[Scan]
initial_time=2016-01-27T19:45:05
final_time=2016-01-27T19:45:24
ip_count=19
run=1025
dataset=2
scan=133
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=6.72507E-10
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.81107E-10
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=6.29926E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.2669E-10
mult1=-9.64406E-9
mult2=-2.83039E-9
rf_tmon=-5.70206E-3
rf_agc=3.31894E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=3.82531E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.58573E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05001E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=2.83061E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02086E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05094E1
cs_ea1_imon=2.63812E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34542E0
lens1_imon=2.6636E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0382E1
cs_ea2_imon=1.55541E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=2.92756E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.968E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10997E1
os_restr1_imon=2.88107E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15471E1
os_ea1_imon=1.87821E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22083E0
cs_ionrep_imon=1.19085E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01611E1
cs_anode1_imon=2.92287E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=7.1615E-10
tplens_vset=1.4E-1
tplens_vmon=1.63199E0
tplens_imon=-5.11285E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.48887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.57665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=3.41856E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=1.77415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36878E-1
os_ea2_imon=-5.89119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6414E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.87674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.3191E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01593E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73219E1
iondef1_imon=1.08786E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.92192E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=2.4668E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-1.14548E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.40641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.31627E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.51259E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.49565E0
defgridb_imon=6.33396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33869E1
os_fil1_imon=5.03451E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.65339E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60439E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30835E1
cs_fil1_imon=9.96155E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6415E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62857E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86374E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41608E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.15541E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21889E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.27172E-2
chamber_ion_pmon=2.15505E-9
chamber_cvt_pmon=2.52585E-3
foreline_cvt_pmon=2.52585E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.04942E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.15964E-1	-7.9844E-1	-9.13126E0	-9.14195E0	4.673E-3	9.37939E-2	2.71447E1	-3.26993E1	-3.26158E1	2.6813E1	2.15808E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.27413E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16035E-1	-7.9844E-1	-9.13146E0	-9.14173E0	4.74453E-3	9.38177E-2	2.70978E1	-3.26326E1	-3.26164E1	2.67992E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.269E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16202E-1	-7.98655E-1	-9.13181E0	-9.14183E0	4.95911E-3	9.36031E-2	2.71399E1	-3.2659E1	-3.26207E1	2.6807E1	2.15706E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.2631E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.16727E-1	-7.98297E-1	-9.1315E0	-9.14168E0	5.36442E-3	9.34124E-2	2.72967E1	-3.26717E1	-3.26014E1	2.68007E1	2.15716E-9	2.52169E-3	2.52169E-3	6.36144E-3	2.26445E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16154E-1	-7.98154E-1	-9.13165E0	-9.1419E0	4.8399E-3	9.33647E-2	2.73153E1	-3.26681E1	-3.26272E1	2.68001E1	2.15519E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.27097E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16393E-1	-7.98178E-1	-9.13155E0	-9.14192E0	4.64916E-3	9.34839E-2	2.73658E1	-3.26554E1	-3.2623E1	2.67949E1	2.16175E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.27492E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16178E-1	-7.98607E-1	-9.13148E0	-9.14176E0	4.86374E-3	9.34839E-2	2.74938E1	-3.26687E1	-3.25942E1	2.68176E1	2.15894E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.269E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16584E-1	-7.98154E-1	-9.13148E0	-9.14187E0	5.126E-3	9.36508E-2	2.74613E1	-3.2617E1	-3.26158E1	2.67995E1	2.15894E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.27888E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16345E-1	-7.98416E-1	-9.13186E0	-9.1418E0	4.8399E-3	9.3174E-2	2.72048E1	-3.26962E1	-3.25818E1	2.6795E1	2.15332E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.2769E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16178E-1	-7.98321E-1	-9.13141E0	-9.14197E0	4.86374E-3	9.36031E-2	2.72576E1	-3.26579E1	-3.25834E1	2.68058E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.2631E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16154E-1	-7.97796E-1	-9.13141E0	-9.14197E0	4.52995E-3	9.33647E-2	2.72294E1	-3.26699E1	-3.26362E1	2.68064E1	2.15706E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.25917E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16464E-1	-7.98273E-1	-9.13146E0	-9.1418E0	4.55379E-3	9.33886E-2	2.71698E1	-3.2656E1	-3.2593E1	2.68148E1	2.15624E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.27219E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16035E-1	-7.98202E-1	-9.13117E0	-9.14204E0	4.81606E-3	9.33886E-2	2.74597E1	-3.26927E1	-3.26048E1	2.678E1	2.15314E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.27172E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16441E-1	-7.98154E-1	-9.13107E0	-9.1419E0	4.98295E-3	9.3317E-2	2.73541E1	-3.26797E1	-3.26402E1	2.68166E1	2.16085E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.27413E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16274E-1	-7.98225E-1	-9.13146E0	-9.14202E0	4.57764E-3	9.35316E-2	2.71735E1	-3.26561E1	-3.26777E1	2.67968E1	2.15624E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.2819E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16202E-1	-7.9813E-1	-9.13129E0	-9.14216E0	4.62532E-3	9.33409E-2	2.73928E1	-3.26831E1	-3.25834E1	2.68175E1	2.156E-9	2.52027E-3	2.52027E-3	6.34661E-3	2.27574E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.1594E-1	-7.98655E-1	-9.13131E0	-9.14176E0	5.05447E-3	9.35078E-2	2.72414E1	-3.26921E1	-3.26337E1	2.68028E1	2.159E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.27802E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.15916E-1	-7.98607E-1	-9.13141E0	-9.14187E0	4.86374E-3	9.36747E-2	2.72564E1	-3.26405E1	-3.26492E1	2.68065E1	2.15716E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.26059E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16154E-1	-7.98583E-1	-9.13129E0	-9.1418E0	4.55379E-3	9.3627E-2	2.72847E1	-3.26717E1	-3.26554E1	2.67968E1	2.15636E-9	2.52553E-3	2.52553E-3	6.33388E-3	2.27718E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16154E-1	-7.98011E-1	-9.13093E0	-9.1418E0	4.93526E-3	9.37223E-2	2.73219E1	-3.26543E1	-3.26158E1	2.6807E1	2.15505E-9	2.52585E-3	2.52585E-3	6.3074E-3	2.27172E-2