-3	2.5118E-3	6.3074E-3	2.25248E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16369E-1	-7.98392E-1	-9.13134E0	-9.1419E0	4.72069E-3	9.35078E-2	2.71459E1	-3.26849E1	-3.26362E1	2.6825E1	2.15533E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.26639E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16607E-1	-7.98154E-1	-9.13129E0	-9.14214E0	4.8399E-3	9.3627E-2	2.72448E1	-3.26619E1	-3.25988E1	2.68209E1	2.15716E-9	2.52815E-3	2.52815E-3	6.31278E-3	2.26639E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16464E-1	-7.98178E-1	-9.13148E0	-9.14192E0	5.07832E-3	9.39608E-2	2.72771E1	-3.26457E1	-3.26457E1	2.68341E1	2.15636E-9	2.52236E-3	2.52236E-3	6.33388E-3	2.27147E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16751E-1	-7.97844E-1	-9.13136E0	-9.14187E0	4.76837E-3	9.37462E-2	2.72552E1	-3.26212E1	-3.2641E1	2.68322E1	2.15079E-9	2.52222E-3	2.52222E-3	6.33648E-3	2.27121E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16345E-1	-7.98106E-1	-9.13136E0	-9.14183E0	4.95911E-3	9.37462E-2	2.71682E1	-3.2636E1	-3.2616E1	2.6792E1	2.15982E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.27373E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16488E-1	-7.98035E-1	-9.1311E0	-9.14192E0	4.98295E-3	9.35316E-2	2.72144E1	-3.26561E1	-3.26194E1	2.68009E1	2.14915E-9	2.52236E-3	2.52236E-3	6.32328E-3	2.28291E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16703E-1	-7.98392E-1	-9.13122E0	-9.1418E0	4.93526E-3	9.35555E-2	2.71044E1	-3.26783E1	-3.26122E1	2.67876E1	2.158E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.26506E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16607E-1	-7.98631E-1	-9.13095E0	-9.14185E0	4.81606E-3	9.39131E-2	2.72266E1	-3.26579E1	-3.26555E1	2.68028E1	2.16081E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.27492E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.17013E-1	-7.98512E-1	-9.13134E0	-9.14214E0	4.55379E-3	9.3627E-2	2.73134E1	-3.26738E1	-3.26431E1	2.68166E1	2.15716E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.26059E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16774E-1	-7.98178E-1	-9.13138E0	-9.1419E0	5.17368E-3	9.37939E-2	2.71597E1	-3.26512E1	-3.26416E1	2.68273E1	2.16175E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.2631E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09302E0	-8.16798E-1	-7.97987E-1	-9.13129E0	-9.1418E0	4.52995E-3	9.37462E-2	2.71346E1	-3.26638E1	-3.26242E1	2.68268E1	2.15624E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.26639E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.16822E-1	-7.98249E-1	-9.13138E0	-9.14176E0	4.76837E-3	9.36747E-2	2.72492E1	-3.26825E1	-3.26224E1	2.68082E1	2.15987E-9	2.51225E-3	2.51225E-3	6.32386E-3	2.25133E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-8.16417E-1	-7.98249E-1	-9.13169E0	-9.14192E0	4.64916E-3	9.39369E-2	2.74286E1	-3.26357E1	-3.26613E1	2.67845E1	2.15624E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.27026E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16274E-1	-7.98297E-1	-9.13165E0	-9.14204E0	5.17368E-3	9.36031E-2	2.73968E1	-3.26429E1	-3.26179E1	2.67788E1	2.15726E-9	2.52659E-3	2.52659E-3	6.3074E-3	2.26956E-2