[Scan]
initial_time=2016-01-27T19:49:06
final_time=2016-01-27T19:49:26
ip_count=19
run=1025
dataset=2
scan=142
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=6.28436E-10
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=2.85888E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=6.26051E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.05888E-10
mult1=-9.9604E-9
mult2=-2.70562E-9
rf_tmon=-4.76903E-3
rf_agc=3.32029E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=3.87549E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19959E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=2.79674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04802E1
cs_ea1_imon=2.65467E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39599E0
lens1_imon=2.82615E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04129E1
cs_ea2_imon=1.54687E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=2.92576E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.89659E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=2.90053E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14861E1
os_ea1_imon=1.86663E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.18638E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.90558E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=7.43973E-10
tplens_vset=1.4E-1
tplens_vmon=1.64444E0
tplens_imon=-2.34457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2639E1
iondef3_imon=1.51371E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.59446E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.61133E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.73433E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.76958E-1
os_ea2_imon=-5.26458E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61858E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35556E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=2.86449E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02236E1
cs_anode2_imon=2.23272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72131E1
iondef1_imon=1.0876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.89761E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=2.88451E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.35963E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=7.48735E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.73031E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.71447E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.48253E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3388E1
os_fil1_imon=4.81226E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.08586E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60217E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=9.94401E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64036E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62519E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93784E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.06414E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.35189E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.03527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21889E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.27413E-2
chamber_ion_pmon=2.15992E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.88724E-1
res40_imon=-2.35641E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16083E-1	-7.97915E-1	-9.13157E0	-9.14178E0	5.07832E-3	9.40561E-2	2.74201E1	-3.26608E1	-3.2626E1	2.68036E1	2.15992E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.27413E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.15606E-1	-7.97939E-1	-9.1315E0	-9.14178E0	5.03063E-3	9.34839E-2	2.72702E1	-3.26699E1	-3.26573E1	2.68016E1	2.15624E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.27413E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16417E-1	-7.98059E-1	-9.13184E0	-9.14204E0	5.00679E-3	9.35078E-2	2.73293E1	-3.2626E1	-3.26136E1	2.6816E1	2.15613E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.26703E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16274E-1	-7.97939E-1	-9.1315E0	-9.14204E0	5.03063E-3	9.37462E-2	2.7242E1	-3.26831E1	-3.26452E1	2.68268E1	2.15533E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.25482E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16345E-1	-7.97558E-1	-9.13143E0	-9.14192E0	4.57764E-3	9.37939E-2	2.73558E1	-3.26644E1	-3.26077E1	2.68221E1	2.158E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.26506E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16107E-1	-7.97868E-1	-9.13117E0	-9.14187E0	4.673E-3	9.3317E-2	2.71807E1	-3.26675E1	-3.2653E1	2.68076E1	2.15624E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.26639E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16131E-1	-7.98178E-1	-9.13112E0	-9.14209E0	5.29289E-3	9.36031E-2	2.72991E1	-3.26591E1	-3.2611E1	2.68124E1	2.15696E-9	2.51804E-3	2.51804E-3	6.35223E-3	2.27172E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16393E-1	-7.97653E-1	-9.13146E0	-9.14185E0	4.79221E-3	9.36031E-2	2.74791E1	-3.2652E1	-3.26614E1	2.68058E1	2.15716E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.27026E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16274E-1	-7.97653E-1	-9.13148E0	-9.14185E0	4.72069E-3	9.34839E-2	2.7231E1	-3.26468E1	-3.26304E1	2.67967E1	2.15987E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.27492E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.15773E-1	-7.97844E-1	-9.13146E0	-9.14185E0	4.50611E-3	9.34839E-2	2.72365E1	-3.26518E1	-3.26135E1	2.6785E1	2.15302E-9	2.51585E-3	2.51585E-3	6.3292E-3	2.28325E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.15773E-1	-7.97868E-1	-9.13136E0	-9.14171E0	4.8399E-3	9.38892E-2	2.73033E1	-3.26579E1	-3.26062E1	2.68306E1	2.15562E-9	2.51669E-3	2.51669E-3	6.3074E-3	2.27364E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.16059E-1	-7.98035E-1	-9.13131E0	-9.14161E0	4.79221E-3	9.37462E-2	2.73868E1	-3.26597E1	-3.26735E1	2.68153E1	2.15894E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.2631E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.15916E-1	-7.97987E-1	-9.13119E0	-9.14161E0	5.07832E-3	9.39369E-2	2.74307E1	-3.26771E1	-3.26344E1	2.68076E1	2.15808E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.2819E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.15845E-1	-7.98416E-1	-9.13115E0	-9.14166E0	4.60148E-3	9.39369E-2	2.73871E1	-3.26543E1	-3.26272E1	2.68292E1	2.15425E-9	2.52757E-3	2.52757E-3	6.29645E-3	2.27295E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16035E-1	-7.98464E-1	-9.13167E0	-9.14192E0	4.74453E-3	9.37462E-2	2.73015E1	-3.26939E1	-3.2599E1	2.6804E1	2.15894E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.26703E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09325E0	-8.15773E-1	-7.97892E-1	-9.13148E0	-9.14228E0	4.69685E-3	9.33886E-2	2.74667E1	-3.26308E1	-3.26242E1	2.6786E1	2.15992E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.27607E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.15797E-1	-7.98154E-1	-9.13162E0	-9.14218E0	5.10216E-3	9.34839E-2	2.72803E1	-3.26726E1	-3.26419E1	2.67984E1	2.16036E-9	2.52243E-3	2.52243E-3	6.32644E-3	2.27355E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.1625E-1	-7.97868E-1	-9.13146E0	-9.14209E0	5.03063E-3	9.35078E-2	2.73442E1	-3.26428E1	-3.26338E1	2.68223E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16011E-1	-7.98082E-1	-9.13157E0	-9.14228E0	4.93526E-3	9.34839E-2	2.73231E1	-3.27143E1	-3.25942E1	2.68029E1	2.15696E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.28179E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.15821E-1	-7.97963E-1	-9.13146E0	-9.1419E0	4.43459E-3	9.3627E-2	2.72131E1	-3.26661E1	-3.2639E1	2.68082E1	2.15992E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.27413E-2