[Scan]
initial_time=2016-01-27T19:48:13
final_time=2016-01-27T19:48:32
ip_count=19
run=1025
dataset=2
scan=140
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.15845E-1
ql1_imon=6.56104E-10
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=2.74909E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=5.81884E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=4.97293E-10
mult1=-9.81263E-9
mult2=-2.76851E-9
rf_tmon=-4.10386E-3
rf_agc=3.40305E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=4.1064E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62728E0
bslens_imon=2.75916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19848E1
lens5a_imon=1.9943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.04937E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=2.81079E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02358E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=2.65511E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38495E0
lens1_imon=2.47601E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.54232E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.9236E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.99423E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=2.8735E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=1.89732E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=1.18059E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91855E2
cs_nozzle_imon=1.93342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01509E1
cs_anode1_imon=2.9063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.42281E-10
tplens_vset=1.4E-1
tplens_vmon=1.64969E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26789E1
iondef2_imon=1.58196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.04727E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25564E0
ionrepsh_imon=1.74583E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33793E1
lens5b_imon=2.17339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.32748E-1
os_ea2_imon=-4.79397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.16578E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6336E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64988E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.86954E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.31698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02362E1
cs_anode2_imon=2.20352E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73345E1
iondef1_imon=1.07228E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.90599E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=2.3638E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0971E0
cs_ionaccel_imon=-1.81942E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47457E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.54729E-6
window_vset=0.0E0
window_vmon=1.82504E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86891E1
mask2_imon=-4.13876E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.35685E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.92859E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.06662E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.50156E0
defgridb_imon=6.21362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33835E1
os_fil1_imon=5.08256E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.37108E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60387E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30864E1
cs_fil1_imon=9.95999E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62894E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62395E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83841E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.35154E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62275E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21861E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.25524E-2
chamber_ion_pmon=2.15332E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.8512E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=229
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.1594E-1	-7.98368E-1	-9.13134E0	-9.14195E0	4.72069E-3	9.34839E-2	2.73243E1	-3.26591E1	-3.26152E1	2.67866E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.269E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16178E-1	-7.97939E-1	-9.13131E0	-9.14178E0	4.72069E-3	9.34362E-2	2.72749E1	-3.26687E1	-3.26152E1	2.68283E1	2.16081E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.26703E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16464E-1	-7.98678E-1	-9.13155E0	-9.14166E0	4.79221E-3	9.32693E-2	2.73557E1	-3.26656E1	-3.26513E1	2.68143E1	2.15647E-9	2.52613E-3	2.52613E-3	6.30221E-3	2.2689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.15988E-1	-7.98583E-1	-9.13146E0	-9.14192E0	5.17368E-3	9.33647E-2	2.7257E1	-3.26783E1	-3.26056E1	2.6807E1	2.15661E-9	2.51439E-3	2.51439E-3	6.33112E-3	2.272E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16059E-1	-7.98559E-1	-9.13184E0	-9.14209E0	5.126E-3	9.36508E-2	2.72777E1	-3.26943E1	-3.25869E1	2.6792E1	2.15992E-9	2.52384E-3	2.52384E-3	6.35601E-3	2.27607E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16202E-1	-7.98321E-1	-9.1315E0	-9.14176E0	5.05447E-3	9.3627E-2	2.74214E1	-3.26511E1	-3.26199E1	2.68219E1	2.15913E-9	2.51575E-3	2.51575E-3	6.31779E-3	2.27825E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16369E-1	-7.9844E-1	-9.13141E0	-9.14195E0	5.26905E-3	9.34601E-2	2.72198E1	-3.26753E1	-3.26218E1	2.67728E1	2.15887E-9	2.52473E-3	2.52473E-3	6.3074E-3	2.28382E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16107E-1	-7.98392E-1	-9.13131E0	-9.14192E0	4.8399E-3	9.36508E-2	2.73558E1	-3.26832E1	-3.2616E1	2.6796E1	2.159E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.27413E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16059E-1	-7.98512E-1	-9.1316E0	-9.14171E0	4.72069E-3	9.35793E-2	2.7203E1	-3.2644E1	-3.2617E1	2.68076E1	2.15238E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.27295E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16035E-1	-7.98607E-1	-9.13131E0	-9.14168E0	4.64916E-3	9.38177E-2	2.72654E1	-3.26957E1	-3.2626E1	2.67914E1	2.15613E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.27492E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.15964E-1	-7.98512E-1	-9.13117E0	-9.14154E0	4.79221E-3	9.34362E-2	2.73964E1	-3.26615E1	-3.25924E1	2.68064E1	2.15533E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.2819E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16464E-1	-7.98893E-1	-9.13153E0	-9.14183E0	4.55379E-3	9.34601E-2	2.72042E1	-3.26644E1	-3.26744E1	2.6792E1	2.15894E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.2888E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16393E-1	-7.98178E-1	-9.13126E0	-9.14173E0	4.79221E-3	9.34362E-2	2.73279E1	-3.26428E1	-3.26236E1	2.67902E1	2.15808E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.27802E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16154E-1	-7.98559E-1	-9.13124E0	-9.14187E0	4.50611E-3	9.35078E-2	2.72955E1	-3.2632E1	-3.2641E1	2.6807E1	2.15791E-9	2.51359E-3	2.51359E-3	6.3074E-3	2.27172E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16512E-1	-7.97772E-1	-9.13138E0	-9.1418E0	4.55379E-3	9.3317E-2	2.73904E1	-3.26579E1	-3.26717E1	2.68052E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.269E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16178E-1	-7.98011E-1	-9.13124E0	-9.14226E0	4.76837E-3	9.32217E-2	2.72312E1	-3.26554E1	-3.26158E1	2.68328E1	2.15613E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.27492E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.15773E-1	-7.98559E-1	-9.13124E0	-9.14195E0	4.91142E-3	9.37223E-2	2.7285E1	-3.26874E1	-3.26467E1	2.68227E1	2.158E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.27295E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16059E-1	-7.9813E-1	-9.13124E0	-9.14187E0	4.95911E-3	9.38892E-2	2.72853E1	-3.26518E1	-3.2608E1	2.68016E1	2.15533E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.2819E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16464E-1	-7.98321E-1	-9.13131E0	-9.14187E0	4.673E-3	9.35555E-2	2.73252E1	-3.26555E1	-3.26124E1	2.68112E1	2.15624E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.27219E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.15845E-1	-7.98154E-1	-9.13146E0	-9.1418E0	5.38826E-3	9.35316E-2	2.73345E1	-3.26789E1	-3.26392E1	2.67806E1	2.15332E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.25524E-2