[Scan]
initial_time=2016-01-27T19:52:13
final_time=2016-01-27T19:52:32
ip_count=19
run=1025
dataset=2
scan=149
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=6.34933E-10
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=3.24416E-10
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=5.60296E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.34821E-10
mult1=-9.74761E-9
mult2=-2.80557E-9
rf_tmon=-4.86931E-3
rf_agc=3.26779E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=3.76177E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65383E0
bslens_imon=2.6813E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19624E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=2.82603E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02358E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=2.61334E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36548E0
lens1_imon=2.83349E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64564E1
os_ef1alow_imon=2.98172E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03661E1
cs_ea2_imon=1.53736E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=2.91485E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.85749E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11336E1
os_restr1_imon=2.86779E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15695E1
os_ea1_imon=1.8952E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6342E1
os_ef1bup_imon=3.09248E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=1.21067E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93356E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02063E1
cs_anode1_imon=2.90671E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=7.20632E-10
tplens_vset=1.4E-1
tplens_vmon=1.64379E0
tplens_imon=1.18763E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26803E1
iondef2_imon=1.56461E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02886E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.84212E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=1.74371E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.20737E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74584E1
cs_ef2b_imon=3.14025E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53701E-1
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71452E1
cs_ef2a_imon=3.18766E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6387E0
os_ef2alow_imon=-2.60194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67544E-1
os_ef2bup_imon=-5.23454E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10893E1
os_restr2_imon=2.86496E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01497E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71741E1
iondef1_imon=1.07618E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.09892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.90582E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=2.62356E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12071E0
cs_ionaccel_imon=-1.82349E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.4729E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56317E1
einzel_imon=7.71969E-6
window_vset=0.0E0
window_vmon=2.15453E-1
window_imon=-9.35337E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.86539E1
mask2_imon=-6.73493E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.17634E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.84364E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.25067E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.61377E0
defgridb_imon=5.99772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33834E1
os_fil1_imon=4.5744E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.45823E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60348E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30815E1
cs_fil1_imon=9.96942E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63988E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62573E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.81309E-2
os_fil2_imon=-2.39633E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29551E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3604E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2997E-1
cs_fil2_imon=-2.09556E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58442E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21705E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.27413E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.50107E-1
res40_imon=-2.32594E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.15892E-1	-7.97963E-1	-9.13162E0	-9.14171E0	4.79221E-3	9.35316E-2	2.74205E1	-3.26639E1	-3.2626E1	2.68047E1	2.15808E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.26639E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.15988E-1	-7.98225E-1	-9.13165E0	-9.1419E0	4.88758E-3	9.36031E-2	2.72348E1	-3.26741E1	-3.26434E1	2.67776E1	2.158E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.28086E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.15797E-1	-7.98345E-1	-9.13138E0	-9.14164E0	5.17368E-3	9.34839E-2	2.74012E1	-3.26753E1	-3.26044E1	2.67962E1	2.15706E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.27295E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16083E-1	-7.98559E-1	-9.13136E0	-9.14178E0	5.05447E-3	9.33409E-2	2.72889E1	-3.26705E1	-3.2593E1	2.68026E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.27295E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16107E-1	-7.98178E-1	-9.13129E0	-9.14197E0	5.126E-3	9.35793E-2	2.71867E1	-3.26693E1	-3.26206E1	2.68226E1	2.15613E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.26703E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.1625E-1	-7.98106E-1	-9.13153E0	-9.14197E0	5.05447E-3	9.3627E-2	2.73171E1	-3.26789E1	-3.26266E1	2.6796E1	2.15425E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.269E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16011E-1	-7.98082E-1	-9.13146E0	-9.14202E0	4.8399E-3	9.32217E-2	2.7341E1	-3.2659E1	-3.26243E1	2.68192E1	2.15706E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.27295E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16298E-1	-7.98154E-1	-9.13157E0	-9.14192E0	4.79221E-3	9.33886E-2	2.73213E1	-3.26466E1	-3.26429E1	2.67726E1	2.15726E-9	2.52025E-3	2.52025E-3	6.2863E-3	2.27528E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.15988E-1	-7.9782E-1	-9.13148E0	-9.14178E0	4.55379E-3	9.3317E-2	2.73724E1	-3.26464E1	-3.26338E1	2.6819E1	2.15685E-9	2.51384E-3	2.51384E-3	6.3131E-3	2.27865E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.15868E-1	-7.98059E-1	-9.13141E0	-9.14185E0	4.79221E-3	9.35078E-2	2.74372E1	-3.26579E1	-3.26508E1	2.68004E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.27492E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.15535E-1	-7.98488E-1	-9.13136E0	-9.14209E0	4.43459E-3	9.32693E-2	2.73594E1	-3.26732E1	-3.2639E1	2.67583E1	2.15624E-9	2.52707E-3	2.52707E-3	6.33436E-3	2.27026E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.15988E-1	-7.98178E-1	-9.13143E0	-9.14187E0	4.45843E-3	9.32455E-2	2.7406E1	-3.26861E1	-3.2611E1	2.67798E1	2.159E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.27219E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.15821E-1	-7.98106E-1	-9.13107E0	-9.14187E0	4.43459E-3	9.33409E-2	2.74079E1	-3.26554E1	-3.26529E1	2.68007E1	2.15332E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.2769E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.15916E-1	-7.98106E-1	-9.13129E0	-9.14199E0	4.33922E-3	9.34601E-2	2.72907E1	-3.26687E1	-3.26398E1	2.68034E1	2.15696E-9	2.51804E-3	2.51804E-3	6.34099E-3	2.26369E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.15749E-1	-7.98202E-1	-9.13138E0	-9.14173E0	4.673E-3	9.37223E-2	2.73552E1	-3.27045E1	-3.25877E1	2.68118E1	2.15706E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.2572E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.15773E-1	-7.98011E-1	-9.13143E0	-9.14223E0	4.45843E-3	9.33647E-2	2.72582E1	-3.26284E1	-3.26374E1	2.68157E1	2.15808E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.27607E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16059E-1	-7.98035E-1	-9.13143E0	-9.14214E0	4.48227E-3	9.34601E-2	2.7134E1	-3.26726E1	-3.26172E1	2.68064E1	2.15894E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.2769E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16274E-1	-7.98202E-1	-9.13143E0	-9.14207E0	4.3869E-3	9.3317E-2	2.7397E1	-3.26849E1	-3.26579E1	2.68106E1	2.15808E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.27802E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.15916E-1	-7.98464E-1	-9.13184E0	-9.14197E0	4.29153E-3	9.32693E-2	2.71842E1	-3.26502E1	-3.26661E1	2.67989E1	2.16081E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.26703E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16011E-1	-7.98106E-1	-9.13155E0	-9.1419E0	4.45843E-3	9.34124E-2	2.71741E1	-3.26803E1	-3.26337E1	2.6798E1	2.15716E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.27413E-2