[Scan]
initial_time=2016-01-27T19:49:59
final_time=2016-01-27T19:50:19
ip_count=19
run=1025
dataset=2
scan=144
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=6.37579E-10
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.74742E-10
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=6.15537E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.30481E-10
mult1=-9.95712E-9
mult2=-2.78648E-9
rf_tmon=-4.26008E-3
rf_agc=3.41567E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=4.20785E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63141E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20373E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05036E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.79493E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=2.64307E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34778E0
lens1_imon=2.48663E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.52993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.91783E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=4.16648E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=2.88395E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15347E1
os_ea1_imon=1.89909E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.281E0
cs_ionrep_imon=1.18165E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01473E1
cs_anode1_imon=2.91062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.85732E-10
tplens_vset=1.4E-1
tplens_vmon=1.65854E0
tplens_imon=-2.2102E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26561E1
iondef3_imon=1.51365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98601E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.74055E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21729E0
ionrepsh_imon=1.74194E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34023E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.42777E-1
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6366E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35556E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=2.87999E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.25614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71411E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.05076E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=2.50542E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=2.02326E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.27899E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.7056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.4241E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.62262E0
defgridb_imon=6.27733E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3381E1
os_fil1_imon=4.46988E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.9357E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60635E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.96438E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62486E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62293E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01569E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.81826E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53631E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.59912E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21688E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31902E-3
inlet_lpb_pmon=2.2733E-2
chamber_ion_pmon=2.15872E-9
chamber_cvt_pmon=2.52338E-3
foreline_cvt_pmon=2.52338E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.52685E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.15988E-1	-7.98512E-1	-9.13165E0	-9.14195E0	4.93526E-3	9.377E-2	2.74349E1	-3.2647E1	-3.26398E1	2.67962E1	2.15716E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.26832E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16011E-1	-7.98488E-1	-9.13134E0	-9.14192E0	5.00679E-3	9.3627E-2	2.74744E1	-3.26478E1	-3.26502E1	2.68401E1	2.16081E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.269E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.15773E-1	-7.98178E-1	-9.13153E0	-9.14221E0	4.43459E-3	9.34362E-2	2.72337E1	-3.26443E1	-3.26236E1	2.67992E1	2.15533E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.26639E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16035E-1	-7.98726E-1	-9.13153E0	-9.14209E0	4.57764E-3	9.35316E-2	2.71873E1	-3.27119E1	-3.25954E1	2.68154E1	2.159E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.2897E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.16131E-1	-7.98225E-1	-9.13177E0	-9.1419E0	4.673E-3	9.34124E-2	2.73818E1	-3.26484E1	-3.26366E1	2.67728E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.27591E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16417E-1	-7.9844E-1	-9.13143E0	-9.14161E0	4.91142E-3	9.35793E-2	2.73908E1	-3.26419E1	-3.2656E1	2.68238E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.16011E-1	-7.98273E-1	-9.13153E0	-9.14199E0	4.91142E-3	9.36985E-2	2.72113E1	-3.2652E1	-3.26431E1	2.67872E1	2.15519E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.27097E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16035E-1	-7.97868E-1	-9.13131E0	-9.14192E0	4.86374E-3	9.36031E-2	2.72727E1	-3.26573E1	-3.26176E1	2.67955E1	2.15332E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.28483E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.15487E-1	-7.97868E-1	-9.13124E0	-9.14176E0	4.86374E-3	9.34601E-2	2.72216E1	-3.26627E1	-3.265E1	2.68057E1	2.15533E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.27413E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.15892E-1	-7.98345E-1	-9.13112E0	-9.14223E0	4.86374E-3	9.3317E-2	2.72727E1	-3.26845E1	-3.2604E1	2.68128E1	2.156E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.27574E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16059E-1	-7.98345E-1	-9.13122E0	-9.14204E0	4.86374E-3	9.33886E-2	2.73814E1	-3.26843E1	-3.26482E1	2.68001E1	2.16178E-9	2.51814E-3	2.51814E-3	6.3074E-3	2.26197E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.1594E-1	-7.98321E-1	-9.13119E0	-9.14207E0	4.81606E-3	9.35555E-2	2.71092E1	-3.26801E1	-3.26392E1	2.67806E1	2.15624E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.26445E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16011E-1	-7.98321E-1	-9.13117E0	-9.14197E0	5.29289E-3	9.34124E-2	2.71555E1	-3.26813E1	-3.25743E1	2.68569E1	2.15613E-9	2.51662E-3	2.51662E-3	6.28006E-3	2.26506E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16011E-1	-7.98559E-1	-9.13112E0	-9.14197E0	4.64916E-3	9.34362E-2	2.71831E1	-3.26957E1	-3.2632E1	2.68026E1	2.15894E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.26703E-2
1.8E1	0.0E0	1.0E0	7.27E2	5.0E2	-2.09572E0	-8.15868E-1	-7.98059E-1	-9.13098E0	-9.1419E0	5.03063E-3	9.3627E-2	2.71615E1	-3.26699E1	-3.26512E1	2.68159E1	2.15887E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.27776E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.15821E-1	-7.98345E-1	-9.1311E0	-9.14214E0	4.673E-3	9.35555E-2	2.71988E1	-3.26861E1	-3.25689E1	2.68283E1	2.15808E-9	2.52384E-3	2.52384E-3	6.28592E-3	2.27026E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.15773E-1	-7.97796E-1	-9.13091E0	-9.14195E0	4.76837E-3	9.37462E-2	2.72541E1	-3.26729E1	-3.26503E1	2.6786E1	2.15519E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.269E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.15964E-1	-7.97606E-1	-9.13093E0	-9.14195E0	5.03063E-3	9.34839E-2	2.71933E1	-3.2659E1	-3.26648E1	2.67646E1	2.15349E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.27413E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.15964E-1	-7.98368E-1	-9.13107E0	-9.14204E0	4.81606E-3	9.36031E-2	2.70811E1	-3.26828E1	-3.26335E1	2.67894E1	2.1547E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.28765E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.15821E-1	-7.98416E-1	-9.13105E0	-9.14195E0	5.07832E-3	9.33647E-2	2.71411E1	-3.265E1	-3.26561E1	2.6831E1	2.15872E-9	2.52338E-3	2.52338E-3	6.31902E-3	2.2733E-2