[Scan]
initial_time=2016-01-27T21:00:00
final_time=2016-01-27T21:00:19
ip_count=19
run=1025
dataset=3
scan=174
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.77628E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.36232E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=3.99518E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.7772E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.13878E-10
mult1=-2.09983E-8
mult2=-2.73658E-9
rf_tmon=-4.7888E-3
rf_agc=3.31473E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=4.18317E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.64951E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=2.78484E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0485E1
cs_ea1_imon=2.54869E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97947E0
lens1_imon=1.4058E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04129E1
cs_ea2_imon=1.53281E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83926E1
cs_ef1a_imon=2.89404E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=4.13954E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=2.88251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=1.88718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24068E0
cs_ionrep_imon=1.18025E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.92756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=7.70271E-10
tplens_vset=1.4E-1
tplens_vmon=1.63242E0
tplens_imon=-3.13766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.47009E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=4.03011E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24909E0
ionrepsh_imon=1.7419E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33321E1
lens5b_imon=2.19721E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.4211E-1
os_ea2_imon=-4.00285E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.0036E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.19065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62939E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34955E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.86233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01533E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73802E1
iondef1_imon=1.10959E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.99761E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=3.3356E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86879E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.57027E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.03673E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52463E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33939E1
os_fil1_imon=4.62606E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68342E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6257E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30688E1
cs_fil1_imon=9.96492E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63507E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62896E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.18304E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.70801E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21709E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.13952E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.344E3	6.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80017E1	-6.67572E-4	-8.8E1	-1.19209E-4	4.91142E-3	9.35793E-2	2.72337E1	-3.26773E1	-3.2636E1	2.68076E1	1.19757E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.02922E-1
2.0E0	9.6744E4	8.6E1	3.16E2	1.6E2	-7.22418E-2	-8.80019E1	-4.76837E-4	-8.79998E1	9.53674E-5	4.72069E-3	9.35316E-2	2.74667E1	-3.26585E1	-3.26462E1	2.68118E1	1.20192E-7	2.51287E-3	2.51287E-3	6.34982E-3	2.99093E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.8002E1	-4.52995E-4	-8.8E1	2.38419E-5	4.52995E-3	9.34124E-2	2.7476E1	-3.26729E1	-3.2597E1	2.68105E1	1.19872E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.97236E-1
4.0E0	2.0579E4	6.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80019E1	-9.53674E-5	-8.79998E1	9.53674E-5	4.48227E-3	9.36031E-2	2.72522E1	-3.26783E1	-3.26398E1	2.68052E1	1.20344E-7	2.52765E-3	2.52765E-3	6.33388E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80018E1	-4.05312E-4	-8.80001E1	5.00679E-4	4.72069E-3	9.38654E-2	2.71848E1	-3.26691E1	-3.26378E1	2.68124E1	1.20174E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80018E1	-5.72205E-4	-8.80001E1	4.05312E-4	4.88758E-3	9.37223E-2	2.73759E1	-3.26449E1	-3.26231E1	2.68105E1	1.20069E-7	2.51662E-3	2.51662E-3	6.35692E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.8002E1	-7.62939E-4	-8.79999E1	1.66893E-4	5.03063E-3	9.36508E-2	2.71772E1	-3.26836E1	-3.26181E1	2.68101E1	1.198E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80018E1	-8.34465E-4	-8.80003E1	-2.38419E-5	4.74453E-3	9.35316E-2	2.73748E1	-3.26597E1	-3.25918E1	2.68124E1	1.20137E-7	2.51248E-3	2.51248E-3	6.29624E-3	3.0041E-1
1.2E1	3.8E1	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80019E1	-6.19888E-4	-8.80001E1	1.43051E-4	5.126E-3	9.37462E-2	2.71627E1	-3.26561E1	-3.26218E1	2.68034E1	1.20004E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01223E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80018E1	-7.86781E-4	-8.79997E1	7.15256E-5	4.86374E-3	9.35555E-2	2.71025E1	-3.26687E1	-3.26374E1	2.6802E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
1.4E1	3.152E3	1.0E0	5.66E2	3.82E2	-7.13915E-2	-8.80019E1	-5.48363E-4	-8.79998E1	4.05312E-4	4.74453E-3	9.35078E-2	2.72237E1	-3.2661E1	-3.26266E1	2.68362E1	1.1979E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.006E-1
1.5E1	3.0E1	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80019E1	-6.19888E-4	-8.79998E1	1.19209E-4	4.95911E-3	9.34839E-2	2.74042E1	-3.26963E1	-3.26056E1	2.68005E1	1.20045E-7	2.52066E-3	2.52066E-3	6.3074E-3	3.02426E-1
1.6E1	2.58E2	0.0E0	6.47E2	4.41E2	-7.11597E-2	-8.80016E1	-5.72205E-4	-8.8E1	4.52995E-4	4.98295E-3	9.38892E-2	2.73098E1	-3.26325E1	-3.26372E1	2.67944E1	1.20278E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9926E-1
1.7E1	2.52E2	0.0E0	6.87E2	4.7E2	-7.17007E-2	-8.8002E1	-3.8147E-4	-8.80001E1	3.57628E-4	5.05447E-3	9.377E-2	2.72811E1	-3.26494E1	-3.26266E1	2.6786E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01738E-1
1.8E1	1.074E3	1.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80017E1	-3.09944E-4	-8.80002E1	4.05312E-4	4.8399E-3	9.39369E-2	2.71921E1	-3.26741E1	-3.26032E1	2.67968E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.99E-1
1.9E1	9.1E2	0.0E0	7.68E2	5.29E2	-7.12368E-2	-8.80017E1	-4.05312E-4	-8.80003E1	2.38419E-4	4.81606E-3	9.36985E-2	2.7385E1	-3.26819E1	-3.26314E1	2.67848E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
2.0E1	2.2792E4	1.1E1	8.08E2	5.58E2	-7.21643E-2	-8.8002E1	-3.8147E-4	-8.80005E1	7.15256E-5	4.95911E-3	9.37223E-2	2.73057E1	-3.26579E1	-3.2613E1	2.68346E1	1.20088E-7	2.51701E-3	2.51701E-3	6.31555E-3	3.00507E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80018E1	-6.67572E-4	-8.80002E1	9.53674E-5	4.55379E-3	9.36985E-2	2.72331E1	-3.26537E1	-3.26378E1	2.6792E1					
2.2E1	1.673E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80016E1	-8.10623E-4	-8.79999E1	-2.6226E-4	4.62532E-3	9.36985E-2	2.74933E1	-3.26337E1	-3.26325E1	2.68214E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9926E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80018E1	-7.62939E-4	-8.8E1	7.15256E-5	4.76837E-3	9.39608E-2	2.73802E1	-3.26416E1	-3.26398E1	2.68064E1	1.20004E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01223E-1