[Scan]
initial_time=2016-01-27T19:51:46
final_time=2016-01-27T19:52:06
ip_count=19
run=1025
dataset=2
scan=148
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=6.29568E-10
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.95794E-10
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=5.68342E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.16367E-10
mult1=-1.05351E-8
mult2=-2.70464E-9
rf_tmon=-3.70131E-3
rf_agc=3.4349E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.8048E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6391E0
bslens_imon=2.64951E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20199E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=2.79493E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=2.64602E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38518E0
lens1_imon=2.80812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=3.00396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04117E1
cs_ea2_imon=1.51479E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=2.89909E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.81005E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=2.89116E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15528E1
os_ea1_imon=1.90917E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2539E0
cs_ionrep_imon=1.18097E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91839E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02097E1
cs_anode1_imon=2.91098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=7.65681E-10
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.59193E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02893E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.63243E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30257E0
ionrepsh_imon=1.76353E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.4932E-1
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61678E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43965E-1
os_ef2bup_imon=-5.09903E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=2.87927E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.25182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67752E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.91666E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.55275E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-1.65724E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56808E1
einzel_imon=7.59774E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-4.31896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.64958E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.5198E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.59681E0
defgridb_imon=6.12108E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33876E1
os_fil1_imon=5.23873E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.20289E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60532E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30738E1
cs_fil1_imon=9.9514E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63165E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6212E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.44005E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.35318E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.79211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62275E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21568E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.27648E-2
chamber_ion_pmon=2.15804E-9
chamber_cvt_pmon=2.51918E-3
foreline_cvt_pmon=2.51918E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.12751E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16178E-1	-7.97987E-1	-9.13188E0	-9.14187E0	4.79221E-3	9.32217E-2	2.72379E1	-3.26838E1	-3.26207E1	2.68124E1	2.158E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.27492E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16822E-1	-7.97868E-1	-9.13174E0	-9.14199E0	4.52995E-3	9.35316E-2	2.7358E1	-3.26615E1	-3.26639E1	2.67752E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.26832E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16178E-1	-7.98011E-1	-9.13181E0	-9.14209E0	4.60148E-3	9.35555E-2	2.7221E1	-3.26819E1	-3.259E1	2.68106E1	2.15613E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.28483E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16202E-1	-7.97725E-1	-9.13165E0	-9.14211E0	4.55379E-3	9.33647E-2	2.7413E1	-3.26325E1	-3.26154E1	2.67914E1	2.15425E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.269E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16703E-1	-7.97701E-1	-9.13167E0	-9.14204E0	4.86374E-3	9.36985E-2	2.72817E1	-3.26482E1	-3.26182E1	2.6822E1	2.159E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.27219E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16631E-1	-7.97653E-1	-9.13174E0	-9.14202E0	4.55379E-3	9.35078E-2	2.73039E1	-3.26526E1	-3.26136E1	2.6795E1	2.15894E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.2769E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16154E-1	-7.97749E-1	-9.13179E0	-9.14228E0	4.50611E-3	9.37223E-2	2.71824E1	-3.26885E1	-3.26567E1	2.68082E1	2.16269E-9	2.5131E-3	2.5131E-3	6.30202E-3	2.28775E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.15678E-1	-7.98178E-1	-9.13172E0	-9.14173E0	4.64916E-3	9.34601E-2	2.74367E1	-3.26597E1	-3.26009E1	2.67836E1	2.15441E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.2819E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09325E0	-8.16202E-1	-7.97915E-1	-9.13169E0	-9.14173E0	4.79221E-3	9.3627E-2	2.74396E1	-3.26526E1	-3.26673E1	2.68406E1	2.15791E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.26971E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.16083E-1	-7.97987E-1	-9.1316E0	-9.14202E0	5.03063E-3	9.34839E-2	2.72378E1	-3.26747E1	-3.26038E1	2.67962E1	2.15992E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.27413E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.16512E-1	-7.97915E-1	-9.13172E0	-9.14171E0	4.24385E-3	9.3627E-2	2.71002E1	-3.26374E1	-3.26476E1	2.68082E1	2.15706E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.27492E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.15988E-1	-7.98392E-1	-9.13172E0	-9.14183E0	4.45843E-3	9.33886E-2	2.71576E1	-3.26402E1	-3.26478E1	2.6831E1	2.15894E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.28284E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16059E-1	-7.98321E-1	-9.13181E0	-9.14173E0	4.81606E-3	9.35316E-2	2.7187E1	-3.26805E1	-3.25783E1	2.68076E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.27888E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16202E-1	-7.98035E-1	-9.13167E0	-9.14214E0	4.8399E-3	9.32693E-2	2.73812E1	-3.2685E1	-3.2675E1	2.67902E1	2.15613E-9	2.52209E-3	2.52209E-3	6.27461E-3	2.26506E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16083E-1	-7.98178E-1	-9.13148E0	-9.14183E0	4.91142E-3	9.34601E-2	2.72508E1	-3.26803E1	-3.25829E1	2.68154E1	2.16269E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.26059E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16274E-1	-7.98297E-1	-9.13134E0	-9.14185E0	5.05447E-3	9.35078E-2	2.71127E1	-3.26921E1	-3.2659E1	2.67648E1	2.159E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.27413E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.15988E-1	-7.98273E-1	-9.13146E0	-9.14149E0	4.62532E-3	9.34839E-2	2.73265E1	-3.26735E1	-3.26034E1	2.67891E1	2.15907E-9	2.52131E-3	2.52131E-3	6.31798E-3	2.27147E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.15606E-1	-7.98631E-1	-9.1315E0	-9.14168E0	4.86374E-3	9.34601E-2	2.74257E1	-3.26707E1	-3.26217E1	2.6819E1	2.15817E-9	2.52659E-3	2.52659E-3	6.31798E-3	2.27147E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.15821E-1	-7.98464E-1	-9.13148E0	-9.14176E0	4.8399E-3	9.33886E-2	2.71771E1	-3.26508E1	-3.25995E1	2.67769E1	2.15791E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.27373E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.15988E-1	-7.98678E-1	-9.13122E0	-9.14183E0	5.03063E-3	9.34839E-2	2.72967E1	-3.26621E1	-3.26416E1	2.67752E1	2.15804E-9	2.51918E-3	2.51918E-3	6.3074E-3	2.27648E-2