[Scan]
initial_time=2016-01-27T19:45:31
final_time=2016-01-27T19:45:51
ip_count=19
run=1025
dataset=2
scan=134
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09309E0
qbias_imon=-1.08845E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=7.02071E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.86806E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=6.39021E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=5.52821E-10
mult1=-9.7949E-9
mult2=-2.8624E-9
rf_tmon=-4.88111E-3
rf_agc=3.36395E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=3.87931E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65126E0
bslens_imon=2.47414E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20127E1
lens5a_imon=2.00018E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12421E2
lens4a_imon=2.04886E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53626E1
cs_ef1b_imon=2.83286E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02361E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05071E1
cs_ea1_imon=2.64488E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32357E0
lens1_imon=2.68407E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64232E1
os_ef1alow_imon=2.99478E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03964E1
cs_ea2_imon=1.54443E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84667E1
cs_ef1a_imon=2.90876E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.9444E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11325E1
os_restr1_imon=2.88113E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15096E1
os_ea1_imon=1.8914E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08586E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27373E0
cs_ionrep_imon=1.17991E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93325E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01491E1
cs_anode1_imon=2.93367E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=7.35223E-10
tplens_vset=1.4E-1
tplens_vmon=1.63062E0
tplens_imon=-1.97771E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2659E1
iondef3_imon=1.50168E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.58489E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.70693E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25719E0
ionrepsh_imon=1.76429E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.18264E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.11311E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28503E-1
os_ea2_imon=-4.0389E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00607E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71167E1
cs_ef2a_imon=3.18978E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63062E0
os_ef2alow_imon=-2.6345E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11479E-1
os_ef2bup_imon=-5.23454E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11162E1
os_restr2_imon=2.87334E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.30272E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01724E1
cs_anode2_imon=2.22995E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73883E1
iondef1_imon=1.09135E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.08211E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.95459E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=2.86543E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13598E0
cs_ionaccel_imon=-1.65753E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47144E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.91748E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-1.09704E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39376E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-8.32369E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92686E3
multa_neg_imon=7.44388E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.3713E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.71871E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.58974E0
defgridb_imon=6.05067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3386E1
os_fil1_imon=5.45016E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.89031E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60739E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30835E1
cs_fil1_imon=9.95478E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62851E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.87715E-2
os_fil2_imon=-2.41225E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.31321E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28343E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3105E-1
cs_fil2_imon=-1.89976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.89521E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21901E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.27097E-2
chamber_ion_pmon=2.15145E-9
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.07489E-1
res40_imon=-2.49048E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.15916E-1	-7.9813E-1	-9.13174E0	-9.1418E0	4.74453E-3	9.35316E-2	2.71597E1	-3.26873E1	-3.26344E1	2.68157E1	2.15872E-9	2.52106E-3	2.52106E-3	6.3016E-3	2.27748E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.15916E-1	-7.98464E-1	-9.13153E0	-9.14171E0	4.74453E-3	9.3317E-2	2.73275E1	-3.26455E1	-3.26526E1	2.68142E1	2.15894E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.29278E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.16011E-1	-7.98345E-1	-9.13119E0	-9.14171E0	4.95911E-3	9.34839E-2	2.74361E1	-3.26549E1	-3.26332E1	2.68124E1	2.15987E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.2769E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16083E-1	-7.98297E-1	-9.13124E0	-9.14173E0	5.03063E-3	9.37939E-2	2.7193E1	-3.2675E1	-3.2567E1	2.68052E1	2.159E-9	2.52815E-3	2.52815E-3	6.29665E-3	2.26445E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.16083E-1	-7.98845E-1	-9.13124E0	-9.14199E0	4.8399E-3	9.36985E-2	2.71741E1	-3.26449E1	-3.26431E1	2.67914E1	2.15349E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.27026E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16202E-1	-7.98512E-1	-9.13107E0	-9.14202E0	4.91142E-3	9.34601E-2	2.70678E1	-3.26591E1	-3.25719E1	2.6813E1	2.15706E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.28483E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.16059E-1	-7.98345E-1	-9.13122E0	-9.14216E0	4.91142E-3	9.34362E-2	2.70618E1	-3.2653E1	-3.26398E1	2.68316E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.2888E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-8.15821E-1	-7.98512E-1	-9.13129E0	-9.14176E0	5.00679E-3	9.37223E-2	2.72108E1	-3.26462E1	-3.26517E1	2.68124E1	2.159E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.28775E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.15892E-1	-7.9844E-1	-9.13112E0	-9.1418E0	4.52995E-3	9.34124E-2	2.7354E1	-3.26704E1	-3.26209E1	2.68221E1	2.15791E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.27776E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.15821E-1	-7.98416E-1	-9.13155E0	-9.14183E0	4.76837E-3	9.3317E-2	2.74555E1	-3.26578E1	-3.25705E1	2.67963E1	2.15647E-9	2.52093E-3	2.52093E-3	6.33863E-3	2.27264E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09665E0	-8.1563E-1	-7.98345E-1	-9.13138E0	-9.1419E0	4.88758E-3	9.35793E-2	2.72282E1	-3.26452E1	-3.26116E1	2.6825E1	2.15685E-9	2.52066E-3	2.52066E-3	6.31879E-3	2.27865E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.15964E-1	-7.98082E-1	-9.13117E0	-9.14195E0	4.74453E-3	9.3627E-2	2.73063E1	-3.26729E1	-3.26188E1	2.6831E1	2.15894E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.2769E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16107E-1	-7.97987E-1	-9.13119E0	-9.14195E0	5.00679E-3	9.37462E-2	2.73712E1	-3.26621E1	-3.26386E1	2.68166E1	2.15519E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.25917E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16393E-1	-7.98249E-1	-9.13138E0	-9.14195E0	4.36306E-3	9.36031E-2	2.71357E1	-3.26789E1	-3.26314E1	2.6783E1	2.15613E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.28086E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.1625E-1	-7.97915E-1	-9.13141E0	-9.14173E0	4.72069E-3	9.35793E-2	2.70868E1	-3.26874E1	-3.26183E1	2.67986E1	2.15706E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.28483E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16607E-1	-7.97796E-1	-9.13136E0	-9.14195E0	4.76837E-3	9.3627E-2	2.72672E1	-3.26675E1	-3.2632E1	2.67992E1	2.15332E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.27888E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16488E-1	-7.98106E-1	-9.13134E0	-9.14209E0	4.3869E-3	9.34124E-2	2.74661E1	-3.26313E1	-3.26697E1	2.67972E1	2.15519E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.26506E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16178E-1	-7.98488E-1	-9.13134E0	-9.14209E0	4.45843E-3	9.38177E-2	2.73375E1	-3.26627E1	-3.26494E1	2.68022E1	2.15726E-9	2.52765E-3	2.52765E-3	6.32858E-3	2.26956E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16345E-1	-7.98368E-1	-9.13107E0	-9.14164E0	4.50611E-3	9.38654E-2	2.72132E1	-3.26422E1	-3.26158E1	2.681E1	2.158E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.27492E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09309E0	-8.16154E-1	-7.98488E-1	-9.1311E0	-9.14161E0	4.60148E-3	9.39369E-2	2.73883E1	-3.26561E1	-3.2659E1	2.67806E1	2.15145E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.27097E-2