[Scan]
initial_time=2016-01-27T19:43:45
final_time=2016-01-27T19:44:05
ip_count=19
run=1025
dataset=2
scan=130
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08727E-4
ql1_vset=
ql1_vmon=-8.15868E-1
ql1_imon=6.45852E-10
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=3.0086E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=6.32107E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=5.28133E-10
mult1=-9.42843E-9
mult2=-2.77225E-9
rf_tmon=-5.90164E-3
rf_agc=3.30142E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=3.6782E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62009E0
bslens_imon=2.3978E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19898E1
lens5a_imon=1.9895E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53788E1
cs_ef1b_imon=2.80795E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05013E1
cs_ea1_imon=2.62656E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3751E0
lens1_imon=2.71079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64466E1
os_ef1alow_imon=2.98622E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03646E1
cs_ea2_imon=1.53985E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84375E1
cs_ef1a_imon=2.91655E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=3.80158E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11273E1
os_restr1_imon=2.88463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15529E1
os_ea1_imon=1.87537E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63681E1
os_ef1bup_imon=3.09326E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.19403E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93588E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=2.91032E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=7.653E-10
tplens_vset=1.4E-1
tplens_vmon=1.6198E0
tplens_imon=-2.55026E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.51275E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26455E1
iondef2_imon=1.58871E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98499E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.3803E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24128E0
ionrepsh_imon=1.74215E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33785E1
lens5b_imon=2.18836E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74566E1
cs_ef2b_imon=3.124E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29776E-1
os_ea2_imon=-6.78714E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00646E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71154E1
cs_ef2a_imon=3.19562E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64554E0
os_ef2alow_imon=-2.71623E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.23903E-1
os_ef2bup_imon=-5.40191E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10916E1
os_restr2_imon=2.8967E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.30997E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01854E1
cs_anode2_imon=2.25953E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74437E1
iondef1_imon=1.09593E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.08133E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.8979E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=2.65229E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09187E0
cs_ionaccel_imon=-1.65364E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47281E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55685E1
einzel_imon=7.75401E-6
window_vset=0.0E0
window_vmon=1.53E-1
window_imon=-9.33568E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82569E2
mask1_imon=2.39061E-4
mask2_vset=0.0E0
mask2_vmon=-1.86947E1
mask2_imon=-5.09309E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.8752E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.77591E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.19959E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.49739E0
defgridb_imon=6.14228E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33877E1
os_fil1_imon=4.44466E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.35738E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60474E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=9.95355E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64234E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62793E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86349E-2
os_fil2_imon=-2.26304E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.24834E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.02002E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30071E-1
cs_fil2_imon=-2.07492E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22055E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.218E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.26252E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.52008E-3
