[Scan]
initial_time=2016-01-27T19:45:58
final_time=2016-01-27T19:46:18
ip_count=19
run=1025
dataset=2
scan=135
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09688E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.15511E-1
ql1_imon=5.74946E-10
ql2_vset=
ql2_vmon=-7.97844E-1
ql2_imon=2.88916E-10
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=5.5784E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.08451E-10
mult1=-9.85401E-9
mult2=-2.66642E-9
rf_tmon=-4.53897E-3
rf_agc=3.41409E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=3.80492E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62829E0
bslens_imon=2.62067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=1.95856E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=2.83586E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.64782E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36054E0
lens1_imon=2.718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.99364E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04219E1
cs_ea2_imon=1.51118E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84174E1
cs_ef1a_imon=2.929E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=3.80874E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.87583E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14825E1
os_ea1_imon=1.89727E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63774E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=2.93039E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=7.51579E-10
tplens_vset=1.4E-1
tplens_vmon=1.62821E0
tplens_imon=-4.14704E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26555E1
iondef3_imon=1.48811E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.58472E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.6149E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23227E0
ionrepsh_imon=1.74983E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.19829E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.13613E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30094E-1
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.18374E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62855E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43944E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10718E1
os_restr2_imon=2.87201E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.28919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01607E1
cs_anode2_imon=2.25098E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71399E1
iondef1_imon=1.0876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.09789E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.92306E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.24102E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-1.76832E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47198E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.75734E-6
window_vset=0.0E0
window_vmon=2.23478E-1
window_imon=-1.03157E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-5.93688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.24725E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.41165E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.49456E0
defgridb_imon=6.08503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33841E1
os_fil1_imon=5.16172E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.28162E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60434E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30811E1
cs_fil1_imon=9.95754E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63716E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63117E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75727E-2
os_fil2_imon=-2.38537E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.65523E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.2694E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32024E-1
cs_fil2_imon=-2.17107E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32736E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21863E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28006E-3
inlet_lpb_pmon=2.28483E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.17706E-1
res40_imon=-2.28614E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16274E-1	-7.98011E-1	-9.13136E0	-9.14183E0	4.79221E-3	9.35793E-2	2.72218E1	-3.26419E1	-3.26425E1	2.68375E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.27492E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16345E-1	-7.98082E-1	-9.13146E0	-9.1419E0	4.8399E-3	9.34124E-2	2.73898E1	-3.26374E1	-3.2584E1	2.6792E1	2.156E-9	2.52362E-3	2.52362E-3	6.30182E-3	2.27574E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16226E-1	-7.98583E-1	-9.13155E0	-9.14199E0	4.95911E-3	9.377E-2	2.72918E1	-3.26602E1	-3.26202E1	2.67879E1	2.15987E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.28086E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16345E-1	-7.97892E-1	-9.13141E0	-9.14176E0	4.93526E-3	9.35793E-2	2.72861E1	-3.26193E1	-3.26432E1	2.68154E1	2.15726E-9	2.52342E-3	2.52342E-3	6.30212E-3	2.27528E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16321E-1	-7.98273E-1	-9.13148E0	-9.14154E0	4.74453E-3	9.40084E-2	2.72461E1	-3.26284E1	-3.25818E1	2.67908E1	2.15791E-9	2.52473E-3	2.52473E-3	6.34099E-3	2.27172E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.16917E-1	-7.98416E-1	-9.1316E0	-9.14178E0	4.50611E-3	9.36747E-2	2.72925E1	-3.26434E1	-3.26717E1	2.68088E1	2.15808E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.27413E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16536E-1	-7.98798E-1	-9.13157E0	-9.14166E0	4.8399E-3	9.35793E-2	2.74225E1	-3.26661E1	-3.26124E1	2.68154E1	2.15441E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.28775E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16298E-1	-7.98416E-1	-9.13143E0	-9.14176E0	4.95911E-3	9.35316E-2	2.73627E1	-3.26232E1	-3.26808E1	2.67819E1	2.15613E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.29079E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16202E-1	-7.97749E-1	-9.13153E0	-9.14164E0	5.17368E-3	9.33886E-2	2.72292E1	-3.26396E1	-3.25722E1	2.68296E1	2.15571E-9	2.51854E-3	2.51854E-3	6.31761E-3	2.2756E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16417E-1	-7.97868E-1	-9.13172E0	-9.14204E0	4.95911E-3	9.34839E-2	2.72054E1	-3.26518E1	-3.26038E1	2.67972E1	2.1556E-9	2.52266E-3	2.52266E-3	6.33706E-3	2.26987E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0968E0	-8.16488E-1	-7.97987E-1	-9.13155E0	-9.14187E0	5.17368E-3	9.32693E-2	2.73767E1	-3.26523E1	-3.26098E1	2.68317E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.2769E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16536E-1	-7.97749E-1	-9.13167E0	-9.14176E0	5.10216E-3	9.30786E-2	2.73252E1	-3.26832E1	-3.27027E1	2.6828E1	2.15222E-9	2.52262E-3	2.52262E-3	6.32784E-3	2.28113E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.1625E-1	-7.97987E-1	-9.13129E0	-9.14211E0	5.38826E-3	9.36747E-2	2.73486E1	-3.2664E1	-3.26034E1	2.68082E1	2.15992E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.26445E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16202E-1	-7.97868E-1	-9.13124E0	-9.14166E0	5.14984E-3	9.36508E-2	2.72137E1	-3.26449E1	-3.2659E1	2.6813E1	2.156E-9	2.52139E-3	2.52139E-3	6.33538E-3	2.28382E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16298E-1	-7.98202E-1	-9.13119E0	-9.14173E0	5.34058E-3	9.35555E-2	2.71711E1	-3.26392E1	-3.26302E1	2.68268E1	2.159E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.27996E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16488E-1	-7.98082E-1	-9.131E0	-9.14171E0	5.45979E-3	9.38177E-2	2.72921E1	-3.26626E1	-3.26508E1	2.67818E1	2.15613E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.29278E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.1594E-1	-7.97987E-1	-9.13146E0	-9.14168E0	5.05447E-3	9.35793E-2	2.74433E1	-3.26717E1	-3.26194E1	2.68198E1	2.15387E-9	2.52297E-3	2.52297E-3	6.32644E-3	2.28532E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.15964E-1	-7.98082E-1	-9.13146E0	-9.1418E0	4.8399E-3	9.38416E-2	2.72528E1	-3.26506E1	-3.26362E1	2.68188E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.15749E-1	-7.98011E-1	-9.13153E0	-9.14187E0	4.86374E-3	9.38892E-2	2.73682E1	-3.26651E1	-3.25641E1	2.67648E1	2.158E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.29677E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09688E0	-8.15511E-1	-7.97844E-1	-9.13153E0	-9.1418E0	4.74453E-3	9.32693E-2	2.71399E1	-3.26638E1	-3.26555E1	2.68172E1	2.158E-9	2.5188E-3	2.5188E-3	6.28006E-3	2.28483E-2