[Scan]
initial_time=2016-01-27T19:53:06
final_time=2016-01-27T19:53:25
ip_count=19
run=1025
dataset=2
scan=151
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-8.1563E-1
ql1_imon=6.29389E-10
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.82085E-10
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=5.67555E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.07665E-10
mult1=-9.78855E-9
mult2=-2.66272E-9
rf_tmon=-4.83086E-3
rf_agc=3.2931E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=3.91877E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65292E0
bslens_imon=2.53054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20115E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.8198E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05042E1
cs_ea1_imon=2.62115E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36956E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=2.99387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.53822E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=2.93333E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=4.14705E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=2.8771E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=1.88394E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21785E0
cs_ionrep_imon=1.19359E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.90449E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=7.43484E-10
tplens_vset=1.4E-1
tplens_vmon=1.64624E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.52452E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.93307E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31098E0
ionrepsh_imon=1.73289E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.19648E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.08464E-1
os_ea2_imon=-6.12977E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00731E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6336E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69193E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11003E1
os_restr2_imon=2.87386E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.25614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.07859E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67824E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.94472E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=2.92194E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82596E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86903E1
mask2_imon=-4.89559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.20617E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.36621E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.22419E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.29004E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33833E1
os_fil1_imon=5.14863E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.32903E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60369E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30658E1
cs_fil1_imon=9.96089E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63399E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62605E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93784E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31322E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21586E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.27295E-2
chamber_ion_pmon=2.16175E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.54797E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.15916E-1	-7.97534E-1	-9.13153E0	-9.14197E0	4.88758E-3	9.37223E-2	2.72101E1	-3.26567E1	-3.26331E1	2.6831E1	2.15613E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.27492E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.15749E-1	-7.97796E-1	-9.13167E0	-9.14202E0	4.88758E-3	9.41992E-2	2.739E1	-3.26697E1	-3.26166E1	2.68024E1	2.15907E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.27337E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.15701E-1	-7.97987E-1	-9.13126E0	-9.14176E0	4.673E-3	9.39608E-2	2.72894E1	-3.26618E1	-3.26618E1	2.68239E1	2.158E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.27888E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.15821E-1	-7.98178E-1	-9.13129E0	-9.14197E0	5.05447E-3	9.37462E-2	2.72175E1	-3.26383E1	-3.26091E1	2.67803E1	2.15745E-9	2.5165E-3	2.5165E-3	6.32273E-3	2.27376E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.15439E-1	-7.98416E-1	-9.13134E0	-9.14199E0	4.93526E-3	9.36508E-2	2.74505E1	-3.265E1	-3.26651E1	2.68057E1	2.16066E-9	2.52029E-3	2.52029E-3	6.29558E-3	2.28697E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.15558E-1	-7.9782E-1	-9.13146E0	-9.14211E0	5.126E-3	9.37223E-2	2.72709E1	-3.26753E1	-3.25779E1	2.68176E1	2.14958E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.28681E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.15964E-1	-7.9844E-1	-9.13157E0	-9.14199E0	5.45979E-3	9.36508E-2	2.7381E1	-3.26872E1	-3.26272E1	2.67864E1	2.15519E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.269E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.15916E-1	-7.98273E-1	-9.13122E0	-9.14211E0	5.10216E-3	9.39131E-2	2.71927E1	-3.26512E1	-3.26963E1	2.6804E1	2.15332E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.27888E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.15749E-1	-7.98345E-1	-9.13122E0	-9.14221E0	4.74453E-3	9.38416E-2	2.74379E1	-3.26675E1	-3.26356E1	2.68172E1	2.16078E-9	2.51581E-3	2.51581E-3	6.29624E-3	2.29192E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.15678E-1	-7.98225E-1	-9.13095E0	-9.14209E0	4.93526E-3	9.408E-2	2.72054E1	-3.26431E1	-3.26248E1	2.68058E1	2.15533E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.25289E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.15892E-1	-7.98059E-1	-9.13134E0	-9.14228E0	5.07832E-3	9.38892E-2	2.73826E1	-3.26356E1	-3.26002E1	2.67943E1	2.15613E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.2631E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.15487E-1	-7.97987E-1	-9.13119E0	-9.14202E0	4.86374E-3	9.36031E-2	2.72709E1	-3.26633E1	-3.25954E1	2.67992E1	2.158E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.2769E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.15606E-1	-7.98225E-1	-9.13098E0	-9.14187E0	4.93526E-3	9.34601E-2	2.7252E1	-3.26738E1	-3.26543E1	2.67902E1	2.159E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.27219E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.15868E-1	-7.98297E-1	-9.13093E0	-9.14178E0	4.79221E-3	9.34601E-2	2.73634E1	-3.26867E1	-3.2593E1	2.68022E1	2.15706E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.27295E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16226E-1	-7.98059E-1	-9.13162E0	-9.14211E0	4.95911E-3	9.33886E-2	2.72775E1	-3.26464E1	-3.26512E1	2.6828E1	2.15519E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.2769E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16321E-1	-7.97534E-1	-9.13143E0	-9.14214E0	5.19753E-3	9.41277E-2	2.73742E1	-3.26585E1	-3.26368E1	2.6789E1	2.15519E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.27295E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.15821E-1	-7.98106E-1	-9.13126E0	-9.14211E0	5.07832E-3	9.39608E-2	2.73653E1	-3.26437E1	-3.26248E1	2.68001E1	2.158E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.26703E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.15678E-1	-7.97939E-1	-9.13126E0	-9.14211E0	4.76837E-3	9.38177E-2	2.72196E1	-3.26685E1	-3.26354E1	2.68226E1	2.15624E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.2858E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.15463E-1	-7.97796E-1	-9.13131E0	-9.1418E0	4.93526E-3	9.38892E-2	2.72805E1	-3.26452E1	-3.26122E1	2.67962E1	2.15624E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.28775E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.1563E-1	-7.98011E-1	-9.13119E0	-9.1419E0	4.93526E-3	9.34839E-2	2.73405E1	-3.26573E1	-3.26254E1	2.67824E1	2.16175E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.27295E-2