[Scan]
initial_time=2016-01-27T19:54:53
final_time=2016-01-27T19:55:12
ip_count=19
run=1025
dataset=2
scan=155
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.15845E-1
ql1_imon=6.33931E-10
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.88939E-10
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=5.71537E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.27918E-10
mult1=-1.03742E-8
mult2=-2.93296E-9
rf_tmon=-5.61849E-3
rf_agc=3.28608E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=3.76332E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6684E0
bslens_imon=2.58361E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19882E1
lens5a_imon=2.00063E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53593E1
cs_ef1b_imon=2.82858E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02281E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05066E1
cs_ea1_imon=2.65238E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3771E0
lens1_imon=2.7043E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.99245E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03814E1
cs_ea2_imon=1.54589E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84277E1
cs_ef1a_imon=2.93406E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.93677E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11357E1
os_restr1_imon=2.85738E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14858E1
os_ea1_imon=1.88578E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63648E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23782E0
cs_ionrep_imon=1.19043E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.9335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02068E1
cs_anode1_imon=2.91694E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=7.35819E-10
tplens_vset=1.4E-1
tplens_vmon=1.6291E0
tplens_imon=-2.39071E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26077E1
iondef3_imon=1.49294E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.58327E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98428E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.23594E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28519E0
ionrepsh_imon=1.76859E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33853E1
lens5b_imon=2.19491E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74339E1
cs_ef2b_imon=3.12984E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.19711E-1
os_ea2_imon=-4.64885E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00405E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71277E1
cs_ef2a_imon=3.20691E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61894E0
os_ef2alow_imon=-2.5333E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64772E-1
os_ef2bup_imon=-5.12556E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10663E1
os_restr2_imon=2.85699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.31914E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0177E1
cs_anode2_imon=2.24746E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71942E1
iondef1_imon=1.09154E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.07822E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.93211E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=2.70236E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11846E0
cs_ionaccel_imon=-1.81322E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47452E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56113E1
einzel_imon=7.69952E-6
window_vset=0.0E0
window_vmon=2.15276E-1
window_imon=-8.8686E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.38971E-4
mask2_vset=0.0E0
mask2_vmon=-1.86694E1
mask2_imon=-6.26077E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.24784E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.87019E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50099E3
multb_neg_imon=7.18165E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.43777E0
defgridb_imon=6.01754E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33832E1
os_fil1_imon=4.60684E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.81148E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60806E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30666E1
cs_fil1_imon=9.96756E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.65038E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62973E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.85994E-2
os_fil2_imon=-2.29548E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.57269E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.19892E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30491E-1
