[Scan]
initial_time=2016-01-27T19:50:53
final_time=2016-01-27T19:51:12
ip_count=19
run=1025
dataset=2
scan=146
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08869E-4
ql1_vset=
ql1_vmon=-8.15654E-1
ql1_imon=6.43134E-10
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=3.16668E-10
ql3_vset=
ql3_vmon=-9.13188E0
ql3_imon=5.37765E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.02801E-10
mult1=-9.83505E-9
mult2=-2.8719E-9
rf_tmon=-4.68024E-3
rf_agc=3.31792E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=3.57914E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12439E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53502E1
cs_ef1b_imon=2.81043E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04465E1
cs_ea1_imon=2.66621E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38998E0
lens1_imon=2.67835E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03396E1
cs_ea2_imon=1.52957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84148E1
cs_ef1a_imon=2.91783E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.83866E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=2.87314E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15053E1
os_ea1_imon=1.87312E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22025E0
cs_ionrep_imon=1.18493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93301E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=2.91603E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=7.3036E-10
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26221E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2678E1
iondef2_imon=1.58797E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98472E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.58784E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23407E0
ionrepsh_imon=1.74623E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.19279E-1
os_ea2_imon=-2.95741E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00363E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62038E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.33153E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.8735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23013E2
cs_ionfoca_imon=6.32019E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.23091E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73113E1
iondef1_imon=1.10058E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68065E1
iondef4_imon=1.11044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.90129E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=2.91324E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47457E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.3035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.81683E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.36478E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.47651E0
defgridb_imon=6.0634E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33837E1
os_fil1_imon=4.49992E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.43114E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60503E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30813E1
cs_fil1_imon=9.96642E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63831E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62461E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28229E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.07732E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21697E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.27097E-2
chamber_ion_pmon=2.16269E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.89926E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16488E-1	-7.98249E-1	-9.1315E0	-9.14183E0	4.52995E-3	9.3317E-2	2.73311E1	-3.26496E1	-3.26296E1	2.67787E1	2.15613E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.27888E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16202E-1	-7.98416E-1	-9.13155E0	-9.14192E0	4.17233E-3	9.34362E-2	2.72144E1	-3.2638E1	-3.26152E1	2.6802E1	2.15716E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.27219E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.1656E-1	-7.98249E-1	-9.13119E0	-9.14199E0	4.26769E-3	9.34601E-2	2.73261E1	-3.26969E1	-3.26278E1	2.6804E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.28681E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16345E-1	-7.9844E-1	-9.13143E0	-9.14187E0	4.52995E-3	9.35316E-2	2.7495E1	-3.26693E1	-3.26092E1	2.68053E1	2.15887E-9	2.52362E-3	2.52362E-3	6.32978E-3	2.28382E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.15988E-1	-7.98488E-1	-9.13141E0	-9.1419E0	4.88758E-3	9.37223E-2	2.74006E1	-3.2638E1	-3.26338E1	2.68136E1	2.15808E-9	2.51203E-3	2.51203E-3	6.30202E-3	2.2819E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16154E-1	-7.9844E-1	-9.1316E0	-9.14202E0	4.74453E-3	9.36747E-2	2.7233E1	-3.26374E1	-3.25936E1	2.68142E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.2769E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16274E-1	-7.98345E-1	-9.13143E0	-9.14183E0	4.62532E-3	9.3627E-2	2.7344E1	-3.26714E1	-3.26596E1	2.6816E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.27492E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16131E-1	-7.97987E-1	-9.13141E0	-9.14199E0	4.64916E-3	9.32932E-2	2.74469E1	-3.26771E1	-3.26567E1	2.68166E1	2.15624E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.28385E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.15845E-1	-7.98082E-1	-9.1311E0	-9.14187E0	4.74453E-3	9.34124E-2	2.72426E1	-3.26795E1	-3.25954E1	2.67986E1	2.156E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.28179E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09673E0	-8.15821E-1	-7.98535E-1	-9.13103E0	-9.14223E0	4.79221E-3	9.33647E-2	2.71912E1	-3.26626E1	-3.26537E1	2.67972E1	2.15716E-9	2.52815E-3	2.52815E-3	6.30202E-3	2.27026E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.15678E-1	-7.98225E-1	-9.13117E0	-9.14214E0	4.50611E-3	9.35316E-2	2.73339E1	-3.26713E1	-3.26511E1	2.67808E1	2.159E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.26445E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.15558E-1	-7.98106E-1	-9.13122E0	-9.14187E0	4.24385E-3	9.34839E-2	2.73868E1	-3.26452E1	-3.26224E1	2.67716E1	2.15696E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.24971E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.15511E-1	-7.97868E-1	-9.13126E0	-9.14204E0	4.52995E-3	9.39131E-2	2.71452E1	-3.26714E1	-3.26425E1	2.67876E1	2.15987E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.26703E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.15678E-1	-7.97868E-1	-9.13162E0	-9.14204E0	4.57764E-3	9.38177E-2	2.70798E1	-3.2672E1	-3.26272E1	2.68341E1	2.15716E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.29166E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.15797E-1	-7.98082E-1	-9.13143E0	-9.14223E0	4.72069E-3	9.33409E-2	2.70703E1	-3.26992E1	-3.2603E1	2.68082E1	2.16085E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.27026E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16083E-1	-7.97844E-1	-9.13162E0	-9.14192E0	4.79221E-3	9.32932E-2	2.72024E1	-3.26687E1	-3.2626E1	2.68274E1	2.15992E-9	2.52707E-3	2.52707E-3	6.32356E-3	2.27413E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.15988E-1	-7.98464E-1	-9.13138E0	-9.14173E0	4.81606E-3	9.32693E-2	2.71129E1	-3.26554E1	-3.26223E1	2.67944E1	2.15791E-9	2.52362E-3	2.52362E-3	6.33538E-3	2.27574E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.15845E-1	-7.98082E-1	-9.13169E0	-9.14166E0	4.91142E-3	9.35793E-2	2.72089E1	-3.26666E1	-3.26382E1	2.67972E1	2.158E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.2888E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16154E-1	-7.97844E-1	-9.1316E0	-9.14195E0	5.05447E-3	9.33886E-2	2.71182E1	-3.2653E1	-3.26783E1	2.67986E1	2.15817E-9	2.52342E-3	2.52342E-3	6.3074E-3	2.281E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.15654E-1	-7.97892E-1	-9.13188E0	-9.14211E0	4.81606E-3	9.35316E-2	2.73113E1	-3.2678E1	-3.26221E1	2.68065E1	2.16269E-9	2.52318E-3	2.52318E-3	6.34588E-3	2.27097E-2