foreline_cvt_pmon=2.52008E-3
chamber_tmon=1.4006E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.00353E-1
res40_imon=-2.67342E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=231
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09294E0	-8.16083E-1	-7.98464E-1	-9.13155E0	-9.14178E0	5.38826E-3	9.3627E-2	2.7147E1	-3.26621E1	-3.26147E1	2.67986E1	2.15661E-9	2.52384E-3	2.52384E-3	6.32518E-3	2.25924E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09286E0	-8.16226E-1	-7.98321E-1	-9.13134E0	-9.14171E0	4.8399E-3	9.35555E-2	2.73201E1	-3.26603E1	-3.25929E1	2.67708E1	2.15706E-9	2.52084E-3	2.52084E-3	6.29801E-3	2.25861E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.15988E-1	-7.98345E-1	-9.13131E0	-9.14171E0	5.07832E-3	9.34601E-2	2.74547E1	-3.26645E1	-3.2638E1	2.67908E1	2.15505E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.26569E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09309E0	-8.1625E-1	-7.98726E-1	-9.13138E0	-9.14154E0	5.17368E-3	9.33647E-2	2.73265E1	-3.26793E1	-3.2637E1	2.68001E1	2.158E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.2631E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0934E0	-8.16298E-1	-7.98559E-1	-9.13124E0	-9.14185E0	5.10216E-3	9.35078E-2	2.71294E1	-3.26413E1	-3.25985E1	2.67911E1	2.15441E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.26639E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16226E-1	-7.98178E-1	-9.13169E0	-9.1418E0	4.72069E-3	9.36985E-2	2.7255E1	-3.26331E1	-3.2616E1	2.68017E1	2.15987E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.25917E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.15988E-1	-7.98464E-1	-9.13131E0	-9.14159E0	4.69685E-3	9.34839E-2	2.73856E1	-3.26573E1	-3.26194E1	2.68262E1	2.16081E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.25329E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.16226E-1	-7.98035E-1	-9.13153E0	-9.14178E0	4.88758E-3	9.32217E-2	2.71909E1	-3.26482E1	-3.2614E1	2.68298E1	2.15808E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.25482E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09356E0	-8.1563E-1	-7.98631E-1	-9.13157E0	-9.14173E0	4.98295E-3	9.33647E-2	2.71688E1	-3.26526E1	-3.26319E1	2.67631E1	2.16081E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.25524E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-8.16393E-1	-7.9813E-1	-9.13179E0	-9.1418E0	4.79221E-3	9.34601E-2	2.74157E1	-3.26356E1	-3.26344E1	2.68052E1	2.15425E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.269E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.16417E-1	-7.97844E-1	-9.13169E0	-9.14199E0	5.22137E-3	9.36508E-2	2.72935E1	-3.26591E1	-3.26236E1	2.68064E1	2.159E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.27026E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.16202E-1	-7.98345E-1	-9.13143E0	-9.14166E0	4.88758E-3	9.37462E-2	2.71364E1	-3.26478E1	-3.26296E1	2.6795E1	2.15696E-9	2.52585E-3	2.52585E-3	6.31299E-3	2.26169E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.1594E-1	-7.98106E-1	-9.1316E0	-9.14192E0	5.14984E-3	9.36508E-2	2.71252E1	-3.2649E1	-3.26767E1	2.68296E1	2.16081E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.26506E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16655E-1	-7.98368E-1	-9.13155E0	-9.14195E0	5.29289E-3	9.36508E-2	2.72213E1	-3.26791E1	-3.26307E1	2.67833E1	2.15907E-9	2.51919E-3	2.51919E-3	6.32858E-3	2.27147E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16631E-1	-7.9813E-1	-9.13141E0	-9.14216E0	5.10216E-3	9.35555E-2	2.74058E1	-3.26556E1	-3.26977E1	2.68047E1	2.15624E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.27026E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16727E-1	-7.98178E-1	-9.13117E0	-9.14187E0	4.86374E-3	9.34362E-2	2.71759E1	-3.26485E1	-3.26347E1	2.6797E1	2.15913E-9	2.5199E-3	2.5199E-3	6.33341E-3	2.27077E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.1625E-1	-7.98345E-1	-9.13103E0	-9.14185E0	5.36442E-3	9.31978E-2	2.71653E1	-3.26514E1	-3.2593E1	2.68035E1	2.15872E-9	2.51527E-3	2.51527E-3	6.3016E-3	2.28588E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16059E-1	-7.98392E-1	-9.13122E0	-9.14164E0	4.76837E-3	9.3317E-2	2.73461E1	-3.26738E1	-3.25813E1	2.68021E1	2.15455E-9	2.51709E-3	2.51709E-3	6.3074E-3	2.27718E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.15797E-1	-7.98035E-1	-9.13115E0	-9.1419E0	4.88758E-3	9.33886E-2	2.73788E1	-3.26526E1	-3.26189E1	2.67914E1	2.15982E-9	2.51359E-3	2.51359E-3	6.30182E-3	2.2677E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.15868E-1	-7.9813E-1	-9.1311E0	-9.14173E0	5.19753E-3	9.33647E-2	2.74437E1	-3.26455E1	-3.26219E1	2.68226E1	2.15716E-9	2.52008E-3	2.52008E-3	6.33977E-3	2.26252E-2