[Scan]
initial_time=2016-01-27T20:54:13
final_time=2016-01-27T20:54:33
ip_count=19
run=1025
dataset=3
scan=161
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.79855E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-7.23588E-10
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=3.93689E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.90035E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=7.9633E-10
mult1=-2.09502E-8
mult2=-2.63078E-9
rf_tmon=-3.58115E-3
rf_agc=3.4361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=3.92818E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=2.77655E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02384E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04507E1
cs_ea1_imon=2.5714E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01132E0
lens1_imon=1.49592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6423E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.53606E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.91603E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.36795E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=2.88503E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15654E1
os_ea1_imon=1.89403E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.1836E0
cs_ionrep_imon=1.19827E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.91963E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=8.03268E-10
tplens_vset=1.4E-1
tplens_vmon=1.63422E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25954E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.56778E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.17101E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=1.75956E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.03057E-1
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62759E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35556E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.87098E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.31406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71591E1
iondef1_imon=1.08796E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.97992E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.23415E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.85818E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.56449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.24943E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46749E0
defgridb_imon=6.29411E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=5.34084E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.58732E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62542E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30706E1
cs_fil1_imon=9.97236E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62846E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62564E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.87335E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.24877E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21546E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20517E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=0
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.92929E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.453E3	1.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80017E1	-5.48363E-4	-8.80004E1	4.76837E-4	4.79221E-3	9.39369E-2	2.7432E1	-3.26733E1	-3.26345E1	2.67937E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0148E-1
2.0E0	9.7271E4	9.8E1	3.16E2	1.6E2	-7.286E-2	-8.80017E1	-4.76837E-4	-8.80005E1	3.09944E-4	4.98295E-3	9.37223E-2	2.74926E1	-3.26506E1	-3.2623E1	2.68112E1	1.20092E-7	2.51393E-3	2.51393E-3	6.33388E-3	2.99594E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80018E1	-4.76837E-4	-8.80006E1	6.4373E-4	5.00679E-3	9.38892E-2	2.72504E1	-3.2644E1	-3.26278E1	2.68271E1	1.19851E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.99941E-1
4.0E0	2.1009E4	1.6E1	6.55E2	3.98E2	-7.31692E-2	-8.80015E1	-4.52995E-4	-8.80005E1	4.29153E-4	4.93526E-3	9.408E-2	2.7134E1	-3.26526E1	-3.26555E1	2.67917E1	1.19913E-7	2.51116E-3	2.51116E-3	6.29098E-3	3.00302E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80014E1	-3.57628E-4	-8.80003E1	1.43051E-4	4.91142E-3	9.37223E-2	2.71074E1	-3.26639E1	-3.26074E1	2.6792E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80014E1	-4.05312E-4	-8.80003E1	4.29153E-4	5.26905E-3	9.35316E-2	2.72342E1	-3.26639E1	-3.26158E1	2.67872E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80014E1	-1.43051E-4	-8.80004E1	9.53674E-5	5.31673E-3	9.39369E-2	2.73098E1	-3.26779E1	-3.25995E1	2.68178E1	1.20174E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80012E1	1.19209E-4	-8.80002E1	9.53674E-5	4.98295E-3	9.36747E-2	2.73204E1	-3.26762E1	-3.25985E1	2.6789E1	1.20174E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.03185E-1
1.2E1	4.1E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80016E1	-2.86102E-4	-8.80003E1	4.76837E-5	4.64916E-3	9.39608E-2	2.72504E1	-3.26476E1	-3.25828E1	2.68058E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01347E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80014E1	-3.8147E-4	-8.80005E1	4.05312E-4	4.74453E-3	9.40084E-2	2.73877E1	-3.26608E1	-3.26437E1	2.68178E1	1.20278E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01871E-1
1.4E1	3.134E3	1.0E0	5.66E2	3.82E2	-7.14689E-2	-8.80016E1	-3.8147E-4	-8.80005E1	3.8147E-4	5.126E-3	9.377E-2	2.74896E1	-3.26549E1	-3.25996E1	2.6807E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
1.5E1	3.8E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80015E1	2.38419E-4	-8.80003E1	2.38419E-4	4.91142E-3	9.377E-2	2.75085E1	-3.26614E1	-3.26393E1	2.6803E1	1.20081E-7	2.51686E-3	2.51686E-3	6.30471E-3	3.01866E-1
1.6E1	2.77E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80016E1	1.66893E-4	-8.8E1	2.86102E-4	5.00679E-3	9.37462E-2	2.73844E1	-3.26771E1	-3.2623E1	2.67932E1					
1.7E1	2.89E2	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80017E1	-2.86102E-4	-8.80002E1	3.33786E-4	5.03063E-3	9.36508E-2	2.71378E1	-3.26402E1	-3.26175E1	2.68015E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1
1.8E1	1.079E3	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80017E1	-4.52995E-4	-8.80003E1	7.39098E-4	4.88758E-3	9.35555E-2	2.72108E1	-3.26488E1	-3.26152E1	2.67992E1	1.19831E-7	2.52093E-3	2.52093E-3	6.3126E-3	3.0E-1
1.9E1	1.008E3	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80015E1	-4.29153E-4	-8.80004E1	6.91414E-4	5.14984E-3	9.36985E-2	2.71291E1	-3.26705E1	-3.26158E1	2.6813E1	1.19925E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.02277E-1
2.0E1	2.304E4	1.0E1	8.08E2	5.58E2	-7.27053E-2	-8.80017E1	-2.86102E-4	-8.8E1	3.8147E-4	4.74453E-3	9.38654E-2	2.72143E1	-3.26632E1	-3.26248E1	2.67824E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01738E-1
2.1E1	4.1E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80019E1	-3.09944E-4	-8.79999E1	1.19209E-4	4.95911E-3	9.38416E-2	2.74856E1	-3.25971E1	-3.25346E1	2.68065E1	1.20055E-7	2.51739E-3	2.51739E-3	6.26985E-3	2.9892E-1
2.2E1	1.624E3	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80015E1	-3.57628E-4	-8.8E1	5.72205E-4	4.98295E-3	9.40323E-2	2.73299E1	-3.2675E1	-3.26189E1	2.67998E1	1.2026E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80015E1	-1.19209E-4	-8.80006E1	5.00679E-4	4.64916E-3	9.38416E-2	2.71591E1	-3.26585E1	-3.25954E1	2.68142E1	1.20517E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00966E-1