[Scan]
initial_time=2016-01-27T19:47:18
final_time=2016-01-27T19:47:38
ip_count=19
run=1025
dataset=2
scan=138
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=6.95026E-10
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=2.97153E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=6.38759E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=5.56564E-10
mult1=-9.05013E-9
mult2=-2.89572E-9
rf_tmon=-3.39456E-3
rf_agc=3.45007E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.77798E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68561E0
bslens_imon=2.56956E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20076E1
lens5a_imon=1.99026E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05402E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=2.81186E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0502E1
cs_ea1_imon=2.65137E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3592E0
lens1_imon=2.66117E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.98289E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.52993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=2.92938E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=3.76678E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11261E1
os_restr1_imon=2.86538E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15503E1
os_ea1_imon=1.88491E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63598E1
os_ef1bup_imon=3.08731E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24637E0
cs_ionrep_imon=1.19021E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93569E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01871E1
cs_anode1_imon=2.91141E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=7.17151E-10
tplens_vset=1.4E-1
tplens_vmon=1.64271E0
tplens_imon=-2.66477E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26868E1
iondef3_imon=1.50245E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26502E1
iondef2_imon=1.58031E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98273E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.69823E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22602E0
ionrepsh_imon=1.73299E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33919E1
lens5b_imon=2.17729E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74632E1
cs_ef2b_imon=3.12923E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.11327E-1
os_ea2_imon=-4.57328E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71326E1
cs_ef2a_imon=3.18499E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64277E0
os_ef2alow_imon=-2.60051E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.26523E-1
os_ef2bup_imon=-5.2278E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1078E1
os_restr2_imon=2.87922E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30501E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01591E1
cs_anode2_imon=2.2501E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72921E1
iondef1_imon=1.09708E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67812E1
iondef4_imon=1.1E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.9264E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=2.48909E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10893E0
cs_ionaccel_imon=-1.81831E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.4729E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56436E1
einzel_imon=7.60176E-6
window_vset=0.0E0
window_vmon=2.50032E-1
window_imon=-1.02489E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39193E-4
mask2_vset=0.0E0
mask2_vmon=-1.86525E1
mask2_imon=-7.29223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.53167E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.52398E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.1118E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.54197E0
defgridb_imon=6.11938E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33817E1
os_fil1_imon=4.49206E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.51732E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60011E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.9423E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63944E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62996E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00005E-2
os_fil2_imon=-2.48785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.6176E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41581E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.10112E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31711E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.2897E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.81216E-1
res40_imon=-2.4583E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.15845E-1	-7.98202E-1	-9.13177E0	-9.14171E0	4.93526E-3	9.38177E-2	2.72154E1	-3.26124E1	-3.26107E1	2.6792E1	2.15772E-9	2.51642E-3	2.51642E-3	6.31321E-3	2.28588E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.15821E-1	-7.98368E-1	-9.13172E0	-9.14176E0	4.62532E-3	9.35793E-2	2.73634E1	-3.26506E1	-3.26464E1	2.68232E1	2.159E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.27607E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16584E-1	-7.98035E-1	-9.13167E0	-9.14178E0	4.57764E-3	9.35793E-2	2.72522E1	-3.26543E1	-3.26128E1	2.67944E1	2.15696E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.27373E-2
4.0E0	0.0E0	1.0E0	6.55E2	3.98E2	-2.0951E0	-8.16274E-1	-7.98225E-1	-9.1315E0	-9.14187E0	4.50611E-3	9.32455E-2	2.73771E1	-3.26679E1	-3.26083E1	2.67995E1	2.15726E-9	2.51393E-3	2.51393E-3	6.31798E-3	2.26956E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16345E-1	-7.98392E-1	-9.13162E0	-9.14202E0	4.52995E-3	9.33647E-2	2.72216E1	-3.26861E1	-3.26434E1	2.68082E1	2.15624E-9	2.52384E-3	2.52384E-3	6.35059E-3	2.27802E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16703E-1	-7.98512E-1	-9.13148E0	-9.14192E0	4.55379E-3	9.38416E-2	2.73033E1	-3.26512E1	-3.2623E1	2.68148E1	2.15505E-9	2.5225E-3	2.5225E-3	6.34661E-3	2.28786E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.1656E-1	-7.98512E-1	-9.13146E0	-9.14237E0	5.07832E-3	9.32217E-2	2.73201E1	-3.26422E1	-3.26188E1	2.678E1	2.15894E-9	2.51662E-3	2.51662E-3	6.34588E-3	2.29278E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.15964E-1	-7.98202E-1	-9.1315E0	-9.14209E0	4.62532E-3	9.37939E-2	2.74595E1	-3.26446E1	-3.2602E1	2.68094E1	2.15519E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.28284E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.15845E-1	-7.98225E-1	-9.13126E0	-9.14214E0	4.79221E-3	9.35793E-2	2.72184E1	-3.26431E1	-3.26461E1	2.68166E1	2.158E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.28483E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.1594E-1	-7.98416E-1	-9.13117E0	-9.14178E0	4.76837E-3	9.35316E-2	2.74581E1	-3.26578E1	-3.26432E1	2.68058E1	2.15808E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.27996E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.15845E-1	-7.98368E-1	-9.13115E0	-9.1419E0	4.72069E-3	9.32455E-2	2.71957E1	-3.26711E1	-3.26332E1	2.6807E1	2.15519E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.28681E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.1594E-1	-7.98082E-1	-9.13131E0	-9.1418E0	5.10216E-3	9.35555E-2	2.73766E1	-3.26579E1	-3.26188E1	2.68188E1	2.16078E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.28382E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.15988E-1	-7.98011E-1	-9.13131E0	-9.14209E0	4.95911E-3	9.37462E-2	2.74331E1	-3.2653E1	-3.2647E1	2.68142E1	2.15716E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.27607E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.16083E-1	-7.98464E-1	-9.1315E0	-9.14178E0	4.86374E-3	9.35078E-2	2.72095E1	-3.26691E1	-3.25859E1	2.678E1	2.158E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.2888E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.16321E-1	-7.98321E-1	-9.13157E0	-9.14161E0	5.19753E-3	9.3317E-2	2.73387E1	-3.2652E1	-3.26119E1	2.68016E1	2.159E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.27607E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16464E-1	-7.98082E-1	-9.1315E0	-9.14173E0	4.673E-3	9.31978E-2	2.73243E1	-3.265E1	-3.26464E1	2.68094E1	2.15894E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.27295E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16226E-1	-7.98225E-1	-9.13126E0	-9.14166E0	5.36442E-3	9.32932E-2	2.73202E1	-3.26805E1	-3.2637E1	2.68024E1	2.15894E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.28086E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.1656E-1	-7.98273E-1	-9.13117E0	-9.14164E0	5.29289E-3	9.35316E-2	2.72709E1	-3.26494E1	-3.26002E1	2.68148E1	2.15636E-9	2.51814E-3	2.51814E-3	6.33919E-3	2.28866E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16154E-1	-7.98321E-1	-9.13146E0	-9.14187E0	5.26905E-3	9.32217E-2	2.73454E1	-3.26122E1	-3.2626E1	2.6804E1	2.15987E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.28284E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.16321E-1	-7.98368E-1	-9.13131E0	-9.14223E0	5.07832E-3	9.34362E-2	2.72921E1	-3.26502E1	-3.26868E1	2.67812E1	2.15624E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.2897E-2