[Scan]
initial_time=2016-01-27T19:56:39
final_time=2016-01-27T19:56:59
ip_count=19
run=1025
dataset=2
scan=159
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08844E-4
ql1_vset=
ql1_vmon=-8.15678E-1
ql1_imon=6.51634E-10
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=3.13258E-10
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=5.8465E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.49912E-10
mult1=-1.00313E-8
mult2=-2.86828E-9
rf_tmon=-3.87238E-3
rf_agc=3.4076E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=3.84057E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.98487E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=2.8162E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05222E1
cs_ea1_imon=2.65467E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34552E0
lens1_imon=2.7901E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64416E1
os_ef1alow_imon=2.99712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03961E1
cs_ea2_imon=1.51479E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.91999E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.86417E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=2.87891E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=1.88033E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.19827E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=2.92396E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=7.04324E-10
tplens_vset=1.4E-1
tplens_vmon=1.62341E0
tplens_imon=-9.02587E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2662E1
iondef3_imon=1.48847E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.86E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=1.7574E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33526E1
lens5b_imon=2.18098E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74886E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.13871E-1
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.20398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62819E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45767E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=2.86557E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.30361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73287E1
iondef1_imon=1.07246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.93362E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=2.7138E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.82119E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.97402E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93661E3
defgrida_imon=6.19678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=6.54646E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.56072E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3385E1
os_fil1_imon=4.96843E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.55438E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60521E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30665E1
cs_fil1_imon=9.96492E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63525E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62365E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.89945E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42408E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21673E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.27295E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.28368E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16321E-1	-7.97868E-1	-9.13143E0	-9.14168E0	4.81606E-3	9.3174E-2	2.7321E1	-3.26514E1	-3.26166E1	2.68004E1	2.15425E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.2769E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16131E-1	-7.97415E-1	-9.1316E0	-9.14156E0	4.72069E-3	9.36985E-2	2.72555E1	-3.26543E1	-3.26278E1	2.67839E1	2.15808E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.27607E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.15868E-1	-7.97892E-1	-9.13134E0	-9.1418E0	4.45843E-3	9.36747E-2	2.73315E1	-3.26705E1	-3.25996E1	2.6786E1	2.15533E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.27026E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16226E-1	-7.97892E-1	-9.13141E0	-9.14166E0	4.64916E-3	9.39846E-2	2.72919E1	-3.26308E1	-3.26098E1	2.68148E1	2.15987E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.28681E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16083E-1	-7.9782E-1	-9.13141E0	-9.14178E0	4.673E-3	9.39608E-2	2.72597E1	-3.26685E1	-3.26313E1	2.68184E1	2.15613E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.27888E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16202E-1	-7.97725E-1	-9.13136E0	-9.14145E0	4.31538E-3	9.37939E-2	2.73171E1	-3.26332E1	-3.26386E1	2.68136E1	2.15624E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.26832E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16226E-1	-7.98059E-1	-9.13155E0	-9.14173E0	4.41074E-3	9.35316E-2	2.72769E1	-3.2653E1	-3.26062E1	2.6801E1	2.15145E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.27097E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16202E-1	-7.97653E-1	-9.13134E0	-9.14152E0	4.19617E-3	9.37223E-2	2.73045E1	-3.26062E1	-3.26855E1	2.68082E1	2.15145E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.27888E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.15678E-1	-7.97796E-1	-9.13148E0	-9.1413E0	4.48227E-3	9.37462E-2	2.73476E1	-3.26673E1	-3.26142E1	2.68253E1	2.15894E-9	2.51334E-3	2.51334E-3	6.34588E-3	2.29278E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.15916E-1	-7.9782E-1	-9.13148E0	-9.14173E0	4.26769E-3	9.3627E-2	2.72721E1	-3.26987E1	-3.26194E1	2.67805E1	2.15706E-9	2.51225E-3	2.51225E-3	6.34037E-3	2.26506E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.15892E-1	-7.98225E-1	-9.13136E0	-9.1418E0	4.31538E-3	9.35793E-2	2.72769E1	-3.26609E1	-3.26645E1	2.6792E1	2.15992E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.2858E-2
1.5E1	0.0E0	1.0E0	6.06E2	4.11E2	-2.09449E0	-8.16202E-1	-7.98035E-1	-9.13143E0	-9.14152E0	4.22001E-3	9.35793E-2	2.72775E1	-3.26933E1	-3.26146E1	2.67625E1	2.15519E-9	2.5188E-3	2.5188E-3	6.34588E-3	2.28284E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.15868E-1	-7.9782E-1	-9.13112E0	-9.14176E0	4.33922E-3	9.38416E-2	2.72702E1	-3.26675E1	-3.262E1	2.67896E1	2.158E-9	2.51771E-3	2.51771E-3	6.3514E-3	2.27888E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.15797E-1	-7.97915E-1	-9.13129E0	-9.14204E0	4.55379E-3	9.3627E-2	2.73105E1	-3.26813E1	-3.26434E1	2.6795E1	2.15987E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.28483E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.15558E-1	-7.98225E-1	-9.13165E0	-9.14187E0	4.79221E-3	9.3627E-2	2.72894E1	-3.26579E1	-3.26081E1	2.67787E1	2.15332E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.29079E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16011E-1	-7.97939E-1	-9.13162E0	-9.14199E0	4.45843E-3	9.37939E-2	2.734E1	-3.2636E1	-3.26441E1	2.68088E1	2.15736E-9	2.51886E-3	2.51886E-3	6.31779E-3	2.27264E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.1594E-1	-7.98202E-1	-9.1316E0	-9.14185E0	4.74453E-3	9.39131E-2	2.73806E1	-3.26732E1	-3.26567E1	2.68088E1	2.15409E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.27776E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16035E-1	-7.97772E-1	-9.13155E0	-9.14178E0	4.81606E-3	9.37223E-2	2.72937E1	-3.26789E1	-3.26152E1	2.6801E1	2.15257E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.27219E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.15749E-1	-7.97915E-1	-9.13141E0	-9.14197E0	4.8399E-3	9.36985E-2	2.73105E1	-3.26296E1	-3.26543E1	2.68238E1	2.15519E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.27295E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.15678E-1	-7.98106E-1	-9.13126E0	-9.14199E0	4.79221E-3	9.32693E-2	2.73287E1	-3.2662E1	-3.2662E1	2.67926E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.27295E-2