[Scan]
initial_time=2016-01-27T19:56:13
final_time=2016-01-27T19:56:32
ip_count=19
run=1025
dataset=2
scan=158
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.15773E-1
ql1_imon=5.58615E-10
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=2.88057E-10
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=5.47445E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.28204E-10
mult1=-1.02341E-8
mult2=-2.7745E-9
rf_tmon=-3.4009E-3
rf_agc=3.44451E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=3.76904E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.63148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12429E2
lens4a_imon=2.05244E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53448E1
cs_ef1b_imon=2.82124E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.65107E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40861E0
lens1_imon=2.68916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.53966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.93513E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.86834E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=2.86701E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=1.87204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22927E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=2.90846E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=7.30789E-10
tplens_vset=1.4E-1
tplens_vmon=1.65045E0
tplens_imon=-1.80383E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.4809E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26969E1
iondef2_imon=1.57679E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02886E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.71265E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29956E0
ionrepsh_imon=1.73469E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33538E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.09065E-1
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65282E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38559E-1
os_ef2bup_imon=-5.10264E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=2.86845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30181E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.23848E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.10743E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.952E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.49803E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.90914E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86897E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.89111E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93655E3
defgrida_imon=6.18236E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50061E3
multb_neg_imon=6.77357E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.56674E0
defgridb_imon=5.8507E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33842E1
os_fil1_imon=4.33774E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.08877E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60691E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30645E1
cs_fil1_imon=9.97405E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6418E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62436E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73148E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.37998E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39185E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.01125E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21714E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.26832E-2
chamber_ion_pmon=2.15257E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.46388E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.16321E-1	-7.97701E-1	-9.13155E0	-9.1418E0	4.45843E-3	9.3317E-2	2.73393E1	-3.26284E1	-3.26195E1	2.67848E1	2.15519E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.2769E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.15678E-1	-7.97987E-1	-9.13184E0	-9.1418E0	4.76837E-3	9.36031E-2	2.7263E1	-3.26607E1	-3.26129E1	2.68233E1	2.15546E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.27337E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16536E-1	-7.97868E-1	-9.13138E0	-9.14197E0	4.48227E-3	9.35078E-2	2.72926E1	-3.26965E1	-3.26135E1	2.67814E1	2.15647E-9	2.52509E-3	2.52509E-3	6.3282E-3	2.2689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.15845E-1	-7.98035E-1	-9.13155E0	-9.14176E0	4.64916E-3	9.35793E-2	2.73514E1	-3.26494E1	-3.26675E1	2.68088E1	2.1549E-9	2.52977E-3	2.52977E-3	6.34164E-3	2.27865E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16369E-1	-7.98082E-1	-9.13153E0	-9.1418E0	4.81606E-3	9.35316E-2	2.73187E1	-3.26508E1	-3.26201E1	2.68148E1	2.158E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.27295E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16011E-1	-7.98106E-1	-9.13119E0	-9.14176E0	4.88758E-3	9.35793E-2	2.72522E1	-3.26741E1	-3.26242E1	2.67884E1	2.15349E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.27996E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.15845E-1	-7.98368E-1	-9.13122E0	-9.14218E0	4.79221E-3	9.38654E-2	2.73904E1	-3.26386E1	-3.26524E1	2.67776E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.28284E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.15463E-1	-7.97987E-1	-9.1316E0	-9.14207E0	4.673E-3	9.35316E-2	2.73252E1	-3.26626E1	-3.26213E1	2.68088E1	2.15706E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.28483E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.15797E-1	-7.98011E-1	-9.13138E0	-9.14218E0	4.95911E-3	9.35793E-2	2.72835E1	-3.26621E1	-3.26074E1	2.67944E1	2.15519E-9	2.5188E-3	2.5188E-3	6.28006E-3	2.2888E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.15845E-1	-7.98202E-1	-9.13143E0	-9.14204E0	4.93526E-3	9.37462E-2	2.72787E1	-3.26651E1	-3.25936E1	2.67914E1	2.15533E-9	2.51632E-3	2.51632E-3	6.33977E-3	2.27996E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16059E-1	-7.98225E-1	-9.1315E0	-9.14185E0	4.91142E-3	9.37939E-2	2.73201E1	-3.26476E1	-3.26452E1	2.68208E1	2.15987E-9	2.51007E-3	2.51007E-3	6.31837E-3	2.28284E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.15654E-1	-7.98154E-1	-9.1316E0	-9.14202E0	4.57764E-3	9.39131E-2	2.7308E1	-3.26508E1	-3.2652E1	2.67962E1	2.158E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.28681E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.15916E-1	-7.97868E-1	-9.13148E0	-9.14185E0	4.60148E-3	9.36747E-2	2.7334E1	-3.26614E1	-3.26325E1	2.67642E1	2.15624E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.2819E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.15535E-1	-7.97892E-1	-9.13146E0	-9.14183E0	4.22001E-3	9.38177E-2	2.72616E1	-3.26634E1	-3.2607E1	2.67839E1	2.15706E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.28086E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.15463E-1	-7.98059E-1	-9.1315E0	-9.14195E0	4.43459E-3	9.37223E-2	2.73204E1	-3.26703E1	-3.26644E1	2.6807E1	2.15696E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.26971E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.1563E-1	-7.97892E-1	-9.13177E0	-9.14173E0	4.36306E-3	9.36985E-2	2.73269E1	-3.26767E1	-3.2616E1	2.68238E1	2.15546E-9	2.51814E-3	2.51814E-3	6.29157E-3	2.27147E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.15773E-1	-7.97796E-1	-9.13138E0	-9.14185E0	4.64916E-3	9.37939E-2	2.72658E1	-3.26391E1	-3.2659E1	2.67908E1	2.159E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.27607E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.15701E-1	-7.97749E-1	-9.13131E0	-9.14185E0	4.52995E-3	9.36031E-2	2.73604E1	-3.26527E1	-3.25929E1	2.67945E1	2.15817E-9	2.51498E-3	2.51498E-3	6.32328E-3	2.27528E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16011E-1	-7.97796E-1	-9.13122E0	-9.14159E0	4.673E-3	9.34124E-2	2.72414E1	-3.26726E1	-3.2636E1	2.68117E1	2.15685E-9	2.51838E-3	2.51838E-3	6.3131E-3	2.28895E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.15773E-1	-7.98106E-1	-9.131E0	-9.14183E0	4.69685E-3	9.35793E-2	2.73153E1	-3.26969E1	-3.26224E1	2.68214E1	2.15257E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.26832E-2