[Scan]
initial_time=2016-01-27T20:59:33
final_time=2016-01-27T20:59:52
ip_count=19
run=1025
dataset=3
scan=173
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.72625E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.98686E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=4.01092E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.80603E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=8.02195E-10
mult1=-1.49964E-8
mult2=-2.79577E-9
rf_tmon=-4.89881E-3
rf_agc=3.29139E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=4.07362E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62772E0
bslens_imon=2.32527E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1937E1
lens5a_imon=1.97881E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05257E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53767E1
cs_ef1b_imon=2.78117E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.0214E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04415E1
cs_ea1_imon=2.56434E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02828E0
lens1_imon=1.64203E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6449E1
os_ef1alow_imon=2.98776E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04085E1
cs_ea2_imon=1.53565E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.848E1
cs_ef1a_imon=2.90393E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=4.13787E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11217E1
os_restr1_imon=2.87922E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15109E1
os_ea1_imon=1.87117E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.0933E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22665E0
cs_ionrep_imon=1.1948E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01591E1
cs_anode1_imon=2.92601E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=8.04782E-10
tplens_vset=1.4E-1
tplens_vmon=1.60581E0
tplens_imon=-3.58085E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26042E1
iondef3_imon=1.49939E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26596E1
iondef2_imon=1.59329E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.983E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=4.125E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25528E0
ionrepsh_imon=1.75284E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.19829E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74707E1
cs_ef2b_imon=3.12698E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41863E-1
os_ea2_imon=-5.98557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71295E1
cs_ef2a_imon=3.17901E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63778E0
os_ef2alow_imon=-2.5556E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36503E-1
os_ef2bup_imon=-5.23529E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1093E1
os_restr2_imon=2.85976E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.32066E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01796E1
cs_anode2_imon=2.24037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74066E1
iondef1_imon=1.10319E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68192E1
iondef4_imon=1.08353E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.99868E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=3.33762E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12453E0
cs_ionaccel_imon=-1.74346E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56355E1
einzel_imon=7.69158E-6
window_vset=0.0E0
window_vmon=1.95765E-1
window_imon=-9.35065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39204E-4
mask2_vset=0.0E0
mask2_vmon=-1.86675E1
mask2_imon=-6.20688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=8.0317E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.43619E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=6.80644E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.75851E0
defgridb_imon=6.17663E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33923E1
os_fil1_imon=4.4983E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.27405E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62454E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30719E1
cs_fil1_imon=9.9776E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63314E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6293E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.94543E-2
os_fil2_imon=-2.44419E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.678E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.24658E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32206E-1
