[Scan]
initial_time=2016-01-27T19:51:19
final_time=2016-01-27T19:51:39
ip_count=19
run=1025
dataset=2
scan=147
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=6.12748E-10
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=2.91431E-10
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=5.49197E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.04339E-10
mult1=-1.02341E-8
mult2=-2.73658E-9
rf_tmon=-5.34156E-3
rf_agc=3.27267E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=3.69799E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67218E0
bslens_imon=2.61284E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20141E1
lens5a_imon=1.99419E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05163E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=2.81584E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02073E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04811E1
cs_ea1_imon=2.64761E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3646E0
lens1_imon=2.68998E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03898E1
cs_ea2_imon=1.53654E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.92684E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.03416E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15153E1
os_ea1_imon=1.88217E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24781E0
cs_ionrep_imon=1.19165E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=2.90774E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=7.33626E-10
tplens_vset=1.4E-1
tplens_vmon=1.63837E0
tplens_imon=-1.01482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.49724E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.5909E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98298E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.9953E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24965E0
ionrepsh_imon=1.72864E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33548E1
lens5b_imon=2.18996E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41419E-1
os_ea2_imon=-6.15698E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00487E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.19065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6336E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78203E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=2.86125E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29598E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74998E1
iondef1_imon=1.10717E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67884E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.88913E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=2.60937E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.55299E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.46579E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.15631E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.7876E0
defgridb_imon=5.96994E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33851E1
os_fil1_imon=4.23563E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.86362E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60384E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=9.97212E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63579E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62606E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.97532E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.69813E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3759E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-1.96319E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21749E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.26639E-2
chamber_ion_pmon=2.15992E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.40071E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.15701E-1	-7.98082E-1	-9.13138E0	-9.14204E0	4.91142E-3	9.37223E-2	2.72367E1	-3.26661E1	-3.26408E1	2.67995E1	2.158E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.26506E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.15654E-1	-7.98178E-1	-9.13155E0	-9.14192E0	4.86374E-3	9.37223E-2	2.73611E1	-3.26443E1	-3.26526E1	2.6813E1	2.15349E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.27219E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16274E-1	-7.98082E-1	-9.13153E0	-9.14185E0	4.76837E-3	9.3627E-2	2.74373E1	-3.26783E1	-3.26536E1	2.6807E1	2.15624E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.27026E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16131E-1	-7.9844E-1	-9.13143E0	-9.14211E0	4.8399E-3	9.34601E-2	2.72018E1	-3.26567E1	-3.26579E1	2.68172E1	2.15987E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.269E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.15582E-1	-7.98392E-1	-9.1315E0	-9.1423E0	4.88758E-3	9.35316E-2	2.72715E1	-3.26759E1	-3.2584E1	2.67782E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.28086E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.15487E-1	-7.98631E-1	-9.13143E0	-9.14211E0	4.69685E-3	9.33886E-2	2.74891E1	-3.2652E1	-3.26673E1	2.67878E1	2.15519E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.27097E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.15701E-1	-7.98178E-1	-9.13138E0	-9.14197E0	4.74453E-3	9.32932E-2	2.75238E1	-3.26452E1	-3.2626E1	2.681E1	2.15613E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.28483E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.15773E-1	-7.98059E-1	-9.13131E0	-9.14209E0	5.03063E-3	9.37462E-2	2.74343E1	-3.26567E1	-3.26434E1	2.6803E1	2.15624E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.27219E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.15892E-1	-7.98321E-1	-9.1315E0	-9.14223E0	4.76837E-3	9.36031E-2	2.72101E1	-3.26502E1	-3.26048E1	2.6825E1	2.15706E-9	2.52867E-3	2.52867E-3	6.3074E-3	2.269E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16154E-1	-7.98392E-1	-9.13112E0	-9.14218E0	4.95911E-3	9.32932E-2	2.73584E1	-3.2667E1	-3.26321E1	2.6834E1	2.15624E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.29361E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16298E-1	-7.9782E-1	-9.1315E0	-9.14235E0	4.8399E-3	9.37223E-2	2.71741E1	-3.2652E1	-3.2629E1	2.68004E1	2.16173E-9	2.52139E-3	2.52139E-3	6.35223E-3	2.27978E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.15916E-1	-7.98225E-1	-9.13167E0	-9.14199E0	4.57764E-3	9.36031E-2	2.73798E1	-3.26805E1	-3.26315E1	2.67944E1	2.15533E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.27996E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.15845E-1	-7.98059E-1	-9.13148E0	-9.14185E0	4.76837E-3	9.36747E-2	2.72228E1	-3.2653E1	-3.26008E1	2.68032E1	2.15887E-9	2.51804E-3	2.51804E-3	6.3074E-3	2.27978E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16035E-1	-7.97915E-1	-9.13129E0	-9.14176E0	4.64916E-3	9.35316E-2	2.73658E1	-3.26494E1	-3.25828E1	2.6792E1	2.15519E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.269E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.15797E-1	-7.98345E-1	-9.13126E0	-9.1419E0	5.05447E-3	9.35078E-2	2.71168E1	-3.26961E1	-3.26463E1	2.68116E1	2.158E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.27295E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16321E-1	-7.98321E-1	-9.13169E0	-9.14176E0	4.8399E-3	9.3174E-2	2.72739E1	-3.2664E1	-3.25752E1	2.68225E1	2.15636E-9	2.52025E-3	2.52025E-3	6.29684E-3	2.281E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16464E-1	-7.98059E-1	-9.13122E0	-9.14195E0	4.76837E-3	9.38177E-2	2.7233E1	-3.26783E1	-3.26074E1	2.67704E1	2.15782E-9	2.51725E-3	2.51725E-3	6.34164E-3	2.2766E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16274E-1	-7.98154E-1	-9.13138E0	-9.14187E0	5.03063E-3	9.3627E-2	2.73151E1	-3.2675E1	-3.26278E1	2.68151E1	2.15716E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.26832E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.15892E-1	-7.98011E-1	-9.13148E0	-9.14187E0	4.55379E-3	9.36031E-2	2.739E1	-3.26461E1	-3.26413E1	2.67932E1	2.15992E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.27413E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16274E-1	-7.9813E-1	-9.13167E0	-9.1419E0	4.74453E-3	9.35316E-2	2.74998E1	-3.26597E1	-3.2644E1	2.67884E1	2.15992E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.26639E-2