[Scan]
initial_time=2016-01-27T20:56:53
final_time=2016-01-27T20:57:13
ip_count=19
run=1025
dataset=3
scan=167
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.80872E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.2269E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=4.3478E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.8091E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=8.25262E-10
mult1=-1.82892E-8
mult2=-2.62679E-9
rf_tmon=-6.34494E-3
rf_agc=3.22821E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=4.08959E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64026E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=1.97731E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12439E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5365E1
cs_ef1b_imon=2.77539E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.01824E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0454E1
cs_ea1_imon=2.56981E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03596E0
lens1_imon=1.33986E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64585E1
os_ef1alow_imon=2.97835E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.53878E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=2.90989E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=4.1554E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10961E1
os_restr1_imon=2.8661E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=1.88635E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.17705E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93307E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01954E1
cs_anode1_imon=2.91892E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.69627E-10
tplens_vset=1.4E-1
tplens_vmon=1.64261E0
tplens_imon=-1.28996E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.58196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=4.33719E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31935E0
ionrepsh_imon=1.7561E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33445E1
lens5b_imon=2.18366E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74594E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.48676E-1
os_ea2_imon=-4.05069E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.1966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61755E0
os_ef2alow_imon=-2.48423E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.28305E-1
os_ef2bup_imon=-5.28876E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=2.88209E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.29999E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.23916E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71549E1
iondef1_imon=1.096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.08051E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.04948E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=3.42417E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14926E0
cs_ionaccel_imon=-1.57718E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02039E2
cs_ionfocb_imon=1.47105E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.7782E-6
window_vset=0.0E0
window_vmon=2.57651E-1
window_imon=-9.16887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39147E-4
mask2_vset=0.0E0
mask2_vmon=-1.86645E1
mask2_imon=-5.4851E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.39225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.42245E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.18342E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53109E0
defgridb_imon=6.30919E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3393E1
os_fil1_imon=4.93583E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55964E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62575E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30747E1
cs_fil1_imon=9.9832E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62934E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62589E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99037E-2
os_fil2_imon=-2.35062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35028E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.19208E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.49542E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21722E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.92221E-1
res40_imon=-2.48423E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.387E3	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80016E1	-4.76837E-4	-8.80003E1	5.24521E-4	4.57764E-3	9.41038E-2	2.72042E1	-3.26856E1	-3.26313E1	2.68088E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
2.0E0	9.6027E4	1.06E2	3.16E2	1.6E2	-7.17779E-2	-8.80016E1	-4.76837E-4	-8.80002E1	2.38419E-4	4.98295E-3	9.408E-2	2.73394E1	-3.26523E1	-3.26474E1	2.68016E1	1.20004E-7	2.52384E-3	2.52384E-3	6.33977E-3	2.99686E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.13143E-2	-8.80017E1	-3.09944E-4	-8.80004E1	1.19209E-4	4.76837E-3	9.38654E-2	2.72817E1	-3.26795E1	-3.25978E1	2.68022E1	1.20103E-7	2.51677E-3	2.51677E-3	6.32679E-3	3.00487E-1
4.0E0	2.0259E4	7.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80016E1	-4.52995E-4	-8.80002E1	3.09944E-4	4.91142E-3	9.41277E-2	2.7137E1	-3.26467E1	-3.26266E1	2.6804E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80019E1	-5.24521E-4	-8.80001E1	2.86102E-4	4.33922E-3	9.37939E-2	2.72222E1	-3.26699E1	-3.26645E1	2.68256E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80017E1	-5.48363E-4	-8.80004E1	2.86102E-4	4.673E-3	9.4223E-2	2.72886E1	-3.26756E1	-3.26378E1	2.68007E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80021E1	-5.96046E-4	-8.80004E1	2.38419E-4	4.26769E-3	9.39131E-2	2.72479E1	-3.26614E1	-3.26089E1	2.6822E1	1.20158E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80021E1	-2.14577E-4	-8.80003E1	3.33786E-4	4.81606E-3	9.40323E-2	2.7385E1	-3.26729E1	-3.26026E1	2.6792E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00197E-1
1.2E1	3.7E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80015E1	-3.09944E-4	-8.8E1	3.57628E-4	4.81606E-3	9.40323E-2	2.7495E1	-3.26573E1	-3.2639E1	2.68088E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80022E1	-5.48363E-4	-8.80001E1	1.66893E-4	4.57764E-3	9.38177E-2	2.73626E1	-3.26567E1	-3.26123E1	2.67914E1	1.19953E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.00197E-1
1.4E1	3.178E3	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80021E1	-5.48363E-4	-8.8E1	9.53674E-5	4.48227E-3	9.40323E-2	2.72546E1	-3.26585E1	-3.25979E1	2.67907E1	1.1988E-7	2.51679E-3	2.51679E-3	6.3282E-3	3.0E-1
1.5E1	3.8E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.8002E1	-5.72205E-4	-8.80003E1	0.0E0	4.55379E-3	9.40084E-2	2.73706E1	-3.26578E1	-3.26438E1	2.68569E1	1.20262E-7	2.51384E-3	2.51384E-3	6.3131E-3	2.99981E-1
1.6E1	2.36E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80017E1	-9.53674E-4	-8.80004E1	2.86102E-4	4.88758E-3	9.40084E-2	2.74838E1	-3.26909E1	-3.26402E1	2.67878E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00302E-1
1.7E1	2.64E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80017E1	-2.6226E-4	-8.80004E1	1.43051E-4	4.72069E-3	9.39369E-2	2.74944E1	-3.26723E1	-3.26645E1	2.67914E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.02922E-1
1.8E1	1.06E3	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80018E1	-5.48363E-4	-8.8E1	1.43051E-4	4.57764E-3	9.38177E-2	2.71855E1	-3.26813E1	-3.2605E1	2.68022E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.03976E-1
1.9E1	9.43E2	1.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80017E1	-4.76837E-4	-8.80002E1	3.33786E-4	4.74453E-3	9.38416E-2	2.73592E1	-3.26434E1	-3.26056E1	2.68346E1	1.20278E-7	2.51225E-3	2.51225E-3	6.34588E-3	3.00302E-1
2.0E1	2.2567E4	1.8E1	8.08E2	5.58E2	-7.23189E-2	-8.80015E1	-4.29153E-4	-8.80005E1	1.19209E-4	4.64916E-3	9.36508E-2	2.74779E1	-3.2649E1	-3.26443E1	2.67462E1	1.20174E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.00302E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.15461E-2	-8.80016E1	-3.57628E-4	-8.80002E1	2.14577E-4	4.64916E-3	9.39131E-2	2.74175E1	-3.26633E1	-3.26152E1	2.68238E1	1.20209E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.01738E-1
2.2E1	1.629E3	1.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80015E1	-3.57628E-4	-8.80003E1	9.53674E-5	4.72069E-3	9.39369E-2	2.72373E1	-3.2629E1	-3.26526E1	2.68088E1	1.20226E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00302E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80015E1	-5.24521E-4	-8.80002E1	-4.76837E-5	4.43459E-3	9.38654E-2	2.71549E1	-3.26561E1	-3.26164E1	2.68028E1	1.20106E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00966E-1