[Scan]
initial_time=2016-01-27T20:58:40
final_time=2016-01-27T20:58:59
ip_count=19
run=1025
dataset=3
scan=171
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.79312E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.17814E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=4.13597E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.71243E-9
ql4_vset=
ql4_vmon=-1.90735E-4
ql4_imon=8.78048E-10
mult1=-1.06073E-8
mult2=-2.73857E-9
rf_tmon=-5.0772E-3
rf_agc=3.25705E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=4.22478E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61725E0
bslens_imon=2.42646E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1924E1
lens5a_imon=1.96563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05171E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=2.7798E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04522E1
cs_ea1_imon=2.52202E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97933E0
lens1_imon=1.72212E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04469E1
cs_ea2_imon=1.53949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.91026E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=4.02343E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11081E1
os_restr1_imon=2.87891E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=1.87219E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21257E0
cs_ionrep_imon=1.17245E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.92612E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=7.71093E-10
tplens_vset=1.4E-1
tplens_vmon=1.67683E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25888E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2635E1
iondef2_imon=1.58444E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98438E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=4.0859E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26095E0
ionrepsh_imon=1.73486E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33852E1
lens5b_imon=2.19746E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62833E-1
os_ea2_imon=-4.72318E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06052E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62639E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56579E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=2.86125E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.323E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.23632E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73435E1
iondef1_imon=1.1098E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.04322E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=3.4821E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=1.9692E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=8.178E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.15157E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.68168E0
defgridb_imon=6.57818E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33936E1
os_fil1_imon=6.03761E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.20289E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62415E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30729E1
cs_fil1_imon=9.95963E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64726E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62902E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06635E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23872E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28826E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21656E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.41272E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.4E3	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80018E1	-4.52995E-4	-8.8E1	-9.53674E-5	4.76837E-3	9.42469E-2	2.7288E1	-3.26762E1	-3.26207E1	2.6792E1	1.20209E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.99175E-1
2.0E0	9.6405E4	9.6E1	3.16E2	1.6E2	-7.27053E-2	-8.80017E1	-5.48363E-4	-8.79997E1	-7.15256E-5	4.64916E-3	9.39846E-2	2.74012E1	-3.26585E1	-3.26278E1	2.6816E1	1.19757E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.8002E1	-5.24521E-4	-8.79999E1	1.66893E-4	4.76837E-3	9.40561E-2	2.73234E1	-3.26242E1	-3.26419E1	2.68012E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02922E-1
4.0E0	2.0719E4	2.1E1	6.55E2	3.98E2	-7.33239E-2	-8.80019E1	-3.8147E-4	-8.79999E1	1.19209E-4	4.88758E-3	9.40561E-2	2.72301E1	-3.26713E1	-3.26159E1	2.67931E1	1.20004E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.03286E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80018E1	-4.29153E-4	-8.80001E1	0.0E0	4.74453E-3	9.41277E-2	2.73171E1	-3.26681E1	-3.2611E1	2.6822E1	1.20064E-7	2.52568E-3	2.52568E-3	6.3074E-3	3.01609E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80016E1	-7.39098E-4	-8.80002E1	4.52995E-4	4.91142E-3	9.41277E-2	2.71717E1	-3.26434E1	-3.26446E1	2.68286E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80019E1	-4.05312E-4	-8.80004E1	3.57628E-4	4.88758E-3	9.40561E-2	2.74148E1	-3.26467E1	-3.26266E1	2.67998E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80017E1	-3.33786E-4	-8.80005E1	4.29153E-4	4.98295E-3	9.38892E-2	2.73634E1	-3.26212E1	-3.26152E1	2.67845E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9952E-1
1.2E1	4.6E1	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80019E1	-6.19888E-4	-8.80002E1	1.66893E-4	4.69685E-3	9.40084E-2	2.71333E1	-3.26777E1	-3.26362E1	2.68119E1	1.20158E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.12368E-2	-8.80018E1	-5.96046E-4	-8.80006E1	4.52995E-4	4.69685E-3	9.377E-2	2.71453E1	-3.26422E1	-3.26206E1	2.67956E1	1.19757E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01871E-1
1.4E1	3.115E3	3.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80018E1	-6.4373E-4	-8.80006E1	4.29153E-4	4.43459E-3	9.39131E-2	2.72889E1	-3.26873E1	-3.26344E1	2.67992E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
1.5E1	2.8E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80018E1	-4.29153E-4	-8.80004E1	3.09944E-4	4.98295E-3	9.40323E-2	2.74553E1	-3.26603E1	-3.26224E1	2.68112E1	1.19872E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.01475E-1
1.6E1	2.57E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80021E1	-5.24521E-4	-8.80001E1	4.76837E-4	5.26905E-3	9.39131E-2	2.74968E1	-3.26639E1	-3.26164E1	2.68076E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00966E-1
1.7E1	2.53E2	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80021E1	-5.96046E-4	-8.80003E1	1.19209E-4	4.93526E-3	9.39608E-2	2.74649E1	-3.26518E1	-3.26512E1	2.67868E1	1.20084E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.99879E-1
1.8E1	1.125E3	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80021E1	-1.19209E-4	-8.80005E1	3.09944E-4	4.48227E-3	9.36985E-2	2.74343E1	-3.26621E1	-3.26056E1	2.68113E1	1.2026E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.01223E-1
1.9E1	1.002E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.8002E1	-1.66893E-4	-8.80004E1	1.19209E-4	4.72069E-3	9.39369E-2	2.72433E1	-3.26517E1	-3.25709E1	2.6795E1	1.20122E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.03976E-1
2.0E1	2.2738E4	1.4E1	8.08E2	5.58E2	-7.30918E-2	-8.80021E1	-3.57628E-4	-8.80003E1	1.90735E-4	4.45843E-3	9.37223E-2	2.72883E1	-3.26955E1	-3.26359E1	2.6796E1	1.19819E-7	2.52362E-3	2.52362E-3	6.32978E-3	2.99613E-1
2.1E1	3.6E1	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80021E1	-4.05312E-4	-8.80004E1	2.38419E-4	4.57764E-3	9.39369E-2	2.73723E1	-3.26779E1	-3.26095E1	2.68166E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.98842E-1
2.2E1	1.59E3	3.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80019E1	-3.33786E-4	-8.80002E1	7.15256E-5	4.74453E-3	9.40323E-2	2.71525E1	-3.26657E1	-3.26074E1	2.68094E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.8002E1	-5.24521E-4	-8.80005E1	-1.90735E-4	4.33922E-3	9.37462E-2	2.73435E1	-3.2635E1	-3.25888E1	2.67974E1	1.20017E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00563E-1