cs_fil2_imon=-1.97112E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05837E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21671E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.26956E-2
chamber_ion_pmon=2.15275E-9
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.55592E-1
res40_imon=-2.35425E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.15749E-1	-7.98273E-1	-9.13141E0	-9.14202E0	4.64916E-3	9.35078E-2	2.71759E1	-3.26767E1	-3.26071E1	2.67972E1	2.15442E-9	2.52191E-3	2.52191E-3	6.31344E-3	2.26197E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16131E-1	-7.97915E-1	-9.13165E0	-9.14185E0	4.76837E-3	9.35078E-2	2.73225E1	-3.26759E1	-3.26302E1	2.68064E1	2.15808E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.27607E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16226E-1	-7.97915E-1	-9.1315E0	-9.14195E0	4.95911E-3	9.37462E-2	2.73922E1	-3.26206E1	-3.26494E1	2.67782E1	2.15706E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.28284E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.15701E-1	-7.98273E-1	-9.13153E0	-9.14185E0	5.05447E-3	9.35793E-2	2.71951E1	-3.26747E1	-3.26284E1	2.68046E1	2.15716E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.26832E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.16345E-1	-7.98297E-1	-9.13129E0	-9.14192E0	4.673E-3	9.35316E-2	2.7426E1	-3.26514E1	-3.26183E1	2.67908E1	2.15425E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.26113E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.15868E-1	-7.98249E-1	-9.13126E0	-9.14204E0	4.81606E-3	9.36031E-2	2.72937E1	-3.25984E1	-3.26681E1	2.68262E1	2.158E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.27295E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16083E-1	-7.98297E-1	-9.13174E0	-9.14199E0	4.62532E-3	9.32693E-2	2.74366E1	-3.26562E1	-3.26106E1	2.68163E1	2.15441E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.27996E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.15845E-1	-7.98321E-1	-9.13148E0	-9.14207E0	4.79221E-3	9.34601E-2	2.72803E1	-3.26871E1	-3.26076E1	2.68051E1	2.15636E-9	2.52659E-3	2.52659E-3	6.31798E-3	2.27337E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.15535E-1	-7.97892E-1	-9.13172E0	-9.1419E0	4.52995E-3	9.36031E-2	2.72744E1	-3.26626E1	-3.26396E1	2.68099E1	2.1607E-9	2.51874E-3	2.51874E-3	6.31902E-3	2.26703E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.15916E-1	-7.98297E-1	-9.13177E0	-9.14192E0	4.45843E-3	9.3627E-2	2.73157E1	-3.26838E1	-3.26455E1	2.68082E1	2.15365E-9	2.51709E-3	2.51709E-3	6.3074E-3	2.26577E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.15558E-1	-7.97963E-1	-9.1315E0	-9.14199E0	4.93526E-3	9.377E-2	2.73786E1	-3.26787E1	-3.26291E1	2.68082E1	2.15425E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.27097E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.15868E-1	-7.97844E-1	-9.13162E0	-9.14192E0	4.86374E-3	9.39608E-2	2.72886E1	-3.26537E1	-3.26425E1	2.6777E1	2.15894E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.27097E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.1594E-1	-7.9813E-1	-9.13193E0	-9.14204E0	4.98295E-3	9.377E-2	2.72788E1	-3.26774E1	-3.2637E1	2.6792E1	2.15624E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.26445E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16107E-1	-7.97653E-1	-9.13196E0	-9.14183E0	4.79221E-3	9.32217E-2	2.73033E1	-3.2698E1	-3.26195E1	2.67968E1	2.15879E-9	2.51725E-3	2.51725E-3	6.3074E-3	2.27865E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.15821E-1	-7.97629E-1	-9.13174E0	-9.14192E0	4.95911E-3	9.40084E-2	2.73027E1	-3.26526E1	-3.26431E1	2.6818E1	2.15817E-9	2.52236E-3	2.52236E-3	6.33388E-3	2.27528E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.15678E-1	-7.97677E-1	-9.13148E0	-9.14199E0	5.00679E-3	9.38892E-2	2.72835E1	-3.26651E1	-3.26248E1	2.6802E1	2.15624E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.27802E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.15749E-1	-7.97749E-1	-9.13148E0	-9.14192E0	4.79221E-3	9.37223E-2	2.73676E1	-3.26531E1	-3.26443E1	2.68215E1	2.15505E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.26569E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09325E0	-8.15654E-1	-7.97606E-1	-9.13167E0	-9.14202E0	5.24521E-3	9.38416E-2	2.72306E1	-3.26428E1	-3.26344E1	2.68148E1	2.15636E-9	2.51919E-3	2.51919E-3	6.3074E-3	2.27718E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09294E0	-8.15964E-1	-7.98011E-1	-9.1315E0	-9.14211E0	5.22137E-3	9.37939E-2	2.74266E1	-3.26785E1	-3.2636E1	2.68302E1	2.15791E-9	2.5147E-3	2.5147E-3	6.31299E-3	2.27978E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.15845E-1	-7.98178E-1	-9.13165E0	-9.1419E0	5.17368E-3	9.36985E-2	2.71942E1	-3.26779E1	-3.26077E1	2.68034E1	2.15275E-9	2.51814E-3	2.51814E-3	6.31798E-3	2.26956E-2