[Scan]
initial_time=2016-01-27T19:52:39
final_time=2016-01-27T19:52:59
ip_count=19
run=1025
dataset=2
scan=150
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=6.53315E-10
ql2_vset=
ql2_vmon=-7.97653E-1
ql2_imon=2.99251E-10
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=5.71013E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.62596E-10
mult1=-1.03785E-8
mult2=-2.76452E-9
rf_tmon=-4.77679E-3
rf_agc=3.33997E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=3.7632E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.36111E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20067E1
lens5a_imon=2.00326E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05334E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54019E1
cs_ef1b_imon=2.81692E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=2.64025E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35634E0
lens1_imon=2.64951E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04117E1
cs_ea2_imon=1.54723E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.93909E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=3.76511E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11051E1
os_restr1_imon=2.87746E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=1.89259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.10343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=2.889E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=7.43055E-10
tplens_vset=1.4E-1
tplens_vmon=1.64504E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26458E1
iondef3_imon=1.52164E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.59626E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.54803E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27733E0
ionrepsh_imon=1.75704E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.19504E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45715E-1
os_ea2_imon=-4.94013E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65462E0
os_ef2alow_imon=-2.35641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67391E-1
os_ef2bup_imon=-5.41978E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=2.87242E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.3E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.21722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7224E1
iondef1_imon=1.09373E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=1.9186E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.64955E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0929E0
cs_ionaccel_imon=-2.01764E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-4.1748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.85145E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.75555E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.27106E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.5908E0
defgridb_imon=6.3554E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33888E1
os_fil1_imon=4.77622E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.21491E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60391E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30761E1
cs_fil1_imon=9.94792E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63639E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62065E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.00407E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25135E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21453E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.27802E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.72507E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.15725E-1	-7.97987E-1	-9.13148E0	-9.14199E0	4.88758E-3	9.36508E-2	2.73022E1	-3.26434E1	-3.26515E1	2.68059E1	2.15706E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.27492E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.16107E-1	-7.97796E-1	-9.13146E0	-9.14183E0	4.88758E-3	9.37462E-2	2.72532E1	-3.26644E1	-3.26089E1	2.67914E1	2.15767E-9	2.51883E-3	2.51883E-3	6.32075E-3	2.27471E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16035E-1	-7.9813E-1	-9.1316E0	-9.14199E0	4.62532E-3	9.3317E-2	2.73286E1	-3.26607E1	-3.26087E1	2.68132E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.15821E-1	-7.97963E-1	-9.13184E0	-9.14187E0	4.48227E-3	9.3627E-2	2.73249E1	-3.26675E1	-3.25858E1	2.68016E1	2.15483E-9	2.51854E-3	2.51854E-3	6.31761E-3	2.27376E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.15701E-1	-7.97844E-1	-9.1315E0	-9.14185E0	4.57764E-3	9.36985E-2	2.72937E1	-3.26885E1	-3.26518E1	2.68107E1	2.158E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.2769E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16154E-1	-7.98082E-1	-9.13131E0	-9.14218E0	4.86374E-3	9.3627E-2	2.71866E1	-3.26497E1	-3.26298E1	2.67896E1	2.15706E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.27888E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.16059E-1	-7.9844E-1	-9.13143E0	-9.14209E0	4.62532E-3	9.34124E-2	2.74455E1	-3.26567E1	-3.26124E1	2.6813E1	2.1589E-9	2.51732E-3	2.51732E-3	6.3157E-3	2.27433E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09665E0	-8.16154E-1	-7.98202E-1	-9.13165E0	-9.14207E0	4.76837E-3	9.37223E-2	2.72379E1	-3.26413E1	-3.2606E1	2.67946E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.15773E-1	-7.98345E-1	-9.13169E0	-9.14226E0	4.673E-3	9.3627E-2	2.72745E1	-3.26392E1	-3.25972E1	2.68288E1	2.15716E-9	2.51847E-3	2.51847E-3	6.26985E-3	2.27026E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16131E-1	-7.97677E-1	-9.13153E0	-9.1418E0	4.673E-3	9.36031E-2	2.73279E1	-3.26675E1	-3.26549E1	2.67794E1	2.15894E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.27492E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.15964E-1	-7.97939E-1	-9.13143E0	-9.14197E0	4.74453E-3	9.31263E-2	2.72709E1	-3.26506E1	-3.25882E1	2.67896E1	2.15706E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.27888E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.1625E-1	-7.98273E-1	-9.13165E0	-9.14176E0	4.69685E-3	9.35078E-2	2.73375E1	-3.26667E1	-3.26148E1	2.67662E1	2.15332E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.28086E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09673E0	-8.15797E-1	-7.98297E-1	-9.1315E0	-9.14199E0	4.62532E-3	9.33886E-2	2.74241E1	-3.26735E1	-3.2644E1	2.67902E1	2.15716E-9	2.52707E-3	2.52707E-3	6.30202E-3	2.27219E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09657E0	-8.1594E-1	-7.98392E-1	-9.13134E0	-9.14178E0	4.673E-3	9.35078E-2	2.72288E1	-3.26981E1	-3.25936E1	2.6798E1	2.15706E-9	2.51225E-3	2.51225E-3	6.32936E-3	2.269E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.15535E-1	-7.98178E-1	-9.13143E0	-9.14197E0	4.76837E-3	9.36985E-2	2.73652E1	-3.26663E1	-3.26374E1	2.68058E1	2.15613E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.25524E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.15701E-1	-7.98035E-1	-9.13136E0	-9.14178E0	4.55379E-3	9.35793E-2	2.73222E1	-3.26555E1	-3.26561E1	2.68024E1	2.16177E-9	2.52276E-3	2.52276E-3	6.28592E-3	2.26445E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16393E-1	-7.98082E-1	-9.13143E0	-9.14173E0	5.14984E-3	9.31501E-2	2.72626E1	-3.26856E1	-3.26219E1	2.68118E1	2.15519E-9	2.51116E-3	2.51116E-3	6.33486E-3	2.27097E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.16202E-1	-7.9813E-1	-9.13138E0	-9.14156E0	4.69685E-3	9.33647E-2	2.7329E1	-3.26854E1	-3.2615E1	2.6816E1	2.15992E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.27607E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16321E-1	-7.97415E-1	-9.13186E0	-9.1418E0	4.76837E-3	9.31501E-2	2.73782E1	-3.26874E1	-3.26219E1	2.68016E1	2.15314E-9	2.5225E-3	2.5225E-3	6.33538E-3	2.27373E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16321E-1	-7.97653E-1	-9.13153E0	-9.14216E0	4.95911E-3	9.3174E-2	2.7224E1	-3.26609E1	-3.26458E1	2.6792E1	2.159E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.27802E-2