[Scan]
initial_time=2016-01-27T19:55:46
final_time=2016-01-27T19:56:05
ip_count=19
run=1025
dataset=2
scan=157
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09286E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=6.35838E-10
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=2.95067E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.41735E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=5.2259E-10
mult1=-1.01252E-8
mult2=-2.76682E-9
rf_tmon=-4.59354E-3
rf_agc=3.24307E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=3.71432E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66271E0
bslens_imon=2.6688E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19637E1
lens5a_imon=1.98988E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05127E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53624E1
cs_ef1b_imon=2.80362E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05007E1
cs_ea1_imon=2.66396E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39164E0
lens1_imon=2.59246E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.9945E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04244E1
cs_ea2_imon=1.55512E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84344E1
cs_ef1a_imon=2.91927E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.7657E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11317E1
os_restr1_imon=2.88783E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=1.87002E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63791E1
os_ef1bup_imon=3.08918E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24383E0
cs_ionrep_imon=1.18869E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.9339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.9159E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=7.54678E-10
tplens_vset=1.4E-1
tplens_vmon=1.65861E0
tplens_imon=-2.2449E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26085E1
iondef3_imon=1.51313E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26853E1
iondef2_imon=1.56543E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98644E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.63362E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23429E0
ionrepsh_imon=1.74788E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.19943E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7462E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.10054E-1
os_ea2_imon=-5.64204E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00627E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71133E1
cs_ef2a_imon=3.19996E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60784E0
os_ef2alow_imon=-2.66788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.20909E-1
os_ef2bup_imon=-5.17541E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.8811E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.28974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01865E1
cs_anode2_imon=2.2471E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73145E1
iondef1_imon=1.09937E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67951E1
iondef4_imon=1.08353E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.94901E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=2.84565E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12577E0
cs_ionaccel_imon=-1.69855E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56031E1
einzel_imon=7.63919E-6
window_vset=0.0E0
window_vmon=2.41923E-1
window_imon=-9.94946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39069E-4
mask2_vset=0.0E0
mask2_vmon=-1.86606E1
mask2_imon=-5.45837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.9859E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9362E3
defgrida_imon=5.97815E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50085E3
multb_neg_imon=6.03541E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.69164E0
defgridb_imon=5.88272E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33819E1
os_fil1_imon=4.28622E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.5485E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60819E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30698E1
cs_fil1_imon=9.96307E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63725E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62303E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.79521E-2
os_fil2_imon=-2.34438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.30572E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29025E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30862E-1
