[Scan]
initial_time=2016-01-27T19:44:11
final_time=2016-01-27T19:44:31
ip_count=19
run=1025
dataset=2
scan=131
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=6.24466E-10
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.94709E-10
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=6.29711E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.08785E-10
mult1=-9.46389E-9
mult2=-2.86828E-9
rf_tmon=-3.86648E-3
rf_agc=3.34448E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=3.74174E-10
bslens_vset=-6.2E0
bslens_vmon=-6.695E0
bslens_imon=2.67705E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19726E1
lens5a_imon=1.97611E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12434E2
lens4a_imon=2.04765E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53668E1
cs_ef1b_imon=2.8272E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02479E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05287E1
cs_ea1_imon=2.6481E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36607E0
lens1_imon=2.50574E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64858E1
os_ef1alow_imon=2.99861E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03418E1
cs_ea2_imon=1.54005E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84444E1
cs_ef1a_imon=2.92002E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.63278E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1151E1
os_restr1_imon=2.8781E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15559E1
os_ea1_imon=1.88656E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6366E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23782E0
cs_ionrep_imon=1.18731E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91849E2
cs_nozzle_imon=1.93513E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01877E1
cs_anode1_imon=2.90954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=7.24018E-10
tplens_vset=1.4E-1
tplens_vmon=1.70892E0
tplens_imon=-4.53205E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26331E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.593E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98509E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.80576E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24561E0
ionrepsh_imon=1.7573E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33898E1
lens5b_imon=2.17077E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74788E1
cs_ef2b_imon=3.13784E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.33338E-1
os_ea2_imon=-2.97471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.19547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65337E0
os_ef2alow_imon=-2.61923E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.23903E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10861E1
os_restr2_imon=2.86837E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.31563E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01778E1
cs_anode2_imon=2.23588E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74119E1
iondef1_imon=1.12035E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68175E1
iondef4_imon=1.09364E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.89828E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=2.64943E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11018E0
cs_ionaccel_imon=-1.81083E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47466E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56492E1
einzel_imon=7.68035E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-1.08477E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39294E-4
mask2_vset=0.0E0
mask2_vmon=-1.86469E1
mask2_imon=-6.20688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.41136E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=7.00645E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.09989E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.13245E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33903E1
os_fil1_imon=4.47959E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.22217E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6067E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30788E1
cs_fil1_imon=9.96825E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63594E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63364E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.81815E-2
os_fil2_imon=-2.41923E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.61958E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37711E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29383E-1
cs_fil2_imon=-2.34438E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14869E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22015E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.27295E-2
chamber_ion_pmon=2.16081E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.43167E-1
res40_imon=-2.47701E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.15916E-1	-7.98345E-1	-9.13122E0	-9.1423E0	4.57764E-3	9.32693E-2	2.74259E1	-3.26494E1	-3.26344E1	2.67818E1	2.15864E-9	2.52384E-3	2.52384E-3	6.33112E-3	2.28268E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.15868E-1	-7.98059E-1	-9.13143E0	-9.14207E0	4.72069E-3	9.3317E-2	2.75322E1	-3.26805E1	-3.26225E1	2.68233E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.27802E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.15892E-1	-7.98345E-1	-9.13129E0	-9.14187E0	4.62532E-3	9.33409E-2	2.73912E1	-3.26455E1	-3.26561E1	2.67944E1	2.159E-9	2.52492E-3	2.52492E-3	6.35059E-3	2.26445E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16059E-1	-7.98488E-1	-9.13107E0	-9.1418E0	5.05447E-3	9.36508E-2	2.74211E1	-3.26885E1	-3.265E1	2.68053E1	2.15624E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.25867E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.15916E-1	-7.98345E-1	-9.13124E0	-9.14171E0	4.79221E-3	9.37939E-2	2.7379E1	-3.26939E1	-3.26512E1	2.68034E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.26832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16393E-1	-7.9875E-1	-9.13124E0	-9.1423E0	4.62532E-3	9.34839E-2	2.73381E1	-3.26419E1	-3.26502E1	2.68172E1	2.15613E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.27097E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16417E-1	-7.98249E-1	-9.13122E0	-9.14216E0	4.673E-3	9.3627E-2	2.72702E1	-3.2644E1	-3.25888E1	2.67914E1	2.15808E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.27607E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16417E-1	-7.98392E-1	-9.13126E0	-9.14209E0	4.673E-3	9.33886E-2	2.7426E1	-3.26408E1	-3.25983E1	2.68178E1	2.15982E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.27776E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16011E-1	-7.98321E-1	-9.13131E0	-9.14161E0	4.55379E-3	9.34839E-2	2.72012E1	-3.26603E1	-3.26452E1	2.68194E1	2.15716E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.26832E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16536E-1	-7.98178E-1	-9.13157E0	-9.14168E0	4.45843E-3	9.35316E-2	2.71843E1	-3.26344E1	-3.2623E1	2.6794E1	2.15992E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.2819E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-8.16369E-1	-7.98273E-1	-9.13155E0	-9.14178E0	4.62532E-3	9.34124E-2	2.73315E1	-3.26939E1	-3.26152E1	2.68298E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.27097E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16393E-1	-7.98392E-1	-9.13167E0	-9.1418E0	4.41074E-3	9.32455E-2	2.74181E1	-3.26669E1	-3.26164E1	2.68202E1	2.16175E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.28086E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16083E-1	-7.9813E-1	-9.1316E0	-9.1418E0	4.79221E-3	9.34839E-2	2.71591E1	-3.26368E1	-3.26224E1	2.6807E1	2.15613E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.27888E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16178E-1	-7.9844E-1	-9.13136E0	-9.14164E0	5.05447E-3	9.37223E-2	2.71547E1	-3.26602E1	-3.26419E1	2.68064E1	2.16081E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.27097E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.1625E-1	-7.9813E-1	-9.13134E0	-9.14156E0	4.88758E-3	9.34601E-2	2.74166E1	-3.26691E1	-3.26472E1	2.67866E1	2.15808E-9	2.52923E-3	2.52923E-3	6.32896E-3	2.26832E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16107E-1	-7.98488E-1	-9.13131E0	-9.1418E0	4.91142E-3	9.36985E-2	2.72594E1	-3.26362E1	-3.26705E1	2.68172E1	2.15706E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.27097E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16417E-1	-7.97892E-1	-9.13136E0	-9.14173E0	4.95911E-3	9.35793E-2	2.70921E1	-3.26455E1	-3.26325E1	2.68017E1	2.15894E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.28086E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.15964E-1	-7.98273E-1	-9.13126E0	-9.1419E0	5.14984E-3	9.3627E-2	2.7069E1	-3.26795E1	-3.25599E1	2.68229E1	2.15716E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.26445E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16584E-1	-7.98178E-1	-9.1315E0	-9.14202E0	4.81606E-3	9.34124E-2	2.71813E1	-3.26585E1	-3.26272E1	2.6816E1	2.15992E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.26639E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16202E-1	-7.98702E-1	-9.13122E0	-9.14185E0	5.14984E-3	9.35793E-2	2.74119E1	-3.26673E1	-3.26331E1	2.68175E1	2.16081E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.27295E-2