[Scan]
initial_time=2016-01-27T19:50:26
final_time=2016-01-27T19:50:45
ip_count=19
run=1025
dataset=2
scan=145
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=6.40655E-10
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=2.49004E-10
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=6.21784E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.02396E-10
mult1=-9.75243E-9
mult2=-2.69865E-9
rf_tmon=-3.88757E-3
rf_agc=3.33636E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=3.69585E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12436E2
lens4a_imon=2.05306E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=2.80358E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.65071E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35213E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03997E1
cs_ea2_imon=1.53714E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=2.91603E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.10318E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=2.8944E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=1.88069E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26111E0
cs_ionrep_imon=1.18385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.91206E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=7.53999E-10
tplens_vset=1.4E-1
tplens_vmon=1.64984E0
tplens_imon=-2.30852E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25966E1
iondef3_imon=1.49063E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.58148E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.63266E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=1.74587E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.19901E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74886E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.40308E-1
os_ea2_imon=-2.59691E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70999E1
cs_ef2a_imon=3.19137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64561E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.48466E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.8717E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23014E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01371E1
cs_anode2_imon=2.2392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72462E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.96297E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.83047E-1
olens1_imon=2.10559E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-1.73293E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.65318E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.8673E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.57748E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.7111E0
defgridb_imon=6.21841E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33832E1
os_fil1_imon=5.13662E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.91768E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60094E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30833E1
cs_fil1_imon=9.97687E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63885E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62479E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86045E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.87833E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3983E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2184E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.27888E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.11549E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.15582E-1	-7.97939E-1	-9.13115E0	-9.14171E0	4.55379E-3	9.36985E-2	2.71133E1	-3.26706E1	-3.2633E1	2.6803E1	2.15613E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.28681E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.15535E-1	-7.97725E-1	-9.13103E0	-9.14202E0	5.00679E-3	9.34124E-2	2.73282E1	-3.26597E1	-3.2656E1	2.67832E1	2.15817E-9	2.52448E-3	2.52448E-3	6.30212E-3	2.28674E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.15797E-1	-7.98082E-1	-9.13131E0	-9.14199E0	4.3869E-3	9.38892E-2	2.74338E1	-3.26523E1	-3.26378E1	2.68138E1	2.15673E-9	2.51758E-3	2.51758E-3	6.3074E-3	2.29219E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16131E-1	-7.97534E-1	-9.1315E0	-9.1419E0	4.74453E-3	9.38177E-2	2.73051E1	-3.26534E1	-3.26057E1	2.68076E1	2.15919E-9	2.52874E-3	2.52874E-3	6.31761E-3	2.28483E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16083E-1	-7.97749E-1	-9.13157E0	-9.14197E0	4.52995E-3	9.38892E-2	2.73145E1	-3.26402E1	-3.26756E1	2.68028E1	2.15685E-9	2.51498E-3	2.51498E-3	6.3531E-3	2.28689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16655E-1	-7.97868E-1	-9.13136E0	-9.14197E0	4.45843E-3	9.39608E-2	2.74445E1	-3.26789E1	-3.26098E1	2.68094E1	2.15425E-9	2.51552E-3	2.51552E-3	6.34588E-3	2.26703E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16488E-1	-7.97629E-1	-9.13148E0	-9.14209E0	4.98295E-3	9.36985E-2	2.73626E1	-3.26168E1	-3.27019E1	2.68172E1	2.15716E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.2858E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16274E-1	-7.97963E-1	-9.13146E0	-9.14197E0	4.76837E-3	9.35316E-2	2.71653E1	-3.26885E1	-3.26012E1	2.6786E1	2.15314E-9	2.5225E-3	2.5225E-3	6.33538E-3	2.28989E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.16083E-1	-7.98273E-1	-9.13134E0	-9.14211E0	4.64916E-3	9.37462E-2	2.73472E1	-3.262E1	-3.2626E1	2.68034E1	2.159E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.27026E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16154E-1	-7.97772E-1	-9.13141E0	-9.14214E0	4.76837E-3	9.37223E-2	2.72606E1	-3.26543E1	-3.26062E1	2.6801E1	2.158E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.28086E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16083E-1	-7.98035E-1	-9.13122E0	-9.14195E0	4.88758E-3	9.37223E-2	2.72538E1	-3.26408E1	-3.26148E1	2.68202E1	2.158E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.2769E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16131E-1	-7.9782E-1	-9.13146E0	-9.14195E0	4.673E-3	9.37939E-2	2.73291E1	-3.26855E1	-3.2641E1	2.67879E1	2.158E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.26703E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16512E-1	-7.97725E-1	-9.13138E0	-9.14211E0	4.88758E-3	9.35555E-2	2.72456E1	-3.26242E1	-3.26332E1	2.67343E1	2.16085E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.27607E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16441E-1	-7.97915E-1	-9.13146E0	-9.14228E0	5.00679E-3	9.34601E-2	2.73147E1	-3.26687E1	-3.26302E1	2.6835E1	2.15894E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.28086E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16274E-1	-7.97963E-1	-9.13105E0	-9.14185E0	4.74453E-3	9.34839E-2	2.7391E1	-3.26536E1	-3.26356E1	2.67833E1	2.156E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.2677E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.15964E-1	-7.97868E-1	-9.13141E0	-9.14192E0	5.05447E-3	9.34601E-2	2.71723E1	-3.26639E1	-3.26296E1	2.68466E1	2.15624E-9	2.51632E-3	2.51632E-3	6.2645E-3	2.26832E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16107E-1	-7.97701E-1	-9.13126E0	-9.1419E0	4.93526E-3	9.3317E-2	2.73252E1	-3.26758E1	-3.26215E1	2.6778E1	2.15706E-9	2.51662E-3	2.51662E-3	6.34588E-3	2.27888E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.15868E-1	-7.97653E-1	-9.13134E0	-9.14178E0	4.673E-3	9.3317E-2	2.74867E1	-3.26897E1	-3.25942E1	2.68213E1	2.15919E-9	2.52262E-3	2.52262E-3	6.28703E-3	2.27193E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16345E-1	-7.97701E-1	-9.13136E0	-9.14187E0	4.91142E-3	9.34839E-2	2.73886E1	-3.26801E1	-3.26729E1	2.67728E1	2.15199E-9	2.51725E-3	2.51725E-3	6.31879E-3	2.28689E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16393E-1	-7.97987E-1	-9.13155E0	-9.14192E0	4.72069E-3	9.34601E-2	2.72462E1	-3.26573E1	-3.25966E1	2.6813E1	2.15706E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.27888E-2