cs_fil2_imon=-2.11359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0177E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2166E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.27718E-2
chamber_ion_pmon=2.15455E-9
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.00553E-1
res40_imon=-2.41338E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.15749E-1	-7.98178E-1	-9.13098E0	-9.14204E0	4.64916E-3	9.34124E-2	2.72937E1	-3.26843E1	-3.26464E1	2.68028E1	2.15772E-9	2.52454E-3	2.52454E-3	6.32483E-3	2.27539E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.15749E-1	-7.97963E-1	-9.13088E0	-9.14149E0	4.64916E-3	9.36031E-2	2.73111E1	-3.26747E1	-3.26242E1	2.68214E1	2.15706E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.27097E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.15678E-1	-7.97606E-1	-9.131E0	-9.14173E0	4.48227E-3	9.33647E-2	2.7297E1	-3.26538E1	-3.26115E1	2.68123E1	2.15696E-9	2.52027E-3	2.52027E-3	6.34661E-3	2.27776E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-8.15678E-1	-7.97844E-1	-9.13129E0	-9.14171E0	4.74453E-3	9.31501E-2	2.73057E1	-3.2647E1	-3.26506E1	2.68046E1	2.15647E-9	2.52717E-3	2.52717E-3	6.3074E-3	2.27825E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.15845E-1	-7.97987E-1	-9.13174E0	-9.14152E0	4.88758E-3	9.33886E-2	2.73252E1	-3.26655E1	-3.26242E1	2.68166E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.27492E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.15988E-1	-7.98035E-1	-9.13148E0	-9.14154E0	4.64916E-3	9.37223E-2	2.72348E1	-3.26753E1	-3.25906E1	2.68178E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.2769E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.16083E-1	-7.98249E-1	-9.13167E0	-9.14161E0	4.50611E-3	9.38177E-2	2.73426E1	-3.26635E1	-3.25964E1	2.68015E1	2.15533E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.27026E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.1625E-1	-7.9813E-1	-9.13148E0	-9.14192E0	4.673E-3	9.35078E-2	2.73063E1	-3.2656E1	-3.2646E1	2.68356E1	2.15825E-9	2.51369E-3	2.51369E-3	6.31779E-3	2.27264E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16107E-1	-7.98225E-1	-9.13157E0	-9.1419E0	4.52995E-3	9.32693E-2	2.73364E1	-3.26526E1	-3.26472E1	2.68204E1	2.15505E-9	2.52139E-3	2.52139E-3	6.30182E-3	2.27776E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.15701E-1	-7.98059E-1	-9.13134E0	-9.14159E0	4.45843E-3	9.34362E-2	2.72883E1	-3.26657E1	-3.26873E1	2.67974E1	2.15894E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.27888E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.15892E-1	-7.98106E-1	-9.13131E0	-9.1418E0	4.26769E-3	9.35316E-2	2.73231E1	-3.26783E1	-3.26164E1	2.67956E1	2.15533E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.2858E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.15916E-1	-7.97796E-1	-9.13143E0	-9.14173E0	4.52995E-3	9.34839E-2	2.7298E1	-3.2652E1	-3.26354E1	2.6816E1	2.158E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.29079E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.15511E-1	-7.97725E-1	-9.13124E0	-9.14183E0	4.88758E-3	9.32693E-2	2.72931E1	-3.26465E1	-3.2652E1	2.68077E1	2.158E-9	2.51116E-3	2.51116E-3	6.33486E-3	2.28681E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.15892E-1	-7.98059E-1	-9.1315E0	-9.14195E0	4.81606E-3	9.33409E-2	2.72815E1	-3.26726E1	-3.25794E1	2.68148E1	2.15578E-9	2.52079E-3	2.52079E-3	6.31189E-3	2.27996E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16083E-1	-7.97796E-1	-9.13107E0	-9.14204E0	4.79221E-3	9.34601E-2	2.73075E1	-3.26536E1	-3.26524E1	2.68226E1	2.15808E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.28775E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.15988E-1	-7.98178E-1	-9.13091E0	-9.1418E0	4.69685E-3	9.36985E-2	2.73051E1	-3.26795E1	-3.26464E1	2.67722E1	2.15519E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.27888E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16131E-1	-7.98297E-1	-9.13122E0	-9.14185E0	4.93526E-3	9.36985E-2	2.73027E1	-3.26443E1	-3.26065E1	2.6825E1	2.15314E-9	2.51359E-3	2.51359E-3	6.32418E-3	2.28786E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09348E0	-8.15916E-1	-7.98202E-1	-9.13146E0	-9.14207E0	4.8399E-3	9.36508E-2	2.73021E1	-3.26803E1	-3.26354E1	2.6798E1	2.15455E-9	2.52871E-3	2.52871E-3	6.29684E-3	2.27147E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-8.16226E-1	-7.98392E-1	-9.13157E0	-9.14159E0	4.60148E-3	9.34124E-2	2.73184E1	-3.26521E1	-3.26202E1	2.68088E1	2.15349E-9	2.52815E-3	2.52815E-3	6.3074E-3	2.28385E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09286E0	-8.1656E-1	-7.97892E-1	-9.13141E0	-9.14176E0	4.60148E-3	9.35793E-2	2.73145E1	-3.26853E1	-3.26085E1	2.67951E1	2.15455E-9	2.51709E-3	2.51709E-3	6.31269E-3	2.27718E-2