[Scan]
initial_time=2016-01-27T20:57:46
final_time=2016-01-27T20:58:06
ip_count=19
run=1025
dataset=3
scan=169
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.81004E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.14226E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=4.06098E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.82216E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.19612E-10
mult1=-2.04699E-8
mult2=-2.77813E-9
rf_tmon=-5.28815E-3
rf_agc=3.34448E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=4.24552E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=2.7989E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=2.57645E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03355E0
lens1_imon=1.38056E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64068E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.5238E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=2.90666E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=4.26698E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=2.87458E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=1.89115E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93225E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=2.92071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=8.83973E-10
tplens_vset=1.4E-1
tplens_vmon=1.65285E0
tplens_imon=-4.07495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2659E1
iondef3_imon=1.51154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26284E1
iondef2_imon=1.57715E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=4.51398E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.76425E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.73616E-1
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60236E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38559E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=2.87206E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29063E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.23704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72992E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68227E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=2.05802E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.35097E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.7978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.94828E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86939E1
mask2_imon=-7.995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.06918E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.03673E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.50959E0
defgridb_imon=5.93362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33966E1
os_fil1_imon=4.86031E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.9386E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62671E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30751E1
cs_fil1_imon=9.9681E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63333E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62853E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95074E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.2176E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.99613E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21572E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.30771E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.354E3	1.0E0	1.47E2	4.1E1	-7.201E-2	-8.80016E1	-5.00679E-4	-8.80002E1	-9.53674E-5	4.41074E-3	9.35555E-2	2.71494E1	-3.27039E1	-3.2593E1	2.68082E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
2.0E0	9.6745E4	1.04E2	3.16E2	1.6E2	-7.23189E-2	-8.80017E1	-6.67572E-4	-8.8E1	-7.15256E-5	4.62532E-3	9.38416E-2	2.73198E1	-3.2662E1	-3.25936E1	2.68186E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.02253E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80016E1	-1.66893E-4	-8.8E1	0.0E0	4.57764E-3	9.37462E-2	2.73724E1	-3.26585E1	-3.26104E1	2.68142E1	1.20004E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.02511E-1
4.0E0	2.0588E4	1.5E1	6.55E2	3.98E2	-7.23964E-2	-8.80013E1	-2.6226E-4	-8.80005E1	2.86102E-4	4.52995E-3	9.37462E-2	2.74933E1	-3.26738E1	-3.26449E1	2.68046E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80015E1	-7.62939E-4	-8.80006E1	4.76837E-5	4.93526E-3	9.3627E-2	2.72456E1	-3.2647E1	-3.26284E1	2.68064E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80013E1	-7.15256E-4	-8.80003E1	1.90735E-4	4.36306E-3	9.38177E-2	2.73015E1	-3.26825E1	-3.26314E1	2.68058E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80016E1	-6.67572E-4	-8.80002E1	2.86102E-4	4.673E-3	9.37223E-2	2.73604E1	-3.26567E1	-3.26248E1	2.68151E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01609E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80015E1	-6.91414E-4	-8.8E1	1.90735E-4	4.79221E-3	9.34601E-2	2.71884E1	-3.26676E1	-3.26271E1	2.68094E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.99175E-1
1.2E1	4.1E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80015E1	-4.76837E-4	-8.8E1	1.66893E-4	4.55379E-3	9.34601E-2	2.73226E1	-3.26609E1	-3.26391E1	2.68232E1	1.19991E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.00852E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80016E1	-8.34465E-4	-8.80005E1	3.33786E-4	4.57764E-3	9.34124E-2	2.74355E1	-3.2605E1	-3.2635E1	2.68022E1	1.20262E-7	2.51725E-3	2.51725E-3	6.34164E-3	2.9944E-1
1.4E1	3.101E3	1.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80019E1	-6.91414E-4	-8.80001E1	4.29153E-4	4.81606E-3	9.35078E-2	2.74006E1	-3.26585E1	-3.26122E1	2.68028E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
1.5E1	3.9E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80015E1	-7.86781E-4	-8.8E1	1.19209E-4	4.79221E-3	9.36747E-2	2.71309E1	-3.26609E1	-3.26446E1	2.68016E1	1.19601E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.01085E-1
1.6E1	2.37E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80017E1	-8.58307E-4	-8.80002E1	1.19209E-4	4.8399E-3	9.40084E-2	2.72066E1	-3.2675E1	-3.26579E1	2.6771E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
1.7E1	3.03E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80016E1	-5.72205E-4	-8.80003E1	3.09944E-4	4.36306E-3	9.39608E-2	2.73957E1	-3.26505E1	-3.26199E1	2.681E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
1.8E1	1.105E3	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80018E1	-4.29153E-4	-8.80002E1	2.86102E-4	4.76837E-3	9.39369E-2	2.73123E1	-3.26681E1	-3.26182E1	2.6813E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02659E-1
1.9E1	9.34E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80015E1	-5.96046E-4	-8.80002E1	4.52995E-4	4.76837E-3	9.37223E-2	2.72367E1	-3.26655E1	-3.26231E1	2.67902E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
2.0E1	2.2693E4	1.0E1	8.08E2	5.58E2	-7.34782E-2	-8.80013E1	-1.09673E-3	-8.80002E1	4.76837E-4	4.60148E-3	9.35078E-2	2.74095E1	-3.26703E1	-3.26472E1	2.67984E1	1.20122E-7	2.50898E-3	2.50898E-3	6.32386E-3	2.9926E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80015E1	-6.91414E-4	-8.80001E1	3.8147E-4	4.95911E-3	9.377E-2	2.74E1	-3.26416E1	-3.26332E1	2.68088E1	1.2026E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01223E-1
2.2E1	1.633E3	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.8002E1	-9.29832E-4	-8.80003E1	7.15256E-5	5.10216E-3	9.36031E-2	2.71535E1	-3.26555E1	-3.25888E1	2.67728E1	1.20414E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80017E1	-8.34465E-4	-8.80001E1	1.19209E-4	4.74453E-3	9.377E-2	2.72992E1	-3.26284E1	-3.2659E1	2.68227E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1