cs_fil2_imon=-2.53775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36701E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21708E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.5482E-1
res40_imon=-2.42461E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.493E3	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80019E1	-7.62939E-4	-8.79999E1	5.24521E-4	5.14984E-3	9.38416E-2	2.73569E1	-3.26488E1	-3.26602E1	2.67995E1	1.201E-7	2.51952E-3	2.51952E-3	6.33021E-3	3.00251E-1
2.0E0	9.6841E4	7.0E1	3.16E2	1.6E2	-7.36328E-2	-8.80017E1	-3.8147E-4	-8.79998E1	5.72205E-4	5.31673E-3	9.39846E-2	2.72862E1	-3.26667E1	-3.26378E1	2.67989E1	1.20344E-7	2.51498E-3	2.51498E-3	6.28103E-3	2.99093E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80016E1	-2.6226E-4	-8.79998E1	3.09944E-4	5.34058E-3	9.38654E-2	2.71995E1	-3.26856E1	-3.26372E1	2.68082E1	1.19991E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.99845E-1
4.0E0	2.0694E4	1.3E1	6.55E2	3.98E2	-7.286E-2	-8.80015E1	-3.57628E-4	-8.80001E1	5.48363E-4	5.126E-3	9.40323E-2	2.74762E1	-3.26573E1	-3.26543E1	2.6792E1	1.19965E-7	2.50898E-3	2.50898E-3	6.31837E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80015E1	-3.09944E-4	-8.80001E1	5.72205E-4	5.126E-3	9.39608E-2	2.73694E1	-3.26873E1	-3.26278E1	2.68274E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80016E1	-3.57628E-4	-8.79999E1	5.00679E-4	4.98295E-3	9.41515E-2	2.71543E1	-3.26464E1	-3.26344E1	2.68136E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80015E1	-9.77516E-4	-8.80002E1	3.57628E-4	4.3869E-3	9.36985E-2	2.71261E1	-3.26527E1	-3.25988E1	2.68215E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80016E1	-8.10623E-4	-8.80002E1	3.33786E-4	4.86374E-3	9.408E-2	2.73345E1	-3.26663E1	-3.26152E1	2.68142E1	1.19851E-7	2.51203E-3	2.51203E-3	6.29128E-3	3.01738E-1
1.2E1	3.9E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80017E1	-5.72205E-4	-8.79999E1	4.29153E-4	4.55379E-3	9.377E-2	2.72576E1	-3.26591E1	-3.26188E1	2.68196E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3514E-3	3.00563E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80018E1	-3.09944E-4	-8.8E1	5.72205E-4	5.03063E-3	9.38892E-2	2.73942E1	-3.26626E1	-3.26785E1	2.67914E1	1.20158E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.99941E-1
1.4E1	3.142E3	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80016E1	-8.10623E-4	-8.80004E1	4.29153E-4	4.98295E-3	9.39131E-2	2.73201E1	-3.26476E1	-3.2596E1	2.68112E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.02659E-1
1.5E1	3.1E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80017E1	-9.29832E-4	-8.80001E1	6.19888E-4	4.79221E-3	9.38177E-2	2.72E1	-3.26416E1	-3.26482E1	2.67862E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02396E-1
1.6E1	2.46E2	0.0E0	6.47E2	4.41E2	-7.12368E-2	-8.80016E1	-7.62939E-4	-8.80003E1	3.57628E-4	4.52995E-3	9.34839E-2	2.73287E1	-3.26732E1	-3.26136E1	2.68118E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02253E-1
1.7E1	2.7E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80017E1	-7.62939E-4	-8.8E1	5.00679E-4	4.81606E-3	9.39369E-2	2.74175E1	-3.26777E1	-3.26266E1	2.68028E1	1.19653E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
1.8E1	1.155E3	1.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80019E1	-1.04904E-3	-8.80004E1	4.76837E-4	5.03063E-3	9.38177E-2	2.74998E1	-3.2663E1	-3.26459E1	2.67984E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00824E-1
1.9E1	1.001E3	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80015E1	-8.82149E-4	-8.80003E1	1.43051E-4	5.17368E-3	9.37939E-2	2.74723E1	-3.26672E1	-3.26285E1	2.68124E1	1.20453E-7	2.52364E-3	2.52364E-3	6.29721E-3	3.00149E-1
2.0E1	2.282E4	1.2E1	8.08E2	5.58E2	-7.32464E-2	-8.80015E1	-7.15256E-4	-8.80003E1	-1.19209E-4	4.76837E-3	9.3627E-2	2.73257E1	-3.2685E1	-3.26183E1	2.67992E1	1.20262E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.00794E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80019E1	-2.86102E-4	-8.80001E1	9.53674E-5	4.3869E-3	9.377E-2	2.71977E1	-3.26425E1	-3.26207E1	2.6825E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.00197E-1
2.2E1	1.603E3	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.8002E1	-6.67572E-4	-8.79998E1	2.38419E-5	4.64916E-3	9.41277E-2	2.71729E1	-3.26711E1	-3.26512E1	2.67902E1	1.19653E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80021E1	-9.53674E-4	-8.80001E1	4.05312E-4	4.55379E-3	9.41277E-2	2.74066E1	-3.26596E1	-3.26042E1	2.68192E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0071E-1